Patents by Inventor Wiebe De Boer

Wiebe De Boer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method for suppression of wafer temperature drift in cold-wall CVD systems
    Patent number: 7921802
    Abstract: An apparatus and corresponding method are disclosed that uses one or more optical fibers in a susceptor that monitor radiation emitted by the backside of the susceptor. The optical fibers are filtered and converted into an electrical signal. A control system is used to maintain a constant wafer temperature by keeping the electrical signal constant during the deposition cycle. This overcomes problems caused by varying wafer temperature during non-selective epitaxial and poly-silicon growth on patterned wafers at low temperatures and reduced pressure.
    Type: Grant
    Filed: November 26, 2003
    Date of Patent: April 12, 2011
    Assignee: NXP B.V.
    Inventor: Wiebe De Boer
  • System and method for suppression of wafer temperature drift in cold-wall cvd systems
    Publication number: 20060057826
    Abstract: An apparatus and corresponding method are disclosed that uses one or more optical fibers in a susceptor that monitor radiation emitted by the backside of the susceptor. The optical fibers are filtered and converted into an electrical signal. A control system is used to maintain a constant wafer temperature by keeping the electrical signal constant during the deposition cycle. This overcomes problems caused by varying wafer temperature during non-selective epitaxial and poly-silicon growth on patterned wafers at low temperatures and reduced pressure.
    Type: Application
    Filed: November 26, 2003
    Publication date: March 16, 2006
    Applicant: Koninklijke Philips Electronics N.V.
    Inventor: Wiebe De Boer