Patents by Inventor Wei-Lun Min
Wei-Lun Min has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11973128Abstract: A semiconductor device according to the present disclosure includes a channel member including a first connection portion, a second connection portion and a channel portion disposed between the first connection portion and the second connection portion, a first inner spacer feature disposed over and in contact with the first connection portion, a second inner spacer feature disposed under and in contact with the first connection portion, and a gate structure wrapping around the channel portion of the channel member. A shape of a cross-sectional view of the channel member includes a dog-bone shape. By providing the dog-bone shape channel member, a parasitic resistance of the semiconductor device is advantageously reduced, and performance of the semiconductor device may be significantly improved.Type: GrantFiled: May 27, 2021Date of Patent: April 30, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chang-Miao Liu, Wei-Lun Min
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Publication number: 20230369128Abstract: Semiconductor device and the manufacturing method thereof are disclosed herein. An exemplary semiconductor device comprises a first semiconductor fin and a second semiconductor fin formed over a substrate, wherein lower portions of the first semiconductor fin and the second semiconductor fin are separated by an isolation structure; a first gate stack formed over the first semiconductor fin and a second gate stack formed over the second semiconductor fin; and a separation feature separating the first gate stack and the second gate stack, wherein the separation feature includes a first dielectric layer and a second dielectric layer with an air gap defined therebetween, and a bottom portion of the separation feature being inserted into the isolation structure.Type: ApplicationFiled: July 25, 2023Publication date: November 16, 2023Inventors: Wei-Lun Min, Xusheng Wu, Chang-Miao Liu
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Publication number: 20230369513Abstract: The present disclosure provides semiconductor devices and methods of forming the same. A semiconductor device of the present disclosure includes a first source/drain feature and a second source/drain feature over a substrate, a plurality of channel members extending between the first source/drain feature and the second source/drain feature, a gate structure wrapping around each of the plurality of channel members, and at least one blocking feature. At least one of the plurality of channel members is isolated from the first source/drain feature and the second source/drain feature by the at least one blocking feature.Type: ApplicationFiled: July 24, 2023Publication date: November 16, 2023Inventors: Wei-Lun Min, Chang-Miao Liu
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Patent number: 11756835Abstract: Semiconductor device and the manufacturing method thereof are disclosed herein. An exemplary semiconductor device comprises a first semiconductor fin and a second semiconductor fin formed over a substrate, wherein lower portions of the first semiconductor fin and the second semiconductor fin are separated by an isolation structure; a first gate stack formed over the first semiconductor fin and a second gate stack formed over the second semiconductor fin; and a separation feature separating the first gate stack and the second gate stack, wherein the separation feature includes a first dielectric layer and a second dielectric layer with an air gap defined therebetween, and a bottom portion of the separation feature being inserted into the isolation structure.Type: GrantFiled: July 11, 2022Date of Patent: September 12, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Wei-Lun Min, Xusheng Wu, Chang-Miao Liu
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Patent number: 11715803Abstract: The present disclosure provides semiconductor devices and methods of forming the same. A semiconductor device of the present disclosure includes a first source/drain feature and a second source/drain feature over a substrate, a plurality of channel members extending between the first source/drain feature and the second source/drain feature, a gate structure wrapping around each of the plurality of channel members, and at least one blocking feature. At least one of the plurality of channel members is isolated from the first source/drain feature and the second source/drain feature by the at least one blocking feature.Type: GrantFiled: June 13, 2022Date of Patent: August 1, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Wei-Lun Min, Chang-Miao Liu
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Publication number: 20230068354Abstract: A method includes providing a substrate including a first semiconductor layer over a dielectric layer, thinning the first semiconductor layer, forming a stack of alternating second semiconductor layers and third semiconductor layers over the thinned first semiconductor layer, forming a fin active region protruding from the substrate including a portion of the thinned first semiconductor layer and the stack of alternating second semiconductor layers and third semiconductor layers, forming isolation features over an exposed portion of the dielectric layer, forming a dummy gate stack over the fin active region, forming a source/drain (S/D) recess in the fin active region adjacent to the dummy gate stack, forming an epitaxial S/D feature in the S/D recess, removing the second semiconductor layers to form openings between the third semiconductor layers, and forming a metal gate stack in the openings and in place of the dummy gate stack.Type: ApplicationFiled: August 30, 2021Publication date: March 2, 2023Inventors: Wei-Lun Min, Ko-Cheng Liu, Chang-Miao Liu
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Patent number: 11527444Abstract: A dummy gate is formed over a substrate. A sacrificial layer is formed over the dummy gate. An interlayer dielectric (ILD) is formed over the dummy gate and over the sacrificial layer. The dummy gate is replaced with a metal-containing gate. The sacrificial layer is removed. A removal of the sacrificial layer leaves air gaps around the metal-containing gate. The air gaps are then sealed.Type: GrantFiled: June 11, 2020Date of Patent: December 13, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Wei-Lun Min, Chang-Miao Liu
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Publication number: 20220384610Abstract: A semiconductor device according to the present disclosure includes a channel member including a first connection portion, a second connection portion and a channel portion disposed between the first connection portion and the second connection portion, a first inner spacer feature disposed over and in contact with the first connection portion, a second inner spacer feature disposed under and in contact with the first connection portion, and a gate structure wrapping around the channel portion of the channel member. A shape of a cross-sectional view of the channel member includes a dog-bone shape. By providing the dog-bone shape channel member, a parasitic resistance of the semiconductor device is advantageously reduced, and performance of the semiconductor device may be significantly improved.Type: ApplicationFiled: May 27, 2021Publication date: December 1, 2022Inventors: Chang-Miao Liu, Wei-Lun Min
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Publication number: 20220367281Abstract: A dummy gate is formed over a substrate. A sacrificial layer is formed over the dummy gate. An interlayer dielectric (ILD) is formed over the dummy gate and over the sacrificial layer. The dummy gate is replaced with a metal-containing gate. The sacrificial layer is removed. A removal of the sacrificial layer leaves air gaps around the metal-containing gate. The air gaps are then sealed.Type: ApplicationFiled: July 22, 2022Publication date: November 17, 2022Inventors: Wei-Lun Min, Chang-Miao Liu
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Publication number: 20220344216Abstract: Semiconductor device and the manufacturing method thereof are disclosed herein. An exemplary semiconductor device comprises a first semiconductor fin and a second semiconductor fin formed over a substrate, wherein lower portions of the first semiconductor fin and the second semiconductor fin are separated by an isolation structure; a first gate stack formed over the first semiconductor fin and a second gate stack formed over the second semiconductor fin; and a separation feature separating the first gate stack and the second gate stack, wherein the separation feature includes a first dielectric layer and a second dielectric layer with an air gap defined therebetween, and a bottom portion of the separation feature being inserted into the isolation structure.Type: ApplicationFiled: July 11, 2022Publication date: October 27, 2022Inventors: Wei-Lun Min, Xusheng Wu, Chang-Miao Liu
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Publication number: 20220310851Abstract: The present disclosure provides semiconductor devices and methods of forming the same. A semiconductor device of the present disclosure includes a first source/drain feature and a second source/drain feature over a substrate, a plurality of channel members extending between the first source/drain feature and the second source/drain feature, a gate structure wrapping around each of the plurality of channel members, and at least one blocking feature. At least one of the plurality of channel members is isolated from the first source/drain feature and the second source/drain feature by the at least one blocking feature.Type: ApplicationFiled: June 13, 2022Publication date: September 29, 2022Inventors: Wei-Lun Min, Chang-Miao Liu
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Publication number: 20220262918Abstract: Field effect transistor and manufacturing method thereof are disclosed. The field effect transistor includes a substrate, fins, a gate structure, a first spacer and a second spacer. The fins protrude from the substrate and extend in a first direction. The gate structure is disposed across and over the fins and extends in a second direction perpendicular to the first direction. The first spacer is disposed on sidewalls of the gate structure. The second spacer is disposed on the first spacer and surrounds the gate structure. The first spacer is fluorine-doped and includes fluorine dopants.Type: ApplicationFiled: May 9, 2022Publication date: August 18, 2022Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Wei-Lun Min, Chang-Miao Liu, Xu-Sheng Wu
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Patent number: 11387146Abstract: Semiconductor device and the manufacturing method thereof are disclosed herein. An exemplary semiconductor device comprises a first semiconductor fin and a second semiconductor fin formed over a substrate, wherein lower portions of the first semiconductor fin and the second semiconductor fin are separated by an isolation structure; a first gate stack formed over the first semiconductor fin and a second gate stack formed over the second semiconductor fin; and a separation feature separating the first gate stack and the second gate stack, wherein the separation feature includes a first dielectric layer and a second dielectric layer with an air gap defined therebetween, and a bottom portion of the separation feature being inserted into the isolation structure.Type: GrantFiled: July 17, 2020Date of Patent: July 12, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Wei-Lun Min, Xusheng Wu, Chang-Miao Liu
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Patent number: 11362217Abstract: The present disclosure provides semiconductor devices and methods of forming the same. A semiconductor device of the present disclosure includes a first source/drain feature and a second source/drain feature over a substrate, a plurality of channel members extending between the first source/drain feature and the second source/drain feature, a gate structure wrapping around each of the plurality of channel members, and at least one blocking feature. At least one of the plurality of channel members is isolated from the first source/drain feature and the second source/drain feature by the at least one blocking feature.Type: GrantFiled: November 23, 2020Date of Patent: June 14, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Wei-Lun Min, Chang-Miao Liu
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Patent number: 11355615Abstract: Field effect transistor and manufacturing method thereof are disclosed. The field effect transistor includes a substrate, fins, a gate structure, a first spacer and a second spacer. The fins protrude from the substrate and extend in a first direction. The gate structure is disposed across and over the fins and extends in a second direction perpendicular to the first direction. The first spacer is disposed on sidewalls of the gate structure. The second spacer is disposed on the first spacer and surrounds the gate structure. The first spacer is fluorine-doped and includes fluorine dopants.Type: GrantFiled: January 17, 2020Date of Patent: June 7, 2022Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Wei-Lun Min, Chang-Miao Liu, Xu-Sheng Wu
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Publication number: 20220165881Abstract: The present disclosure provides semiconductor devices and methods of forming the same. A semiconductor device of the present disclosure includes a first source/drain feature and a second source/drain feature over a substrate, a plurality of channel members extending between the first source/drain feature and the second source/drain feature, a gate structure wrapping around each of the plurality of channel members, and at least one blocking feature. At least one of the plurality of channel members is isolated from the first source/drain feature and the second source/drain feature by the at least one blocking feature.Type: ApplicationFiled: November 23, 2020Publication date: May 26, 2022Inventors: Wei-Lun Min, Chang-Miao Liu
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Publication number: 20210226030Abstract: Field effect transistor and manufacturing method thereof are disclosed. The field effect transistor includes a substrate, fins, a gate structure, a first spacer and a second spacer. The fins protrude from the substrate and extend in a first direction. The gate structure is disposed across and over the fins and extends in a second direction perpendicular to the first direction. The first spacer is disposed on sidewalls of the gate structure. The second spacer is disposed on the first spacer and surrounds the gate structure. The first spacer is fluorine-doped and includes fluorine dopants.Type: ApplicationFiled: January 17, 2020Publication date: July 22, 2021Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Wei-Lun Min, Chang-Miao Liu, Xu-Sheng Wu
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Publication number: 20210098309Abstract: Semiconductor device and the manufacturing method thereof are disclosed herein. An exemplary semiconductor device comprises a first semiconductor fin and a second semiconductor fin formed over a substrate, wherein lower portions of the first semiconductor fin and the second semiconductor fin are separated by an isolation structure; a first gate stack formed over the first semiconductor fin and a second gate stack formed over the second semiconductor fin; and a separation feature separating the first gate stack and the second gate stack, wherein the separation feature includes a first dielectric layer and a second dielectric layer with an air gap defined therebetween, and a bottom portion of the separation feature being inserted into the isolation structure.Type: ApplicationFiled: July 17, 2020Publication date: April 1, 2021Inventors: Wei-Lun Min, Xusheng Wu, Chang-Miao Liu
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Publication number: 20210090959Abstract: A dummy gate is formed over a substrate. A sacrificial layer is formed over the dummy gate. An interlayer dielectric (ILD) is formed over the dummy gate and over the sacrificial layer. The dummy gate is replaced with a metal-containing gate. The sacrificial layer is removed. A removal of the sacrificial layer leaves air gaps around the metal-containing gate. The air gaps are then sealed.Type: ApplicationFiled: June 11, 2020Publication date: March 25, 2021Inventors: Wei-Lun Min, Chang-Miao Liu