Patents by Inventor Wen-Cheng Lien
Wen-Cheng Lien has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11823919Abstract: A multi-shield plate includes a plurality of windows and a plurality of vapor shields mounted to the plurality of windows, wherein each window of the plurality of windows is formed in the plate and extends through an entirety of the plate in a thickness direction. The multi-shield plate further includes a plurality of apertures in the plate, wherein each of the plurality of apertures extends through the entirety of the plate in the thickness direction and, an aperture of the plurality of apertures is aligned with a corresponding window of the plurality of windows along radius of the multi-shield plate.Type: GrantFiled: July 13, 2022Date of Patent: November 21, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Ping-Tse Lin, Wen-Cheng Lien, Chun-Chih Lin, Monica Ho
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Publication number: 20220351990Abstract: A multi-shield plate includes a plurality of windows and a plurality of vapor shields mounted to the plurality of windows, wherein each window of the plurality of windows is formed in the plate and extends through an entirety of the plate in a thickness direction. The multi-shield plate further includes a plurality of apertures in the plate, wherein each of the plurality of apertures extends through the entirety of the plate in the thickness direction and, an aperture of the plurality of apertures is aligned with a corresponding window of the plurality of windows along radius of the multi-shield plate.Type: ApplicationFiled: July 13, 2022Publication date: November 3, 2022Inventors: Ping-Tse LIN, Wen-Cheng LIEN, Chun-Chih LIN, Monica HO
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Patent number: 11398393Abstract: A multi-shield plate includes a plate having a substantially flat upper surface and a substantially flat lower surface, a plurality of first windows formed in the plate and extending through the plate from the upper surface to the lower surface, and a plurality of vapor shields mounted to the plate, each vapor shield of the plurality of vapor shields configured to prevent passage of a vapor through a corresponding window of the plurality of windows. The multi-shield plate includes an aperture formed in the plate, the aperture aligned with a first window of the plurality of windows along an axis corresponding to the upper surface.Type: GrantFiled: October 19, 2020Date of Patent: July 26, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Ping-Tse Lin, Chun-Chih Lin, Wen-Cheng Lien, Monica Ho
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Publication number: 20210035829Abstract: A multi-shield plate includes a plate having a substantially flat upper surface and a substantially flat lower surface, a plurality of first windows formed in the plate and extending through the plate from the upper surface to the lower surface, and a plurality of vapor shields mounted to the plate, each vapor shield of the plurality of vapor shields configured to prevent passage of a vapor through a corresponding window of the plurality of windows. The multi-shield plate includes an aperture formed in the plate, the aperture aligned with a first window of the plurality of windows along an axis corresponding to the upper surface.Type: ApplicationFiled: October 19, 2020Publication date: February 4, 2021Inventors: Ping-Tse LIN, Chun-Chih LIN, Wen-Cheng LIEN, Monica HO
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Patent number: 10811285Abstract: A multi-shield plate includes a plate having a substantially flat upper surface and a substantially flat lower surface, a plurality of first windows formed in the plate and extending through the plate from the upper surface to the lower surface, and a plurality of vapor shields mounted to the plate, each vapor shield of the plurality of vapor shields configured to prevent passage of a vapor through a corresponding window of the plurality of windows. The multi-shield plate includes an aperture formed in the plate, the aperture aligned with a first window of the plurality of windows along an axis corresponding to the upper surface.Type: GrantFiled: October 31, 2017Date of Patent: October 20, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Ping-Tse Lin, Chun-Chih Lin, Wen-Cheng Lien, Monica Ho
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Publication number: 20180350640Abstract: A multi-shield plate includes a plate having a substantially flat upper surface and a substantially flat lower surface, a plurality of first windows formed in the plate and extending through the plate from the upper surface to the lower surface, and a plurality of vapor shields mounted to the plate, each vapor shield of the plurality of vapor shields configured to prevent passage of a vapor through a corresponding window of the plurality of windows. The multi-shield plate includes an aperture formed in the plate, the aperture aligned with a first window of the plurality of windows along an axis corresponding to the upper surface.Type: ApplicationFiled: October 31, 2017Publication date: December 6, 2018Inventors: Ping-Tse LIN, Chun-Chih LIN, Wen-Cheng LIEN, Monica HO
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Patent number: 9687885Abstract: Methods for cleaning a wafer in semiconductor fabrication are provided. The method includes providing a wafer. The method further includes cleaning the wafer in a first cleaning cycle by supplying a cleaning solution and supplying a first washing liquid mixed with a purge gas in sequence. The method also includes cleaning the wafer in a second cleaning cycle by supplying the cleaning solution and a second washing liquid mixed with the purge gas in sequence. The second cleaning cycle is initiated after the first cleaning cycle is finished.Type: GrantFiled: July 17, 2015Date of Patent: June 27, 2017Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Ying-Jie Cai, Bo-Wei Chou, Shih-Hsing Kao, Shin-Hsien Yang, Tzu-Min Lee, Tai-Yung Yu, Wen-Cheng Lien
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Publication number: 20170014871Abstract: Methods for cleaning a wafer in semiconductor fabrication are provided. The method includes providing a wafer. The method further includes cleaning the wafer in a first cleaning cycle by supplying a cleaning solution and supplying a first washing liquid mixed with a purge gas in sequence. The method also includes cleaning the wafer in a second cleaning cycle by supplying the cleaning solution and a second washing liquid mixed with the purge gas in sequence. The second cleaning cycle is initiated after the first cleaning cycle is finished.Type: ApplicationFiled: July 17, 2015Publication date: January 19, 2017Inventors: Ying-Jie CAI, Bo-Wei CHOU, Shih-Hsing KAO, Shin-Hsien YANG, Tzu-Min LEE, Tai-Yung YU, Wen-Cheng LIEN
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Publication number: 20100200180Abstract: The snow cover of the invention has a main shade with fastening elements located at the upper end to be anchored on the car roof and other fastening elements on a lower end to be anchored on the car hood. The snow cover includes two triangular pendent self-stretched flaps each fastens to a pendant to stretch the main shade smoothly to neatly cover the windshield. When car doors are opened, two pendent self-stretched flaps slide quickly inside the car doors due to pendant principle. After the card doors are closed, two pendent self-stretched flaps are clamped by the car doors and the car body and held inside the car body. To move the snow cover, open the car doors, unfasten fastening elements at the upper and lower ends of the main shade, then the snow cover can be removed and stowed.Type: ApplicationFiled: February 11, 2009Publication date: August 12, 2010Inventor: Wen-Cheng LIEN
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Patent number: 7497602Abstract: A three dimension collapsible lampshade mainly includes a collapsible rib foldable on a cubical surface and a pliable fabric cover foldable on a plane. The pliable fabric cover has a flexible ring at a lower rim that may be fixed or folded in a desired shape. The collapsible rib and the pliable fabric cover are separable. By coupling the collapsible rib and the pliable fabric cover a cubical lampshade can be formed. The lampshade may also be folded in three dimensions. Compared with the conventional lampshades that are foldable only in two dimensions, the invention can save the cost of package material and transportation. The separable design also allows consumers to change and replace the pliable fabric cover as desired after purchase.Type: GrantFiled: February 8, 2007Date of Patent: March 3, 2009Inventor: Wen-Cheng Lien
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Publication number: 20080192486Abstract: A three dimension collapsible lampshade mainly includes a collapsible rib foldable on a cubical surface and a pliable fabric cover foldable on a plane. The pliable fabric cover has a flexible ring at a lower rim that may be fixed or folded in a desired shape. The collapsible rib and the pliable fabric cover are separable. By coupling the collapsible rib and the pliable fabric cover a cubical lampshade can be formed. The lampshade may also be folded in three dimensions. Compared with the conventional lampshades that are foldable only in two dimensions, the invention can save the cost of package material and transportation. The separable design also allows consumers to change and replace the pliable fabric cover as desired after purchase.Type: ApplicationFiled: February 8, 2007Publication date: August 14, 2008Inventor: Wen-Cheng Lien
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Patent number: 7026171Abstract: A rapid thermal annealing (“RTA”) process providing for an RTA equipment is disclosed. The RTA equipment has a pyrometer providing for measuring an operation parameter, e.g., a temperature of the RTA process. The RTA process comprises steps of proceeding a first RTA step to a wafer in the RTA equipment, then comparing a measured value of the operation parameter with a reference range of value of the operation parameter, thereafter proceeding a second RTA step to the wafer in the RTA equipment when the measured value of the operation parameter is in between the reference range of value of the operation parameter. When the measured value of the operation parameter is out of the reference range of value of the operation parameter, the RTA equipment is turned off, and the wafer is unloaded from the RTA equipment and loaded into another RTA equipment to complete the RTA process.Type: GrantFiled: July 4, 2003Date of Patent: April 11, 2006Assignee: Macronix International Co., Ltd.Inventors: Y. Y. Chang, Shih-Liang Chou, L. H. Lee, Tsung-De Lin, Kou-Yow Tseng, Wen-Cheng Lien
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Patent number: 6828208Abstract: A method of fabricating a shallow trench isolation (STI) structure. A substrate is provided and then a pad oxide layer, a mask layer and a first trench are sequentially formed on the substrate. An insulation layer is formed inside the first trench and over the substrate. The insulation layer has a second trench in a location above the first trench. Thereafter, a conformal cap layer is formed over the insulation layer. The cap layer has a third trench in a location above the second trench. A reverse mask is formed over the cap layer covering the third trench. The cap layer and the insulation layer outside the reverse mask are removed to expose the upper surface of the mask layer. The reverse mask is removed and then the residual insulation layer outside the remaining cap layer and the trench are moved to expose the upper surface of the mask layer. Finally, the mask layer and the pad oxide layer are removed.Type: GrantFiled: January 28, 2003Date of Patent: December 7, 2004Assignee: Macronix International Co., Ltd.Inventors: Tsung-De Lin, Hsiao-Kang Wang, Tian-Jue Hong, Shih-Liang Chou, Wen-Cheng Lien
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Publication number: 20040224538Abstract: A rapid thermal annealing (“RTA”) process providing for an RTA equipment is disclosed. The RTA equipment has a pyrometer providing for measuring an operation parameter, e.g., a temperature of the RTA process. The RTA process comprises steps of proceeding a first RTA step to a wafer in the RTA equipment, then comparing a measured value of the operation parameter with a reference range of value of the operation parameter, thereafter proceeding a second RTA step to the wafer in the RTA equipment when the measured value of the operation parameter is in between the reference range of value of the operation parameter. When the measured value of the operation parameter is out of the reference range of value of the operation parameter, the RTA equipment is turned off, and the wafer is unloaded from the RTA equipment and loaded into another RTA equipment to complete the RTA process.Type: ApplicationFiled: July 4, 2003Publication date: November 11, 2004Inventors: Y. Y. Chang, Shih-Liang Chou, L. H. Lee, Tsung-De Lin, Kou-Yow Tseng, Wen-Cheng Lien
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Publication number: 20040147135Abstract: A method of fabricating a shallow trench isolation (STI) structure. A substrate is provided and then a pad oxide layer, a mask layer and a first trench are sequentially formed on the substrate. An insulation layer is formed inside the first trench and over the substrate. The insulation layer has a second trench in a location above the first trench. Thereafter, a conformal cap layer is formed over the insulation layer. The cap layer has a third trench in a location above the second trench. A reverse mask is formed over the cap layer covering the third trench. The cap layer and the insulation layer outside the reverse mask are removed to expose the upper surface of the mask layer. The reverse mask is removed and then the residual insulation layer outside the remaining cap layer and the trench are moved to expose the upper surface of the mask layer. Finally, the mask layer and the pad oxide layer are removed.Type: ApplicationFiled: January 28, 2003Publication date: July 29, 2004Inventors: Tsung-De Lin, Hsiao-Kang Wang, Tian-Jue Hong, Shih-Liang Chou, Wen-Cheng Lien
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Publication number: 20040146643Abstract: A method of determining the deposition temperature, especially inside the reaction chamber of a chemical vapor deposition station. The method includes placing a deposition substrate inside the reaction chamber, forming a layer of metal silicide over the deposition substrate, measuring the silicon/metal atomic ratio and finding the deposition temperature according to a pre-determined temperature versus silicon/metal atomic ratio relationship. The method permits immediate determination as well as real-time monitoring of deposition temperature inside the station.Type: ApplicationFiled: January 24, 2003Publication date: July 29, 2004Inventors: Shih-Liang Chou, Tsung-Chin Wu, Tsung-De Lin, Tian-Jue Hong, Kou-Yow Tseng, Wen-Cheng Lien
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Patent number: D665334Type: GrantFiled: December 20, 2011Date of Patent: August 14, 2012Assignee: Lucky Special Int'l Co., Ltd.Inventor: Wen-Cheng Lien