Abstract: An information processing system that extracts a specified piece of log data or a specified field that constitutes the specified piece of log data, from a log file in which pieces of log data having different recording formats are mixed, the information processing system includes a format-information recording portion configured to store format information in which a determination condition to identify a recording format of the specified piece of log data is contained, an extraction-condition recording portion configured to store an extraction condition to extract the specified piece of log data or the specified field, and an extraction processing portion configured to extract the specified piece of log data or the specified field, from the log file by using the format information stored in the format-information recording portion and the extraction condition.

Abstract: An information processing system that extracts a specified piece of log data or a specified field that constitutes the specified piece of log data, from a log file in which pieces of log data having different recording formats are mixed, the information processing system includes a format-information recording portion configured to store format information in which a determination condition to identify a recording format of the specified piece of log data is contained, an extraction-condition recording portion configured to store an extraction condition to extract the specified piece of log data or the specified field, and an extraction processing portion configured to extract the specified piece of log data or the specified field, from the log file by using the format information stored in the format-information recording portion and the extraction condition.

Abstract: An information processing system that extracts a specified piece of log data or a specified field that constitutes the specified piece of log data, from a log file in which pieces of log data having different recording formats are mixed, the information processing system includes a format-information recording portion configured to store format information in which a determination condition to identify a recording format of the specified piece of log data is contained, an extraction-condition recording portion configured to store an extraction condition to extract the specified piece of log data or the specified field, and an extraction processing portion configured to extract the specified piece of log data or the specified field, from the log file by using the format information stored in the format-information recording portion and the extraction condition.

Abstract: An information processing system that extracts a specified piece of log data or a specified field that constitutes the specified piece of log data, from a log file in which pieces of log data having different recording formats are mixed, the information processing system includes a format-information recording portion configured to store format information in which a determination condition to identify a recording format of the specified piece of log data is contained, an extraction-condition recording portion configured to store an extraction condition to extract the specified piece of log data or the specified field, and an extraction processing portion configured to extract the specified piece of log data or the specified field, from the log file by using the format information stored in the format-information recording portion and the extraction condition.

Abstract: A controller disclosed herein drives, in a first step, a high frequency generating source at a first energy condition, and drives, in a second step, a high frequency generating source at a second energy condition. Prior to a switching time of the first step and the second step, the controller switches gas species supplied from the gas supply system into the processing container, and sets a gas flow rate in an initial period just after the switching to be larger than a gas flow rate in a stabilization period after lapse of the initial period.

Abstract: A controller disclosed herein drives, in a first step, a high frequency generating source at a first energy condition, and drives, in a second step, a high frequency generating source at a second energy condition. Prior to a switching time of the first step and the second step, the controller switches gas species supplied from the gas supply system into the processing container, and sets a gas flow rate in an initial period just after the switching to be larger than a gas flow rate in a stabilization period after lapse of the initial period.

Abstract: A temperature control method is provided for controlling a plasma processing apparatus that is capable of changing a temperature setting for each step of a plasma process including multiple steps. The method includes a transfer step of performing an entry process for transferring a workpiece into a processing chamber of the plasma processing apparatus and/or an exit process for transferring the workpiece out of the processing chamber, a process execution step of executing the plasma process including multiple steps, and a temperature control step of performing a first temperature control and/or a second temperature control. The first temperature control includes controlling a temperature to a temperature setting of a next process according to a time execution of the plasma process is completed, and the second temperature control includes controlling the temperature to the temperature setting of the next process in parallel with the entry process and/or the exit process.

Abstract: A controller disclosed herein drives, in a first step, a high frequency generating source at a first energy condition, and drives, in a second step, a high frequency generating source at a second energy condition. Prior to a switching time of the first step and the second step, the controller switches gas species supplied from the gas supply system into the processing container, and sets a gas flow rate in an initial period just after the switching to be larger than a gas flow rate in a stabilization period after lapse of the initial period.

Abstract: Provided is a parallel flat-panel type plasma processing apparatus which includes a recipe storing unit storing a processing recipe for performing a plasma processing, a compensation setting unit setting an accumulation time of the plasma processing or the number of processed substrates after starting using a new second electrode and the compensation value of the set temperature of the second electrode in an input screen, and a storage unit storing the compensated set value. The plasma processing apparatus is further equipped with a program for controlling a temperature adjusting mechanism based on a set temperature after compensation by adding a set temperature of an upper electrode written in the processing recipe to the compensation value stored within the storage unit. As a result, the non-uniformity in the plasma processing between the substrates caused by the change of processing atmosphere is suppressed.

Abstract: A controller disclosed herein drives, in a first step, a high frequency generating source at a first energy condition, and drives, in a second step, a high frequency generating source at a second energy condition. Prior to a switching time of the first step and the second step, the controller switches gas species supplied from the gas supply system into the processing container, and sets a gas flow rate in an initial period just after the switching to be larger than a gas flow rate in a stabilization period after lapse of the initial period.

Abstract: Provided is a parallel flat-panel type plasma processing apparatus which includes a recipe storing unit storing a processing recipe for performing a plasma processing, a compensation setting unit setting an accumulation time of the plasma processing or the number of processed substrates after starting using a new second electrode and the compensation value of the set temperature of the second electrode in an input screen, and a storage unit storing the compensated set value. The plasma processing apparatus is further equipped with a program for controlling a temperature adjusting mechanism based on a set temperature after compensation by adding a set temperature of an upper electrode written in the processing recipe to the compensation value stored within the storage unit. As a result, the non-uniformity in the plasma processing between the substrates caused by the change of processing atmosphere is suppressed.

Abstract: Provided is a parallel flat-panel type plasma processing apparatus which includes a recipe storing unit storing a processing recipe for performing a plasma processing, a compensation setting unit setting an accumulation time of the plasma processing or the number of processed substrates after starting using a new second electrode and the compensation value of the set temperature of the second electrode in an input screen, and a storage unit storing the compensated set value. The plasma processing apparatus is further equipped with a program for controlling a temperature adjusting mechanism based on a set temperature after compensation by adding a set temperature of an upper electrode written in the processing recipe to the compensation value stored within the storage unit. As a result, the non-uniformity in the plasma processing between the substrates caused by the change of processing atmosphere is suppressed.

Abstract: A temperature control method is provided for controlling a plasma processing apparatus that is capable of changing a temperature setting for each step of a plasma process including multiple steps. The method includes a transfer step of performing an entry process for transferring a workpiece into a processing chamber of the plasma processing apparatus and/or an exit process for transferring the workpiece out of the processing chamber, a process execution step of executing the plasma process including multiple steps, and a temperature control step of performing a first temperature control and/or a second temperature control. The first temperature control includes controlling a temperature to a temperature setting of a next process according to a time execution of the plasma process is completed, and the second temperature control includes controlling the temperature to the temperature setting of the next process in parallel with the entry process and/or the exit process.

Abstract: Provided is a parallel flat-panel type plasma processing apparatus which includes a recipe storing unit storing a processing recipe for performing a plasma processing, a compensation setting unit setting an accumulation time of the plasma processing or the number of processed substrates after starting using a new second electrode and the compensation value of the set temperature of the second electrode in an input screen, and a storage unit storing the compensated set value. The plasma processing apparatus is further equipped with a program for controlling a temperature adjusting mechanism based on a set temperature after compensation by adding a set temperature of an upper electrode written in the processing recipe to the compensation value stored within the storage unit. As a result, the non-uniformity in the plasma processing between the substrates caused by the change of processing atmosphere is suppressed.

Abstract: A method for braking force distribution control for a vehicle with a direct four wheel drive mode, which does not become an obstacle to an effective braking force and disconcert the driver's feeling. This method relates to a braking force distribution control for a vehicle during direct four wheel drive mode and under the condition that the anti-skid control is inhibited, which does not operate pressure reduction control or the amount of pressure reduction.

Abstract: A method for braking force distribution control for a vehicle with a direct four wheel drive mode, which does not become an obstacle to an effective braking force and disconcert the driver's feeling. This method relates to a braking force distribution control for a vehicle during direct four wheel drive mode and under the condition that the anti-skid control is inhibited, which does not operate pressure reduction control or the amount of pressure reduction.

Abstract: A method of an accurate detection of a spinning vehicle wheel. Observed wheel speeds are derived by measuring the speed of each wheel and the slowest speed is set as the slowest observed wheel speed. A maximum probable wheel speed is derived by multiplying the slowest observed wheel speed by the ratio of the maximum wheel speed to the slowest wheel speed for a given minimum turning radius. The maximum probable wheel speed is compared with an observed wheel speed and if the observed wheel speed is greater, the wheel is deemed to be spinning.

Abstract: A method is provided to compute the probable body speed of a vehicle equipped with a mini tire as a spare tire, specifically when the mini tire is mounted. The wheel speeds of the four wheels are measured, and if the speed does not satisfy the predetermined formula relating to the wheel base and tread of the vehicle to a wheel speed, then a probable vehicle body speed is derived by the normal method. The speed thus derived is corrected by the diameter of the mini tire to compute a new probable vehicle body speed.

Abstract: An anti-skid control device is provided that eliminates noise and vibration, provides better pedal responsiveness, and provides better anti-skid control. In the anti-skid control device 1, a pressure regulator valve 4 is positioned in the brake line between the master cylinder 12 and inlet valve 21, and the pressure differential between the input side and output side of the inlet valve 21 is minimized.

Abstract: An exhaust manifold in which a plurality of branch tubes at an inlet side are connected to a collecting tube at an outlet side, and in which the fluid flows from the branch tubes to the collecting tube, wherein a volumetric chamber is provided between at least a pair of the branch tubes in communication with the branch tubes, with the volumetric chamber being gradually increased in its cross-sectional area in a fluid flowing direction. An exhaust manifold formed of upper and lower members comprises a branch tube having a bend. The upper lower members are interconnected by joining flanges having a broader width in the vicinity of the bend than other joining flange portions.