Patents by Inventor Wayne Fitzgerald

Wayne Fitzgerald has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11531279
    Abstract: A method for correcting misalignments is provided. An alignment for each device of a group of devices mounted on a substrate is determined. An alignment error for the group of devices mounted on the substrate is determined based on the respective alignment for each device. One or more correction factors are calculated based on the alignment error. The alignment error is corrected based on the one or more correction factors.
    Type: Grant
    Filed: August 20, 2021
    Date of Patent: December 20, 2022
    Assignee: Onto Innovation Inc.
    Inventors: Elvino da Silveira, Keith F. Best, Wayne Fitzgerald, Jian Lu, Xin Song, J. Casey Donaher, Christopher J. McLaughlin
  • Patent number: 11315832
    Abstract: A method for monitoring and controlling a substrate singulation process is described. Device edges are imaged and identified for analysis. Discrepancies in device edges are noted and used to modify a singulation process and to monitor the operation of singulation processes for anomalous behavior.
    Type: Grant
    Filed: December 23, 2016
    Date of Patent: April 26, 2022
    Assignee: Onto Innovation Inc.
    Inventor: Wayne Fitzgerald
  • Publication number: 20220075282
    Abstract: A method for correcting misalignments is provided. An alignment for each device of a group of devices mounted on a substrate is determined. An alignment error for the group of devices mounted on the substrate is determined based on the respective alignment for each device. One or more correction factors are calculated based on the alignment error. The alignment error is corrected based on the one or more correction factors.
    Type: Application
    Filed: August 20, 2021
    Publication date: March 10, 2022
    Inventors: Elvino da Silveira, Keith F. Best, Wayne Fitzgerald, Jian Lu, Xin Song, J. Casey Donaher, Christopher J. McLaughlin
  • Patent number: 11126096
    Abstract: A method for correcting misalignments is provided. An alignment for each device of a group of devices mounted on a substrate is determined. An alignment error for the group of devices mounted on the substrate is determined based on the respective alignment for each device. One or more correction factors are calculated based on the alignment error. The alignment error is corrected based on the one or more correction factors.
    Type: Grant
    Filed: September 28, 2018
    Date of Patent: September 21, 2021
    Assignee: Onto Innovation, Inc.
    Inventors: Elvino Da Silveira, Keith Frank Best, Wayne Fitzgerald, Jian Lu, Xin Song, J. Casey Donaher, Christopher J. McLaughlin
  • Publication number: 20200233320
    Abstract: A method for correcting misalignments is provided. An alignment for each device of a group of devices mounted on a substrate is determined. An alignment error for the group of devices mounted on the substrate is determined based on the respective alignment for each device. One or more correction factors are calculated based on the alignment error. The alignment error is corrected based on the one or more correction factors.
    Type: Application
    Filed: September 28, 2018
    Publication date: July 23, 2020
    Applicant: Onto Innovation, Inc.
    Inventors: Elvino DA SILVEIRA, Keith Frank BEST, Wayne FITZGERALD, Jian LU, Xin SONG, J. Casey DONAHER, Christopher J. MCLAUGHLIN
  • Patent number: 10553504
    Abstract: Concepts presented herein relate to approaches for performing substrate inspection. In one aspect, the concepts relate to detecting anomalies or candidate defects on the substrate based on contrast in images obtained of the substrate.
    Type: Grant
    Filed: March 22, 2018
    Date of Patent: February 4, 2020
    Assignee: Rudolph Technologies, Inc.
    Inventors: Gurvinder Singh, Wu Y. Han, John Thornell, Chetan Suresh, Wayne Fitzgerald
  • Patent number: 10466179
    Abstract: Concepts presented herein relate to approaches for performing substrate inspection. In one aspect, the concepts relate to detecting anomalies or candidate defects on the substrate based on contrast in images obtained of the substrate.
    Type: Grant
    Filed: March 22, 2018
    Date of Patent: November 5, 2019
    Assignee: Rudoplh Technologies, Inc.
    Inventors: Gurvinder Singh, Wu Y. Han, John Thornell, Chetan Suresh, Wayne Fitzgerald
  • Publication number: 20190019728
    Abstract: A method for monitoring and controlling a substrate singulation process is described. Device edges are imaged and identified for analysis. Discrepancies in device edges are noted and used to modify a singulation process and to monitor the operation of singulation processes for anomalous behavior.
    Type: Application
    Filed: December 23, 2016
    Publication date: January 17, 2019
    Applicant: Rudolph Technologies, Inc.
    Inventor: Wayne Fitzgerald
  • Publication number: 20180275063
    Abstract: Concepts presented herein relate to approaches for performing substrate inspection. In one aspect, the concepts relate to detecting anomalies or candidate defects on the substrate based on contrast in images obtained of the substrate.
    Type: Application
    Filed: March 22, 2018
    Publication date: September 27, 2018
    Inventors: Gurvinder Singh, Wu Y. Han, John Thornell, Chetan Suresh, Wayne Fitzgerald
  • Publication number: 20180277452
    Abstract: Concepts presented herein relate to approaches for performing substrate inspection. In one aspect, the concepts relate to detecting anomalies or candidate defects on the substrate based on contrast in images obtained of the substrate.
    Type: Application
    Filed: March 22, 2018
    Publication date: September 27, 2018
    Inventors: Gurvinder Singh, Wu Y. Han, John Thornell, Chetan Suresh, Wayne Fitzgerald
  • Publication number: 20130087087
    Abstract: A mobile floating deck barge system is provided for use in performing work on the underside of a bridge or other structure extending over a body of water.
    Type: Application
    Filed: October 11, 2012
    Publication date: April 11, 2013
    Inventors: Jonathan Adam Werbel, John Wayne Fitzgerald
  • Patent number: 5888050
    Abstract: A precision high-pressure control assembly for supercritical fluids comprises a continuous flow system having a pressure control loop which includes a source of fluid communicating with a piston driven pump. A pressure sensor monitors the pressure of the supercritical fluid in the outlet line of the pump. A pressure controller has an input for receiving a signal relating to the pressure sent by the pressure sensor and the pressure controller yields an electronic output signal to an electropneumatic regulator. A source of air communicates with the electropneumatic regulator to provide pressurized regulated driver air directed to the pump. The electropneumatic regulator controls the regulated driver air pressure of the pump in accordance with the signal received from the pressure controller. The piston head of the pump is in a cryogenic chamber to minimize flash and cavitation.
    Type: Grant
    Filed: August 25, 1998
    Date of Patent: March 30, 1999
    Assignee: Supercritical Fluid Technologies, Inc.
    Inventors: Wayne Fitzgerald, Kenneth J. James, Brian J. Waibel