Patents by Inventor Wei-Liang Lin

Wei-Liang Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20170271169
    Abstract: A method of fabricating a semiconductor device is disclosed. The method includes forming a first flowable-material (FM) layer over a substrate. A top surface of the first FM layer in a first region is higher than a top surface of the first FM layer in a second region. The method also includes forming a sacrificial plug to cover the first FM layer in the first region, forming a second FM layer over the sacrificial plug in the first region and over the first FM layer in the second region, performing a first recessing process such that the second FM layer is removed in the first region and performing a second recessing process on the second FM layer in the second region while the first FM layer is protected by the sacrificial plug in the first region.
    Type: Application
    Filed: March 17, 2016
    Publication date: September 21, 2017
    Inventors: Yung-Sung Yen, Ru-Gun Liu, Wei-Liang Lin, Hsin-Chih Chen
  • Publication number: 20170256396
    Abstract: A method includes forming a first layer over a substrate; forming a patterned photoresist layer over the first layer; applying a solution over the patterned photoresist layer to form a conformal layer over the pattern photoresist layer, wherein the conformal layer further includes a first portion over a top surface of the patterned photoresist layer and second portion extending along sidewalls of the patterned photoresist layer; selectively removing the first portion of the conformal layer formed over the top surface of the patterned photoresist layer; andselectively removing the patterned photoresist layer thereby leaving the second portion of the conformal layer.
    Type: Application
    Filed: March 4, 2016
    Publication date: September 7, 2017
    Inventors: Ya-Ling Cheng, Ching-Yu Chang, Chien-Chih Chen, Chun-Kuang Chen, Siao-Shan Wang, Wei-Liang Lin
  • Patent number: 9728407
    Abstract: A method of fabricating a semiconductor device is disclosed. The method includes forming mandrels over a material layer and forming spacers along sidewalls of mandrels, forming a patterned hard mask to cover a first region, depositing a filling layer in a second region while the patterned hard mask covers the first region. A space between two adjacent spacers in the second region is filled in by the filling layer. The method also includes recessing the filling layer to form a filling block in the space between two adjacent spacers in the second region, removing the patterned hard mask, removing mandrels and etching the material layer by using spacers and the filling block as an etch mask to form material features in the first region and the second region, respectively.
    Type: Grant
    Filed: December 30, 2015
    Date of Patent: August 8, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Ken-Hsien Hsieh, Chi-Cheng Hung, Chih-Ming Lai, Wei-Liang Lin, Chun-Kuang Chen, Ru-Gun Liu
  • Publication number: 20170207713
    Abstract: A feed forward controlling circuit and a method for voltage ripple restraint are provided. The feed forward controlling circuit is used to perform the feed forward controlling method. The feed forward controlling method is used to restrain ripple of the output voltage in a power converter. The power converter is controlled by a control signal outputted from an output terminal of a controller. The method includes steps of: receiving an output voltage from an output terminal of a voltage converter; attenuating the output voltage to generate an electrical signal; acquiring a DC signal from the electrical signal; and obtaining a ripple compensation signal in accordance with the electrical signal and the DC signal to output to an output terminal of a controller. The output terminal of the controller outputs a control signal to control the power converter.
    Type: Application
    Filed: August 15, 2016
    Publication date: July 20, 2017
    Inventors: Cheng-Hsiao LUO, Wei-Liang LIN
  • Publication number: 20170194146
    Abstract: A method of fabricating a semiconductor device is disclosed. The method includes forming mandrels over a material layer and forming spacers along sidewalls of mandrels, forming a patterned hard mask to cover a first region, depositing a filling layer in a second region while the patterned hard mask covers the first region. A space between two adjacent spacers in the second region is filled in by the filling layer. The method also includes recessing the filling layer to form a filling block in the space between two adjacent spacers in the second region, removing the patterned hard mask, removing mandrels and etching the material layer by using spacers and the filling block as an etch mask to form material features in the first region and the second region, respectively.
    Type: Application
    Filed: December 30, 2015
    Publication date: July 6, 2017
    Inventors: Ken-Hsien Hsieh, Chi-Cheng Hung, Chih-Ming Lai, Wei-Liang Lin, Chun-Kuang Chen, Ru-Gun Liu
  • Patent number: 9684236
    Abstract: A method of fabricating a semiconductor device is disclosed. The method includes forming a first patterned hard mask over a material layer. The first patterned hard mask defines an opening. The method also includes forming a direct-self-assembly (DSA) layer having a first portion and a second portion within the opening, removing the first portion of the DSA layer, forming spacers along sidewalls of the second portion of the DSA layer and removing the second portion of the DSA layer. The spacers form a second patterned hard mask over the material layer.
    Type: Grant
    Filed: March 17, 2016
    Date of Patent: June 20, 2017
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ken-Hsien Hsieh, Kuan-Hsin Lo, Shih-Ming Chang, Wei-Liang Lin, Joy Cheng, Chun-Kuang Chen, Ching-Yu Chang, Kuei-Shun Chen, Ru-Gun Liu, Tsai-Sheng Gau, Chin-Hsiang Lin
  • Patent number: 9679994
    Abstract: A method of forming fins on a substrate is provided. The method comprises depositing first fin spacers comprising first fin spacer material and second fin spacers comprising second fin spacer material on a plurality of locations on a substrate having a hard mask above the substrate's semiconductor material, wherein the first fin spacers comprise desired first fin spacers and dummy first fin spacers and the second fin spacers comprise desired second fin spacers and dummy second fin spacers. The method further comprises forming fins on the substrate under the first fin spacers and the second fin spacers. The fins comprise a plurality of dummy fins and a plurality of desired fins. The dummy fins comprise a plurality of dummy first fins formed under the dummy first fin spacers and a plurality of dummy second fins formed under the dummy second fin spacers.
    Type: Grant
    Filed: August 30, 2016
    Date of Patent: June 13, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: L. C. Chou, Chih-Liang Chen, Chih-Ming Lai, Charles Chew-Yuen Young, Chin-Yuan Tseng, Jiann-Tyng Tzeng, Kam-Tou Sio, Ru-Gun Liu, Wei-Liang Lin
  • Publication number: 20170127858
    Abstract: There is provided a neck support with a plurality of independently controlled airbags. This may have the advantage that the tilt, comfort and/or support of the user's neck can be adjusted to reduce neck strain and/or the user's sleeping/waking state can be managed according to the journey progress.
    Type: Application
    Filed: July 3, 2015
    Publication date: May 11, 2017
    Applicant: TWare Pte. Ltd.
    Inventors: Keng Soon Teh, Wei Liang Lin, Sep Riang Lai, Xingyu Wang
  • Patent number: 9530660
    Abstract: Disclosed is a method of forming a target pattern for a semiconductor device using multiple directed self-assembly (DSA) patterning processes. The method includes receiving a substrate and forming a guide pattern over the substrate by performing a process that includes a first DSA process. The method further includes performing a second DSA process over the substrate using the guide pattern. In an embodiment, the first DSA process controls the first pitch of a dense pattern in a first direction and the second DSA process controls the second pitch of the dense pattern in a second direction.
    Type: Grant
    Filed: May 15, 2015
    Date of Patent: December 27, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chin-Yuan Tseng, Chi-Cheng Hung, Chun-Kuang Chen, Kuan-Hsin Lo, Ru-Gun Liu, Tsai-Sheng Gau, Wei-Liang Lin
  • Publication number: 20160336186
    Abstract: Disclosed is a method of forming a target pattern for a semiconductor device using multiple directed self-assembly (DSA) patterning processes. The method includes receiving a substrate and forming a guide pattern over the substrate by performing a process that includes a first DSA process. The method further includes performing a second DSA process over the substrate using the guide pattern. In an embodiment, the first DSA process controls the first pitch of a dense pattern in a first direction and the second DSA process controls the second pitch of the dense pattern in a second direction.
    Type: Application
    Filed: May 15, 2015
    Publication date: November 17, 2016
    Inventors: Chin-Yuan Tseng, Chi-Cheng Hung, Chun-Kuang Chen, Kuan-Hsin Lo, Ru-Gun Liu, Tsai-Sheng Gau, Wei-Liang Lin
  • Publication number: 20160307769
    Abstract: A technique for patterning a workpiece such as an integrated circuit workpiece is provided. In an exemplary embodiment, the method includes receiving a workpiece having a material layer disposed on a substrate. A first set of fins is formed on the material layer, and a second set of fins is formed on the material layer interspersed between the first set of fins. The second set of fins have a different etchant sensitivity from the first set of fins. A first etching process is performed on the first set of fins and configured to avoid substantial etching of the second set of fins. A second etching process is performed on the second set of fins and configured to avoid substantial etching of the first set of fins. The material layer is etched to transfer a pattern defined by the first etching process and the second etching process.
    Type: Application
    Filed: April 17, 2015
    Publication date: October 20, 2016
    Inventors: Chin-Yuan Tseng, Chi-Cheng Hung, Chun-Kuang Chen, De-Fang Chen, Ru-Gun Liu, Tsai-Sheng Gau, Wei-Liang Lin
  • Patent number: 9449880
    Abstract: A method for fabricating a semiconductor device includes forming a plurality of first spacers over a substrate. A second spacer of a plurality of second spacers is deposited on sidewalls of each first spacer. In some embodiments, a spacing between adjacent first spacers is configured such that second spacers formed on sidewalls of the adjacent first spacers physically merge to form a merged second spacer. A second spacer cut process may be performed to selectively remove at least one second spacer. In some embodiments, a third spacer of a plurality of third spacers is formed on sidewalls of each second spacer. A third spacer cut process may be performed to selectively remove at least one third spacer. A first etch process is performed on the substrate to form fin regions. The plurality of third spacers mask portions of the substrate during the first etch process.
    Type: Grant
    Filed: February 26, 2015
    Date of Patent: September 20, 2016
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chin-Yuan Tseng, Chi-Cheng Hung, Chun-Kuang Chen, Chih-Ming Lai, Huan-Just Lin, Ru-Gun Liu, Tsai-Sheng Gau, Wei-Liang Lin
  • Publication number: 20160254191
    Abstract: A method for fabricating a semiconductor device includes forming a plurality of first spacers over a substrate. A second spacer of a plurality of second spacers is deposited on sidewalls of each first spacer. In some embodiments, a spacing between adjacent first spacers is configured such that second spacers formed on sidewalls of the adjacent first spacers physically merge to form a merged second spacer. A second spacer cut process may be performed to selectively remove at least one second spacer. In some embodiments, a third spacer of a plurality of third spacers is formed on sidewalls of each second spacer. A third spacer cut process may be performed to selectively remove at least one third spacer. A first etch process is performed on the substrate to form fin regions. The plurality of third spacers mask portions of the substrate during the first etch process.
    Type: Application
    Filed: February 26, 2015
    Publication date: September 1, 2016
    Inventors: Chin-Yuan Tseng, Chi-Cheng Hung, Chun-Kuang Chen, Chih-Ming Lai, Huan-Just Lin, Ru-Gun Liu, Tsai-Sheng Gau, Wei-Liang Lin
  • Patent number: 9383657
    Abstract: A method for lithography exposing process is provided. The method includes performing a first lithography exposing process to a resist layer using a mask having a focus-sensitive pattern and an energy-sensitive pattern; measuring critical dimensions (CDs) of transferred focus-sensitive pattern and transferred energy-sensitive pattern on the resist layer; extracting Bossung curves from the CDs; and determining slopes of the Bossung curves.
    Type: Grant
    Filed: March 3, 2014
    Date of Patent: July 5, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jhih-Yu Wang, Chien-Yu Li, Iu-Ren Chen, Chi-Cheng Hung, Wei-Liang Lin, Chun-Kuang Chen
  • Publication number: 20160062250
    Abstract: The present disclosure provides a method. The method includes forming a resist layer on a patterned substrate; collecting first overlay data from the patterned substrate; determining an overlay compensation based on mapping of second overlay data from an integrated circuit (IC) pattern to the first overlay data from the patterned substrate; performing a compensation process to a lithography system according to the overlay compensation; and thereafter performing a lithography exposing process to the resist layer by the lithography system, thereby imaging the IC pattern to the resist layer.
    Type: Application
    Filed: August 28, 2014
    Publication date: March 3, 2016
    Inventors: Chi-Cheng Hung, Wei-Liang Lin, Yung-Sung Yen, Chun-Kuang Chen, Ru-Gun Liu, Tsai-Sheng Gau, Tzung-Chi Fu, Ming-Sen Tung, Fu-Jye Liang, Li-Jui Chen, Meng-Wei Chen, Kuei-Shun Chen
  • Publication number: 20160000640
    Abstract: A garment comprising: at least two compartments, at least two air bladders within the compartments configured to constrict the torso of a user, a sensor configured to detect the pressure in the air bladders, and a controller configured communicate with a mobile device app to allow a user independently control of the pressure in each air bladder according to predetermined criteria.
    Type: Application
    Filed: January 30, 2014
    Publication date: January 7, 2016
    Inventors: Sep Riang LAI, Keng Soon TEH, Wei Liang LIN
  • Publication number: 20150248068
    Abstract: A method for lithography exposing process is provided. The method includes performing a first lithography exposing process to a resist layer using a mask having a focus-sensitive pattern and an energy-sensitive pattern; measuring critical dimensions (CDs) of transferred focus-sensitive pattern and transferred energy-sensitive pattern on the resist layer; extracting Bossung curves from the CDs; and determining slops of the Bossung curves.
    Type: Application
    Filed: March 3, 2014
    Publication date: September 3, 2015
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jhih-Yu Wang, Chien-Yu Li, Iu-Ren Chen, Chi-Cheng Hung, Wei-Liang Lin, Chun-Kuang Chen
  • Publication number: 20150103562
    Abstract: A switching power supply with a resonant converter has an AC to DC converter and a DC to DC converter. The AC to DC converter converts an inputted AC power into a DC power. The DC to DC converter has a resonant converter determining a current operating state according to waveforms of a transformer voltage and a driving signal actually measured and further controlling a switching frequency of the resonant converter to approach or to be equal to a resonant frequency for operational efficiency enhancement. Accordingly, the failure to accurately calculate a resonant frequency beforehand can be solved and the issue of accurately keeping the switching frequency consistent with the resonant frequency can be tackled.
    Type: Application
    Filed: October 16, 2013
    Publication date: April 16, 2015
    Applicant: Acbel Polytech Inc.
    Inventors: Chia-An Yeh, Wei-Liang Lin
  • Patent number: 8824168
    Abstract: A full bridge phase shifted power supply with synchronous rectification and current doubler and method for dynamically adjusting delay parameters thereof mainly have multiple delay parameter combinations respectively varying with multiple loads and embedded in a controller of the power supply. The delay parameter combinations serve to determine driving waveforms of two rectification switches of a synchronous rectification and current doubler circuit of the power supply. When the load of the power supply varies, the controller dynamically performs a corresponding delay parameter combination so as to vary the driving waveforms of the rectification switches of the synchronous rectification and current doubler circuit and enhance the operating efficiency of the power supply.
    Type: Grant
    Filed: September 20, 2011
    Date of Patent: September 2, 2014
    Assignee: Acbel Polytech Inc.
    Inventors: Chun-Ho Hua, Chien-Wen Wang, Wei-Liang Lin
  • Patent number: 8724337
    Abstract: The present invention discloses a compact server power supply having high power density has a casing, a main printed circuit board, a sub-printed circuit board, a power supplying circuit, a power output terminal set and a fan. The power supplying circuit has a primary side circuit unit, a transformer and a secondary side circuit unit. Electric elements of the primary and secondary side circuit units and the transformer are soldered on the main printed circuit board except parts of the electric elements of the secondary side circuit unit are soldered on the sub-printed circuit board. The sub-printed circuit board is vertically mounted and soldered on the main printed circuit board, so the length of the main printed circuit board is shortened to implement the server power supply having a compact size and high power density.
    Type: Grant
    Filed: April 20, 2011
    Date of Patent: May 13, 2014
    Assignee: Acbel Polytech Inc.
    Inventors: Shih-Liang Teng, Wei-Liang Lin, Po-Cheng Teng, Kuo-Chu Yeh