Patents by Inventor Wayne A. Branagh

Wayne A. Branagh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and system for identifying etch end points in semiconductor circuit fabrication
    Patent number: 6381008
    Abstract: Disclosed is a spectrometer system with unique wavelength resolution improving relative positioning of diffraction grating and detector. Also disclosed is a modified evolving windowed factor analysis based method of detecting semiconductor etch end points which is particularly well suited for use in real time monitoring and process control. Use of wavelength group selecting mask filters is also disclosed.
    Type: Grant
    Filed: May 25, 1999
    Date of Patent: April 30, 2002
    Assignee: SD Acquisition Inc.
    Inventors: Wayne A. Branagh, Robert C. Fry, Juan C. Ivaldi, Jason A. Rivers, Michael R. Dyas, Robert M. Brown, Jr.