Abstract: A method includes bonding a first wafer to a second wafer, with a first plurality of dielectric layers in the first wafer and a second plurality of dielectric layers in the second wafer bonded between a first substrate of the first wafer and a second substrate in the second wafer. A first opening is formed in the first substrate, and the first plurality of dielectric layers and the second wafer are etched through the first opening to form a second opening. A metal pad in the second plurality of dielectric layers is exposed to the second opening. A conductive plug is formed extending into the first and the second openings.

Abstract: A method includes bonding a first wafer to a second wafer, with a first plurality of dielectric layers in the first wafer and a second plurality of dielectric layers in the second wafer bonded between a first substrate of the first wafer and a second substrate in the second wafer. A first opening is formed in the first substrate, and the first plurality of dielectric layers and the second wafer are etched through the first opening to form a second opening. A metal pad in the second plurality of dielectric layers is exposed to the second opening. A conductive plug is formed extending into the first and the second openings.

Abstract: A head (12) for incorporation in a strobed liquid display is disclosed. The head comprises a housing (30) defining a chamber (38), the housing (30) having an inlet opening (39) for connection to a liquid supply, a top wall (32) having a vent (42), a bottom wall (34) having a plurality of apertures (44) spaced from and distributed about the center thereof for accommodating the outflow of liquid droplets from the chamber (38), and a sidewall (36) extending between the top and bottom walls (32, (34). The head (12) also includes a vibrating device rigidly connected to the housing (30) for imparting a periodic wobble thereto for dispensing the droplets through the apertures (44) in sequential fashion with substantially uniform spacing between successive droplets dispensed through each aperture (44), whereby the dispensed droplets substantially define a helix. A strobe liquid display system (10) incorporating the head (12) is also disclosed.