Patents by Inventor Wenjian Cai
Wenjian Cai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11835652Abstract: Described are LiDAR systems comprising a transmission optical system and a collection optical system utilizing a common lens or pieces derived from the same lens to reduce or eliminate image mismatch between the transmission optical system and the collection optical system.Type: GrantFiled: February 25, 2022Date of Patent: December 5, 2023Assignee: Nuro, Inc.Inventors: Lu Gao, Wenjian Cai
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Publication number: 20220342041Abstract: Described are LiDAR systems comprising a transmission optical system and a collection optical system utilizing a common lens or pieces derived from the same lens to reduce or eliminate image mismatch between the transmission optical system and the collection optical system.Type: ApplicationFiled: February 25, 2022Publication date: October 27, 2022Applicant: Nuro, Inc.Inventors: Lu GAO, Wenjian CAI
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Patent number: 11294035Abstract: Described are LiDAR systems comprising a transmission optical system and a collection optical system utilizing a common lens or pieces derived from the same lens to reduce or eliminate image mismatch between the transmission optical system and the collection optical system.Type: GrantFiled: July 9, 2018Date of Patent: April 5, 2022Assignee: NURO, INC.Inventors: Lu Gao, Wenjian Cai
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Patent number: 11061116Abstract: Described are LiDAR systems including an apparatus configured to translate one or more spherical lenses, an array of light sources, an array of photodetectors, or any combination thereof of a collection optical system in the Z direction (optical axis) to move the image plane of the collection optical system and match the image size between a transmission optical system and the collection optical system.Type: GrantFiled: July 9, 2018Date of Patent: July 13, 2021Assignee: Nuro, Inc.Inventors: Lu Gao, Wenjian Cai
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Publication number: 20190018109Abstract: Described are LiDAR systems including an apparatus configured to translate one or more spherical lenses, an array of light sources, an array of photodetectors, or any combination thereof of a collection optical system in the Z direction (optical axis) to move the image plane of the collection optical system and match the image size between a transmission optical system and the collection optical system.Type: ApplicationFiled: July 9, 2018Publication date: January 17, 2019Inventors: Lu GAO, Wenjian CAI
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Publication number: 20190018108Abstract: Described are LiDAR systems comprising a transmission optical system and a collection optical system utilizing a common lens or pieces derived from the same lens to reduce or eliminate image mismatch between the transmission optical system and the collection optical system.Type: ApplicationFiled: July 9, 2018Publication date: January 17, 2019Inventors: Lu GAO, Wenjian CAI
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Patent number: 10060884Abstract: A method of scanning a sample includes simultaneously forming a plurality of co-linear scans. Each scan is formed by a sweep of a spot by an acousto-optical device (AOD). The co-linear scans are separated by a predetermined spacing. A first plurality of swaths are formed by repeating the simultaneous forming of the plurality of co-linear scans in a direction perpendicular to the co-linear scans. The first plurality of swaths have an inter-swath spacing that is the same as the predetermined spacing. The predetermined spacing can be a scan length or an integral number of scan lengths. A second plurality of swaths can be formed adjacent to the first plurality of swaths. Forming the second plurality of swaths can be performed in an opposite direction to that of the first plurality of swaths or in a same direction. An inspection system can implement this method by including a diffractive optical element (DOE) path after a magnification changer.Type: GrantFiled: June 16, 2016Date of Patent: August 28, 2018Assignee: KLA-Tencor CorporationInventors: Jamie Sullivan, Wenjian Cai, Yevgeniy Churin, Ralph Johnson, Meier Yitzhak Brender, Mark Shi Wang, Rex Runyon, Kai Cao
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Patent number: 9970883Abstract: Disclosed are apparatus and methods for inspecting or measuring a specimen. A system comprises an illumination channel for generating and deflecting a plurality of incident beams to form a plurality of spots that scan across a segmented line comprised of a plurality of scan portions of the specimen. The system also includes one or more detection channels for sensing light emanating from a specimen in response to the incident beams directed towards such specimen and collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion. The one or more detection channels include at least one longitudinal side channel for longitudinally collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion.Type: GrantFiled: January 5, 2017Date of Patent: May 15, 2018Assignee: KLA-Tencor CorporationInventors: Jamie M. Sullivan, Ralph Johnson, Evegeny Churin, Wenjian Cai, Yong Mo Moon
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Patent number: 9864173Abstract: A spot scanning imaging system with run-time alignment includes a beam scanning device configured to linearly scan a focused beam of illumination across a sample, one or more detectors positioned to receive light from the sample, and a controller communicatively coupled to the beam scanning apparatus, the sample stage, and the one or more detectors. The controller is configured to store a first image, transmit a set of drive signals to at least one of the beam scanning device, the sample stage, or the one or more detectors, compare at least a portion of the second sampling grid to at least a portion of the first sampling grid to determine one or more offset errors, and adjust at least one drive signal in the set of drive signals based on the one or more offset errors such that the second sample grid overlaps the first sample grid.Type: GrantFiled: January 22, 2016Date of Patent: January 9, 2018Assignee: KLA-Tencor CorporationInventors: Jamie M. Sullivan, Wenjian Cai, Kai Cao
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Patent number: 9645093Abstract: An inspection system with selectable apodization includes a selectably configurable apodization device disposed along an optical pathway of an optical system. The apodization device includes one or more apodization elements operatively coupled to one or more actuation stages. The one or more actuation stages are configured to selectably actuate the one or more apodization elements along one or more directions. The inspection system includes a control system communicatively coupled to the one or more actuation stages. The control system is configured to selectably control an actuation state of at the one or more apodization elements so as to apply a selected apodization profile formed with the one or more apodization elements.Type: GrantFiled: November 2, 2015Date of Patent: May 9, 2017Assignee: KLA-Tencor CorporationInventors: Jamie M. Sullivan, Gary Janik, Steve Cui, Rex Runyon, Dieter Wilk, Steve Short, Mikhail Haurylau, Qiang Q. Zhang, Grace Hsiu-Ling Chen, Robert M. Danen, Suwipin Martono, Shobhit Verma, Wenjian Cai, Meier Brender
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Publication number: 20170115232Abstract: Disclosed are apparatus and methods for inspecting or measuring a specimen. A system comprises an illumination channel for generating and deflecting a plurality of incident beams to form a plurality of spots that scan across a segmented line comprised of a plurality of scan portions of the specimen. The system also includes one or more detection channels for sensing light emanating from a specimen in response to the incident beams directed towards such specimen and collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion. The one or more detection channels include at least one longitudinal side channel for longitudinally collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion.Type: ApplicationFiled: January 5, 2017Publication date: April 27, 2017Applicant: KLA-Tencor CorporationInventors: Jamie M. Sullivan, Ralph Johnson, Evegeny Churin, Wenjian Cai, Yong Mo Moon
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Patent number: 9546962Abstract: Disclosed are apparatus and methods for inspecting or measuring a specimen. A system comprises an illumination channel for generating and deflecting a plurality of incident beams to form a plurality of spots that scan across a segmented line comprised of a plurality of scan portions of the specimen. The system also includes one or more detection channels for sensing light emanating from a specimen in response to the incident beams directed towards such specimen and collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion. The one or more detection channels include at least one longitudinal side channel for longitudinally collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion.Type: GrantFiled: February 10, 2015Date of Patent: January 17, 2017Assignee: KLA-Tencor CorporationInventors: Jamie M. Sullivan, Ralph Johnson, Evegeny Churin, Wenjian Cai, Yong Mo Moon
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Publication number: 20160313256Abstract: A spot scanning imaging system with run-time alignment includes a beam scanning device configured to linearly scan a focused beam of illumination across a sample, one or more detectors positioned to receive light from the sample, and a controller communicatively coupled to the beam scanning apparatus, the sample stage, and the one or more detectors. The controller is configured to store a first image, transmit a set of drive signals to at least one of the beam scanning device, the sample stage, or the one or more detectors, compare at least a portion of the second sampling grid to at least a portion of the first sampling grid to determine one or more offset errors, and adjust at least one drive signal in the set of drive signals based on the one or more offset errors such that the second sample grid overlaps the first sample grid.Type: ApplicationFiled: January 22, 2016Publication date: October 27, 2016Inventors: Jamie M. Sullivan, Wenjian Cai, Kai Cao
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Publication number: 20160290971Abstract: A method of scanning a sample includes simultaneously forming a plurality of co-linear scans. Each scan is formed by a sweep of a spot by an acousto-optical device (AOD). The co-linear scans are separated by a predetermined spacing. A first plurality of swaths are formed by repeating the simultaneous forming of the plurality of co-linear scans in a direction perpendicular to the co-linear scans. The first plurality of swaths have an inter-swath spacing that is the same as the predetermined spacing. The predetermined spacing can be a scan length or an integral number of scan lengths. A second plurality of swaths can be formed adjacent to the first plurality of swaths. Forming the second plurality of swaths can be performed in an opposite direction to that of the first plurality of swaths or in a same direction. An inspection system can implement this method by including a diffractive optical element (DOE) path after a magnification changer.Type: ApplicationFiled: June 16, 2016Publication date: October 6, 2016Inventors: Jamie Sullivan, Wenjian Cai, Yevgeniy Churin, Ralph Johnson, Meier Yitzhak Brender, Mark Shi Wang, Rex Runyon, Kai Cao
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Patent number: 9395340Abstract: A method of scanning a sample includes simultaneously forming a plurality of co-linear scans. Each scan is formed by a sweep of a spot by an acousto-optical device (AOD). The co-linear scans are separated by a predetermined spacing. A first plurality of swaths are formed by repeating the simultaneous forming of the plurality of co-linear scans in a direction perpendicular to the co-linear scans. The first plurality of swaths have an inter-swath spacing that is the same as the predetermined spacing. A second plurality of swaths can be formed adjacent to the first plurality of swaths. Forming the second plurality of swaths can be performed in an opposite direction to that of the first plurality of swaths or in a same direction. An inspection system can implement this method by including a diffractive optical element (DOE) path after a magnification changer.Type: GrantFiled: March 15, 2013Date of Patent: July 19, 2016Assignee: KLA-Tencor CorporationInventors: Jamie Sullivan, Wenjian Cai, Yevgeniy Churin, Ralph Johnson, Meier Yitzhak Brender, Mark Shi Wang, Rex Runyon, Kai Cao
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Publication number: 20160054232Abstract: An inspection system with selectable apodization includes a selectably configurable apodization device disposed along an optical pathway of an optical system. The apodization device includes one or more apodization elements operatively coupled to one or more actuation stages. The one or more actuation stages are configured to selectably actuate the one or more apodization elements along one or more directions. The inspection system includes a control system communicatively coupled to the one or more actuation stages. The control system is configured to selectably control an actuation state of at the one or more apodization elements so as to apply a selected apodization profile formed with the one or more apodization elements.Type: ApplicationFiled: November 2, 2015Publication date: February 25, 2016Inventors: Jamie M. Sullivan, Gary Janik, Steve Cui, Rex Runyon, Dieter Wilk, Steve Short, Mikhail Haurylau, Qiang Q. Zhang, Grace Hsiu-Ling Chen, Robert M. Danen, Suwipin Martono, Shobhit Verma, Wenjian Cai, Meier Brender
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Patent number: 9208553Abstract: An inspection system comprises a beam generator module for deflecting spots across scan portions of a specimen. The system also includes detection channels for sensing light emanating from a specimen in response to an incident beam directed towards such specimen and generating a detected image for each scan portion. The system comprises a synchronization system comprising clock generator modules for generating timing signals for deflectors of the beam generator module to scan the spots across the scan portions at a specified frequency and each of the detection channels to generate the corresponding detected image at a specified sampling rate. The timing signals are generated based on a common system clock and cause the deflectors to scan the spots and the detection channels to generate a detected image at a synchronized timing so as to minimize jitter between the scan portions in the response image.Type: GrantFiled: February 27, 2015Date of Patent: December 8, 2015Assignee: KLA-Tencor CorporationInventors: Kai Cao, Dennis G. Emge, Zhiqin Wang, Jamie M. Sullivan, Wenjian Cai, Henrik Nielsen
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Patent number: 9176069Abstract: An inspection system with selectable apodization includes an illumination source configured to illuminate a surface of a sample, a detector configured to detect at least a portion of light emanating from the surface of the sample, the illumination source and the detector being optically coupled via an optical pathway of an optical system, a selectably configurable apodization device disposed along the optical pathway, wherein the apodization device includes one or more apodization elements operatively coupled to one or more actuation stages configured to selectably actuate the one or more apodization elements along one or more directions, and a control system communicatively coupled to the one or more actuation and configured to selectably control apodization of illumination transmitted along the optical pathway by controlling an actuation state of the one or more apodization elements.Type: GrantFiled: February 6, 2013Date of Patent: November 3, 2015Assignee: KLA-Tencor CorporationInventors: Jamie M. Sullivan, Gary Janik, Steve Cui, Rex Runyon, Dieter Wilk, Steve Short, Mikhail Haurylau, Qiang Q. Zhang, Grace Hsiu-Ling Chen, Robert M. Danen, Suwipin Martono, Shobhit Verma, Wenjian Cai, Meier Brender
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Publication number: 20150226677Abstract: Disclosed are apparatus and methods for inspecting or measuring a specimen. A system comprises an illumination channel for generating and deflecting a plurality of incident beams to form a plurality of spots that scan across a segmented line comprised of a plurality of scan portions of the specimen. The system also includes one or more detection channels for sensing light emanating from a specimen in response to the incident beams directed towards such specimen and collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion. The one or more detection channels include at least one longitudinal side channel for longitudinally collecting a detected image for each scan portion as each incident beam's spot is scanned over its scan portion.Type: ApplicationFiled: February 10, 2015Publication date: August 13, 2015Applicant: KLA-Tencor CorporationInventors: Jamie M. Sullivan, Ralph Johnson, Evegeny Churin, Wenjian Cai, Yong Mo Moon
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Publication number: 20150170357Abstract: An inspection system comprises a beam generator module for deflecting spots across scan portions of a specimen. The system also includes detection channels for sensing light emanating from a specimen in response to an incident beam directed towards such specimen and generating a detected image for each scan portion. The system comprises a synchronization system comprising clock generator modules for generating timing signals for deflectors of the beam generator module to scan the spots across the scan portions at a specified frequency and each of the detection channels to generate the corresponding detected image at a specified sampling rate. The timing signals are generated based on a common system clock and cause the deflectors to scan the spots and the detection channels to generate a detected image at a synchronized timing so as to minimize jitter between the scan portions in the response image.Type: ApplicationFiled: February 27, 2015Publication date: June 18, 2015Applicant: KLA-Tencor CorporationInventors: Kai Cao, Dennis G. Emge, Zhiqin Wang, Jamie M. Sullivan, Wenjian Cai, Henrik Nielsen