Abstract: The present invention provides a zoom lens which is the zoom lens that includes a first lens group G1 having positive refractive power, a second lens group G2 having negative refractive power, and a third lens group G3 having positive refractive power in order from an object side, and changes focal length by changing an air interval between the respective lens groups, the zoom lens including a focus group F constituted from one lens in or after the third lens group G3, moving only the focus group F along an optical axis direction when focusing from an infinity object to a proximity object, and satisfying specific conditional expressions, and an imaging apparatus including the zoom lens.

Abstract: A plasma generation device including an electric power supply device to supply electric power to multiple electrodes arranged in a reaction chamber; a processing gas supply device to supply a processing gas to the reaction chamber; and a control device to control operation of the electric power supply device and the processing gas supply device in either of a first operation mode in which, when a stop signal is received while electric power is being supplied to the electrodes in a state with the processing gas being supplied to the reaction chamber, supply of electric power to the electrodes is stopped and supply of the processing gas to the reaction chamber is stopped, and a second operation mode in which supply of electric power to the electrodes is stopped, but the processing gas continues to be supplied to the reaction chamber.

Abstract: A plasma-generating device capable of detecting a short circuit or electrical discharge of a cable. In response to a detection voltage detected by a current transformer becoming equal to or greater than a threshold voltage, a touchscreen panel of the plasma-generating device reports a current abnormality. When a short circuit or a discharge occurs between the first cable and the second cable, which are a pair of cables, an induced current flows through the shield member by electromagnetic induction. Therefore, the detector can detect a current abnormality due to a short circuit or electrical discharge between the first cable and the second cable.

Abstract: A plasma-generating device capable of detecting a short circuit or electrical discharge of a cable. In response to a detection voltage detected by a current transformer becoming equal to or greater than a threshold voltage, a touchscreen panel of the plasma-generating device reports a current abnormality. When a short circuit or a discharge occurs between the first cable and the second cable, which are a pair of cables, an induced current flows through the shield member by electromagnetic induction. Therefore, the detector can detect a current abnormality due to a short circuit or electrical discharge between the first cable and the second cable.

Abstract: A plasma generation device including an electric power supply device to supply electric power to multiple electrodes arranged in a reaction chamber; a processing gas supply device to supply a processing gas to the reaction chamber; and a control device to control operation of the electric power supply device and the processing gas supply device in either of a first operation mode in which, when a stop signal is received while electric power is being supplied to the electrodes in a state with the processing gas being supplied to the reaction chamber, supply of electric power to the electrodes is stopped and supply of the processing gas to the reaction chamber is stopped, and a second operation mode in which supply of electric power to the electrodes is stopped, but the processing gas continues to be supplied to the reaction chamber.

Abstract: The present invention provides a zoom lens which is the zoom lens that includes a first lens group G1 having positive refractive power, a second lens group G2 having negative refractive power, and a third lens group G3 having positive refractive power in order from an object side, and changes focal length by changing an air interval between the respective lens groups, the zoom lens including a focus group F constituted from one lens in or after the third lens group G3, moving only the focus group F along an optical axis direction when focusing from an infinity object to a proximity object, and satisfying specific conditional expressions, and an imaging apparatus including the zoom lens.