Patents by Inventor Warren M. Farnworth

Warren M. Farnworth has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20110031614
    Abstract: Packaged semiconductor components and methods for manufacturing packaged semiconductor components. In one embodiment a semiconductor component comprises a die having a semiconductor substrate and an integrated circuit. The substrate has a first side, a second side, a sidewall between the first and second sides, a first indentation at the sidewall around a periphery of the first side, and a second indentation at the sidewall around a periphery of the second side. The component can further include a first exterior cover at the first side and a second exterior cover at the second side. The first exterior cover has a first extension in the first indentation, and the second exterior cover has a second extension in the second indentation. The first and second extensions are spaced apart from each other by an exposed portion of the sidewall.
    Type: Application
    Filed: October 18, 2010
    Publication date: February 10, 2011
    Applicant: MICRON TECHNOLOGY, INC.
    Inventor: Warren M. Farnworth
  • Patent number: 7880307
    Abstract: Semiconductor devices including through-wafer interconnects are disclosed. According to an embodiment of the present invention, a semiconductor device may comprise a substrate having a first surface and a second, opposing surface, and a through-wafer interconnect extending into the first surface of the substrate. The through-wafer interconnect may include an electrically conductive material extending from the first surface of the substrate to the second, opposing surface of the substrate. The through-wafer interconnect may also include a first dielectric material disposed between the electrically conductive material and the substrate and extending from the second, opposing surface of the substrate to the first portion of the conductive material.
    Type: Grant
    Filed: August 6, 2008
    Date of Patent: February 1, 2011
    Assignee: Micron Technology, Inc.
    Inventors: Warren M. Farnworth, Alan G. Wood
  • Patent number: 7875529
    Abstract: Methods, devices, modules, and systems providing semiconductor devices in a stacked wafer system are described herein. One embodiment includes a first wafer for NMOS transistors in a CMOS architecture and a second wafer for PMOS transistors in the CMOS architecture, with the first wafer being bonded and electrically coupled to the second wafer to form at least one CMOS device. Another embodiment includes a number of DRAM capacitors formed on a first wafer and support circuitry associated with the DRAM capacitors formed on a second wafer, with the first wafer being bonded and electrically coupled to the second wafer to form a number of DRAM cells. Another embodiment includes a first wafer having a number of vertical transistors coupled to a data line and a second wafer having amplifier circuitry associated with the number of vertical transistors, with the first wafer being bonded and electrically coupled to the second wafer.
    Type: Grant
    Filed: October 5, 2007
    Date of Patent: January 25, 2011
    Assignee: Micron Technology, Inc.
    Inventors: Leonard Forbes, Paul A. Farrar, Arup Bhattacharyya, Hussein I. Hanafi, Warren M. Farnworth
  • Patent number: 7872332
    Abstract: Interconnect structures for stacked dies, including penetrating structures for through-silicon vias, and associated systems and methods are disclosed. A system in accordance with a particular embodiment includes a first semiconductor substrate having a first substrate material, and a penetrating structure carried by the first semiconductor substrate. The system further includes a second semiconductor substrate having a second substrate material with a preformed recess. The penetrating structure of the first semiconductor substrate is received in the recess of the second semiconductor substrate and is mechanically engaged with the recess and secured to the second semiconductor substrate.
    Type: Grant
    Filed: September 11, 2008
    Date of Patent: January 18, 2011
    Assignee: Micron Technology, Inc.
    Inventors: Owen R. Fay, Warren M. Farnworth, David R. Hembree
  • Patent number: 7871859
    Abstract: A vertically mountable semiconductor device assembly including a semiconductor device and a mechanism for attaching the semiconductor device to a carrier substrate. The semiconductor device has each of its bond pads disposed proximate a single edge thereof. Preferably, at least a portion of the semiconductor device is exposed. An alignment device is attached to a carrier substrate. A mounting element on the vertically mountable semiconductor device package engages the alignment device to interconnect the semiconductor device and the alignment device. Preferably, the alignment device secures the vertically mountable semiconductor device package perpendicular relative to the carrier substrate. The distance between the bond pads and corresponding terminals on the carrier substrate is very small in order to reduce impedance. The vertically mountable semiconductor device package may also be readily user-upgradable.
    Type: Grant
    Filed: July 23, 2002
    Date of Patent: January 18, 2011
    Assignee: Round Rock Research, LLC
    Inventors: Larry D. Kinsman, Jerry M. Brooks, Warren M. Farnworth, Walter L. Moden, Terry R. Lee
  • Publication number: 20100327462
    Abstract: Methods for wafer-level packaging of microfeature devices and microfeature devices formed using such methods are disclosed herein. A method for packaging microfeature devices in accordance with an embodiment of the invention can include releasably attaching a plurality of first known good microelectronic dies to a carrier substrate in a desired arrangement. In several embodiments, for example, the first dies can be releasably attached to an attachment feature on the carrier substrate. The method can also include attaching one or more second known good microelectronic dies to the individual first dies in a stacked configuration to form a plurality of stacked devices. The method further includes at least partially encapsulating the stacked devices and separating the stacked devices from each other.
    Type: Application
    Filed: September 2, 2010
    Publication date: December 30, 2010
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: Warren M. Farnworth, Alan G. Wood
  • Patent number: 7855140
    Abstract: Methods for forming through vias in a semiconductor substrate and resulting structures are disclosed. In one embodiment, a through via may be formed by forming a partial via from an active surface through a conductive element thereon and a portion of the substrate underlying the conductive element. The through via may then be completed by laser ablation or drilling from a back surface. In another embodiment, a partial via may be formed by laser ablation or drilling from the back surface of a substrate to a predetermined distance therein. The through via may be completed from the active surface by forming a partial via extending through the conductive element and the underlying substrate to intersect the laser-drilled partial via. In another embodiment, a partial via may first be formed by laser ablation or drilling from the back surface of the substrate followed by dry etching to complete the through via.
    Type: Grant
    Filed: July 20, 2007
    Date of Patent: December 21, 2010
    Assignee: Micron Technology, Inc.
    Inventors: Charles M. Watkins, Kyle K. Kirby, Alan G. Wood, Salman Akram, Warren M. Farnworth
  • Patent number: 7833832
    Abstract: A method for fabricating a semiconductor component with through interconnects can include the steps of providing a semiconductor substrate with substrate contacts, and forming openings from a backside of the substrate aligned with the substrate contacts. The method can also include the steps of providing an interposer substrate (or alternately a second semiconductor substrate), forming projections on the interposer substrate (or on the second semiconductor substrate), and forming conductive vias in the projections. The method can also include the steps of placing the projections in physical contact with the openings, and placing the conductive vias in electrical contact with the substrate contacts. The method can also include the steps of bonding the conductive vias to the substrate contacts, and forming terminal contacts on the interposer substrate (or alternately on one of the semiconductor substrates) in electrical communication with the conductive vias.
    Type: Grant
    Filed: March 27, 2009
    Date of Patent: November 16, 2010
    Assignee: Micron Technology, Inc.
    Inventors: Alan G. Wood, Warren M. Farnworth, David R. Hembree
  • Patent number: 7833456
    Abstract: Systems and methods for compressing an encapsulant adjacent a semiconductor workpiece are disclosed. A method in accordance with one aspect includes placing a semiconductor workpiece and an encapsulant in a mold cavity and driving some of the encapsulant from the mold cavity to an overflow chamber. The method can further include applying pressure to the encapsulant in the mold cavity via pressure applied to the encapsulant in the overflow chamber.
    Type: Grant
    Filed: February 23, 2007
    Date of Patent: November 16, 2010
    Assignee: Micron Technology, Inc.
    Inventor: Warren M. Farnworth
  • Patent number: 7833881
    Abstract: Packaged semiconductor components and methods for manufacturing packaged semiconductor components. In one embodiment a semiconductor component comprises a die having a semiconductor substrate and an integrated circuit. The substrate has a first side, a second side, a sidewall between the first and second sides, a first indentation at the sidewall around a periphery of the first side, and a second indentation at the sidewall around a periphery of the second side. The component can further include a first exterior cover at the first side and a second exterior cover at the second side. The first exterior cover has a first extension in the first indentation, and the second exterior cover has a second extension in the second indentation. The first and second extensions are spaced apart from each other by an exposed portion of the sidewall.
    Type: Grant
    Filed: March 2, 2007
    Date of Patent: November 16, 2010
    Assignee: Micron Technology, Inc.
    Inventor: Warren M. Farnworth
  • Patent number: 7829385
    Abstract: Printed tape is used to form a leads on chip (LOC) ball grid array (BGA) semiconductor device. Leads for a plurality of devices may be applied simultaneously. Bond wires, glob top encapsulant, and the ball grid arrays for the devices may be formed in single process steps. A low temperature curing adhesive material may be used to reduce the effects of differential thermal expansion between the tape and surface of the wafer. In another embodiment of the invention, anisotropically conductive adhesive material is used to connect bond pads on a wafer to leads printed on a tape.
    Type: Grant
    Filed: July 26, 2006
    Date of Patent: November 9, 2010
    Assignee: Micron Technology, Inc.
    Inventor: Warren M. Farnworth
  • Patent number: 7829976
    Abstract: Microelectronic devices, methods for packaging microelectronic devices, and methods for forming interconnects in microelectronic devices are disclosed herein. In one embodiment, a method comprises providing a microelectronic substrate having a front side and a backside. The substrate has a microelectronic die including an integrated circuit and a terminal operatively coupled to the integrated circuit. The method also includes forming a passage at least partially through the substrate and having an opening at the front side and/or backside of the substrate. The method further includes sealing the opening with a conductive cap that closes one end of the passage while another end of the passage remains open. The method then includes filling the passage with a conductive material.
    Type: Grant
    Filed: April 6, 2009
    Date of Patent: November 9, 2010
    Assignee: Micron Technology, Inc.
    Inventors: Kyle K. Kirby, Salman Akram, David R. Hembree, Sidney B. Rigg, Warren M. Farnworth, William M. Hiatt
  • Patent number: 7807505
    Abstract: Methods for wafer-level packaging of microfeature devices and microfeature devices formed using such methods are disclosed herein. A method for packaging microfeature devices in accordance with an embodiment of the invention can include releasably attaching a plurality of first known good microelectronic dies to a carrier substrate in a desired arrangement. In several embodiments, for example, the first dies can be releasably attached to an attachment feature on the carrier substrate. The method can also include attaching one or more second known good microelectronic dies to the individual first dies in a stacked configuration to form a plurality of stacked devices. The method further includes at least partially encapsulating the stacked devices and separating the stacked devices from each other.
    Type: Grant
    Filed: August 30, 2005
    Date of Patent: October 5, 2010
    Assignee: Micron Technology, Inc.
    Inventors: Warren M. Farnworth, Alan G. Wood
  • Patent number: 7791184
    Abstract: A semiconductor package such as an image sensor package. A frame structure includes an array of frames, each having an aperture therethrough, into which an image sensor die in combination with a cover glass, filter, lens or other components may be installed in precise mutual alignment. Singulated image sensor dice and other components may be picked and placed into each frame of the frame structure. Alternatively, the frame structure may be configured to be aligned with and joined to a wafer bearing a plurality of image sensor dice, wherein optional, downwardly protruding skirts along peripheries of the frames may be received into kerfs cut along streets between die locations on the wafer, followed by installation of other package components. In either instance, the frame structure in combination with singulated image sensor dice or a joined wafer is singulated into individual image sensor packages. Various external connection approaches may be used.
    Type: Grant
    Filed: April 26, 2006
    Date of Patent: September 7, 2010
    Assignee: Micron Technology, Inc.
    Inventors: Alan G. Wood, Kyle K. Kirby, Warren M. Farnworth, Salman Akram
  • Patent number: 7776647
    Abstract: A semiconductor component includes a thinned semiconductor substrate having protective polymer layers on up to six surfaces. The component also includes contacts on a circuit side of the substrate, conductive vias in electrical contact with the contacts, and conductors on a backside of the substrate. A method for fabricating the component includes the steps of providing the semiconductor substrate with the contacts on the circuit side, forming conductive vias from the back side in electrical contact with the contacts, and forming conductors on the backside.
    Type: Grant
    Filed: July 31, 2006
    Date of Patent: August 17, 2010
    Assignee: Micron Technology, Inc.
    Inventors: Warren M. Farnworth, Alan G. Wood, Trung Tri Doan
  • Publication number: 20100203721
    Abstract: An integrated circuit connection is describe that includes a first, securing member and a second, connection member. The first member, in an embodiment, is a spike that has a portion of its body fixed in a layer of an integrated circuit structure and extends outwardly from the integrated circuit structure. The second material is adapted to form a mechanical connection to a further electrical device. The second material (e.g., solder), is held by the first member to the integrated circuit structure. The first member increases the strength of the connection and assists in controlling the collapse of second member to form the mechanical connection to another circuit. The connection is formed by coating the integrated circuit structure with a patterned resist and etching the layer beneath the resist. A first member material (e.g., metal) is deposited. The resist is removed. The collapsible material is fixed to the first member.
    Type: Application
    Filed: April 23, 2010
    Publication date: August 12, 2010
    Inventors: William M. Hiatt, Warren M. Farnworth
  • Patent number: 7759240
    Abstract: An apparatus and a method for forming a substrate having a palladium metal layer over at least one contact point of the substrate and having a flexible conductive polymer bump, preferably a two-stage epoxy, on the palladium plated contact point, are provided. The present invention also relates to assemblies comprising one or more of these substrates.
    Type: Grant
    Filed: February 1, 2008
    Date of Patent: July 20, 2010
    Assignee: Micron Technology, Inc.
    Inventors: Warren M. Farnworth, Salman Akram
  • Publication number: 20100148372
    Abstract: A technique for making an integrated circuit package. Specifically, a stacked memory device is provided with minimal interconnects. Memory die are stacked on top of each other and electrically coupled to a substrate. Thru vias are provided in the substrate and/or memory die to facilitate the electrical connects without necessitating a complex interconnect technology between each of the interfaces. Wire bonds are used to complete the circuit package.
    Type: Application
    Filed: February 22, 2010
    Publication date: June 17, 2010
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: Warren M. Farnworth, Jerry M. Brooks
  • Patent number: 7730372
    Abstract: An IC module, such as a Multi-Chip Module (MCM), includes multiple IC dice, each having a test mode enable bond pad, such as an output enable pad. A fuse incorporated into the MCM's substrate connects each die's test mode enable bond pad to one of the MCM's no-connection (N/C) pins, and a resistor incorporated into the substrate connects the test mode enable bond pads to one of the MCM's ground pins. By applying a supply voltage to the test mode enable bond pads through the N/C pin, a test mode is initiated in the dice. Once testing is complete, the fuse may be blown, and a ground voltage applied to the test mode enable bond pads through the ground pins so the resistor disables the test mode in the dice and initiates an operational mode. As a result, dice packaged in IC modules may be tested after packaging.
    Type: Grant
    Filed: September 18, 2008
    Date of Patent: June 1, 2010
    Assignee: Micron Technology, Inc.
    Inventors: Warren M. Farnworth, James M. Wark, Eric S. Nelson, Kevin G. Duesman
  • Patent number: 7723741
    Abstract: Methods of packaging microelectronic imagers and packaged microelectronic imagers. An embodiment of such a method can include providing an imager workpiece having a plurality of imager dies arranged in a die pattern and providing a cover substrate through which a desired radiation can propagate. The imager dies include image sensors and integrated circuitry coupled to the image sensors. The method further includes providing a spacer having a web that includes an adhesive and has openings arranged to be aligned with the image sensors. For example, the web can be a film having an adhesive coating, or the web itself can be a layer of adhesive. The method continues by assembling the imager workpiece with the cover substrate such that (a) the spacer is between the imager workpiece and the cover substrate, and (b) the openings are aligned with the image sensors. The attached web is not cured after the imager workpiece and the cover substrate have both been adhered to the web.
    Type: Grant
    Filed: June 13, 2006
    Date of Patent: May 25, 2010
    Assignee: Aptina Imaging Corporation
    Inventors: Warren M. Farnworth, Alan G. Wood, James M. Wark, David R. Hembree, Rickie C. Lake