Abstract: A method includes forming a first conductive feature, depositing a passivation layer on a sidewall and a top surface of the first conductive feature, etching the passivation layer to reveal the first conductive feature, and recessing a first top surface of the passivation layer to form a step. The step comprises a second top surface of the passivation layer. The method further includes forming a planarization layer on the passivation layer, and forming a second conductive feature extending into the passivation layer to contact the first conductive feature.

Abstract: The invention provides a quick turn around time system (QTAT) for locating an optimal arrangement of work orders within a wafer fabrication facility providing: a real time dispatching system having a software rule database; and at least one piece of fabrication equipment having an internal buffer in communication with the software rule database, wherein the real time dispatching system and the at least one piece of fabrication equipment cooperate to optimally prioritize a work order disposed within the internal buffer of the at least one piece of fabrication equipment. A load port reservation system for in-line processing and a plurality of batch editing functions for controlling batch formation is provided. Additionally provided are two alternative methods of using the QTAT to optimally prioritize work orders within the at least one piece of fabrication equipment's internal buffer.

Abstract: The invention provides a quick turn around time system (QTAT) for locating an optimal arrangement of work orders within a wafer fabrication facility providing: a real time dispatching system having a software rule database; and at least one piece of fabrication equipment having an internal buffer in communication with the software rule database, wherein the real time dispatching system and the at least one piece of fabrication equipment cooperate to optimally prioritize a work order disposed within the internal buffer of the at least one piece of fabrication equipment. A load port reservation system for in-line processing and a plurality of batch editing functions for controlling batch formation is provided. Additionally provided are two alternative methods of using the QTAT to optimally prioritize work orders within the at least one piece of fabrication equipment's internal buffer.