Patents by Inventor Wilfried E. Haensch

Wilfried E. Haensch has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9397094
    Abstract: A semiconductor structure having a first source/drain semiconductor structure connected to a vertical channel such that the source/drain semiconductor structure has a vertical side that is substantially planar with a vertical side of the first vertical channel, the vertical channel being perpendicular relative to a layer of substrate to which the source/drain semiconductor structure is attached.
    Type: Grant
    Filed: September 25, 2014
    Date of Patent: July 19, 2016
    Assignee: International Business Machines Corporation
    Inventors: Kangguo Cheng, Wilfried E. Haensch, Ali Khakifirooz, Davood Shahrjerdi
  • Patent number: 9397226
    Abstract: An approach to forming a semiconductor structure for a vertical field effect transistor with a controlled gate overlap. The approach includes forming on a semiconductor substrate, a first semiconductor layer, a second semiconductor layer, a third semiconductor layer, a fourth semiconductor layer, a fifth semiconductor layer, and a first dielectric layer. The etched first dielectric layer and a first drain contact are surrounded by a first spacer. The first drain contact is composed of the fifth semiconductor layer. A second drain contact composed of the fourth semiconductor layer, a channel composed of the third semiconductor layer, and a second source contact composed of the second semiconductor layer are formed. Additionally, first source contact composed of the first semiconductor is formed and a gate electrode is formed on a portion of the first source contact layer surrounding a portion of the first pillar and the second pillar.
    Type: Grant
    Filed: November 12, 2015
    Date of Patent: July 19, 2016
    Assignee: International Business Machines Corporation
    Inventors: Anirban Basu, Cheng-Wei Cheng, Wilfried E. Haensch, Amlan Majumdar, Kuen-Ting Shiu
  • Patent number: 9368502
    Abstract: A memory cell, an array of memory cells, and a method for fabricating a memory cell with multigate transistors such as fully depleted finFET or nano-wire transistors in embedded DRAM. The memory cell includes a trench capacitor, a non-planar transistor, and a self-aligned silicide interconnect electrically coupling the trench capacitor to the non-planar transistor.
    Type: Grant
    Filed: October 17, 2011
    Date of Patent: June 14, 2016
    Assignee: GlogalFoundries, Inc.
    Inventors: Josephine B. Chang, Leland Chang, Michael A. Guillorn, Wilfried E. Haensch
  • Patent number: 9368420
    Abstract: Fabrication methods are disclosed that facilitate the production of electronic structures that are both flexible and stretchable to conform to non-planar (e.g. curved) surfaces without suffering functional damage due to excessive strain. Electronic structures including CMOS devices are provided that can be stretched or squeezed within acceptable limits without failing or breaking. The methods disclosed herein further facilitate the production of flexible, stretchable electronic structures having multiple levels of intra-chip connectors. Such connectors are formed through deposition and photolithographic patterning (back end of the line processing) and can be released following transfer of the electronic structures to flexible substrates.
    Type: Grant
    Filed: June 6, 2015
    Date of Patent: June 14, 2016
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Stephen W. Bedell, Wilfried E. Haensch, Bahman Hekmatshoartabari, Ghavam G. Shahidi, Davood Shahrjerdi
  • Patent number: 9362177
    Abstract: A method for forming a nanowire device comprises forming a fin on a substrate, depositing a first layer of insulator material on the substrate, etching to remove portions of the first layer of insulator material to reduce a thickness of the first layer of insulator material, epitaxially growing a first layer of semiconductor material on exposed sidewall portions of the fin, depositing a second layer of insulator material on the first layer of insulator material, etching to remove portions of the second layer of insulator material to reduce a thickness of the second layer of insulator material, and etching to remove portions of the first layer of semiconductor material to expose portions of the fin and form a first nanowire and a second nanowire.
    Type: Grant
    Filed: December 10, 2015
    Date of Patent: June 7, 2016
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Wilfried E. Haensch, Effendi Leobandung, Tenko Yamashita
  • Publication number: 20160149054
    Abstract: An approach to forming a semiconductor structure for a vertical field effect transistor with a controlled gate overlap. The approach includes forming on a semiconductor substrate, a first semiconductor layer, a second semiconductor layer, a third semiconductor layer, a fourth semiconductor layer, a fifth semiconductor layer, and a first dielectric layer. The etched first dielectric layer and a first drain contact are surrounded by a first spacer. The first drain contact is composed of the fifth semiconductor layer. A second drain contact composed of the fourth semiconductor layer, a channel composed of the third semiconductor layer, and a second source contact composed of the second semiconductor layer are formed. Additionally, first source contact composed of the first semiconductor is formed and a gate electrode is formed on a portion of the first source contact layer surrounding a portion of the first pillar and the second pillar.
    Type: Application
    Filed: November 12, 2015
    Publication date: May 26, 2016
    Inventors: Anirban Basu, Cheng-Wei Cheng, Wilfried E. Haensch, Amlan Majumdar, Kuen-Ting Shiu
  • Patent number: 9312358
    Abstract: A method of manufacturing a semiconductor device is disclosed. A p-type substrate is doped to form an N-well in a selected portion of a p-type substrate adjacent an anode region of the substrate. A p-type doped region is formed in the anode region of the p-type substrate. The p-type doped region and the N-well form a p-n junction.
    Type: Grant
    Filed: September 14, 2012
    Date of Patent: April 12, 2016
    Assignee: International Business Machines Corporation
    Inventors: Dechao Guo, Wilfried E. Haensch, Gan Wang, Yanfeng Wang, Xin Wang
  • Publication number: 20160099332
    Abstract: A gate structure in a semiconductor device includes: a gate stack formed on a substrate with three sections, a bottom portion, a top portion, and a sacrificial cap layer over the top portion; gate spacers, source and drain regions, a nitride encapsulation over top and sidewalls of the gate stack after removal of the sacrificial cap layer, an organic planarizing layer over the nitride encapsulation, planarizing the encapsulation, and silicidation performed over the source and drain regions and the bottom portion after removal of the nitride encapsulation, the organic planarizing layer, and the top portion of the gate stack.
    Type: Application
    Filed: December 14, 2015
    Publication date: April 7, 2016
    Inventors: Dechao Guo, Wilfried E. Haensch, Shu-jen Han, Daniel J. Jaeger, Yu Lu, Keith Kwong Hon Wong
  • Publication number: 20160093611
    Abstract: A semiconductor structure having a first source/drain semiconductor structure connected to a vertical channel such that the source/drain semiconductor structure has a vertical side that is substantially planar with a vertical side of the first vertical channel, the vertical channel being perpendicular relative to a layer of substrate to which the source/drain semiconductor structure is attached.
    Type: Application
    Filed: September 25, 2014
    Publication date: March 31, 2016
    Inventors: Kangguo Cheng, Wilfried E. Haensch, Ali Khakifirooz, Davood Shahrjerdi
  • Patent number: 9299795
    Abstract: A gate structure in a semiconductor device includes: a gate stack formed on a substrate with three sections, a bottom portion, a top portion, and a sacrificial cap layer over the top portion; gate spacers, source and drain regions, a nitride encapsulation over top and sidewalls of the gate stack after removal of the sacrificial cap layer, an organic planarizing layer over the nitride encapsulation, planarizing the encapsulation, and silicidation performed over the source and drain regions and the bottom portion after removal of the nitride encapsulation, the organic planarizing layer, and the top portion of the gate stack.
    Type: Grant
    Filed: March 13, 2015
    Date of Patent: March 29, 2016
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Dechao Guo, Wilfried E. Haensch, Shu-jen Han, Daniel J Jaeger, Yu Lu, Keith Kwong Hon Wong
  • Patent number: 9287362
    Abstract: An approach to forming a semiconductor structure for a vertical field effect transistor with a controlled gate overlap. The approach includes forming on a semiconductor substrate, a first semiconductor layer, a second semiconductor layer, a third semiconductor layer, a fourth semiconductor layer, a fifth semiconductor layer, and a first dielectric layer. The etched first dielectric layer and a first drain contact are surrounded by a first spacer. The first drain contact is composed of the fifth semiconductor layer. A second drain contact composed of the fourth semiconductor layer, a channel composed of the third semiconductor layer, and a second source contact composed of the second semiconductor layer are formed. Additionally, first source contact composed of the first semiconductor is formed and a gate electrode is formed on a portion of the first source contact layer surrounding a portion of the first pillar and the second pillar.
    Type: Grant
    Filed: November 21, 2014
    Date of Patent: March 15, 2016
    Assignee: International Business Machines Corporation
    Inventors: Anirban Basu, Cheng-Wei Cheng, Wilfried E. Haensch, Amlan Majumdar, Kuen-Ting Shiu
  • Patent number: 9252234
    Abstract: A method of manufacturing a semiconductor device is disclosed. A p-type substrate is doped to form an N-well in a selected portion of a p-type substrate adjacent an anode region of the substrate. A p-type doped region is formed in the anode region of the p-type substrate. The p-type doped region and the N-well form a p-n junction.
    Type: Grant
    Filed: September 6, 2012
    Date of Patent: February 2, 2016
    Assignee: International Business Machines Corporation
    Inventors: Dechao Guo, Wilfried E. Haensch, Gan Wang, Yanfeng Wang, Xin Wang
  • Patent number: 9227855
    Abstract: A system for disinfecting a water sample includes a pipe having an inlet for engaging a source of the water sample, a storage reservoir connected to an outlet of the pipe for holding the water sample, an array of photovoltaic cells coupled to the pipe for converting solar radiation into a current, and an array of light emitting diodes coupled to the pipe and powered by the current, wherein the array of light emitting diodes emits a germicidal wavelength of radiation. A method for disinfecting a fluent water sample includes generating a current using an array of photovoltaic cells, using the current to power an array of light emitting diodes, wherein the array of light emitting diodes emits a germicidal wavelength of radiation, and exposing the fluent water sample to the radiation while transporting the fluent water sample from a source to a storage reservoir.
    Type: Grant
    Filed: February 1, 2013
    Date of Patent: January 5, 2016
    Assignee: International Business Machines Corporation
    Inventors: Anirban Basu, Stephen W. Bedell, Wilfried E. Haensch, Davood Shahrjerdi
  • Publication number: 20150380597
    Abstract: Photovoltaic structures are provided with field-effect inversion/accumulation layers as emitter layers induced by work-function differences between gate conductor layers and substrates thereof. Localized contact regions are in electrical communication with the gate conductors of such structures for repelling minority carriers. Such localized contact regions may include doped crystalline or polycrystalline silicon regions between the gate conductor and silicon absorption layers. Fabrication of the structures can be conducted without alignment between metal contacts and the localized contact regions or high temperature processing.
    Type: Application
    Filed: August 31, 2015
    Publication date: December 31, 2015
    Inventors: Wilfried E. Haensch, Bahman Hekmatshoartabari, Devendra K. Sadana, Ghavam G. Shahidi, Davood Shahrjerdi
  • Patent number: 9209024
    Abstract: A back end of line device and method for fabricating a transistor device include a substrate having an insulating layer formed thereon and a channel layer formed on the insulating layer. A gate structure is formed on the channel layer. Dopants are implanted into an upper portion of the channel layer on opposite sides of the gate structure to form shallow source and drain regions using a low temperature implantation process. An epitaxial layer is selectively grown on the shallow source and drain regions to form raised regions above the channel layer and against the gate structure using a low temperature plasma enhanced chemical vapor deposition process, wherein low temperature is less than about 400 degrees Celsius.
    Type: Grant
    Filed: November 15, 2012
    Date of Patent: December 8, 2015
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Wilfried E. Haensch, Bahman Hekmatshoar-Tabari, Ali Khakifirooz, Tak H. Ning, Ghavam G. Shahidi, Davood Shahrjerdi
  • Patent number: 9203041
    Abstract: A semiconductor device includes a substrate that extends along a first direction to define a length and second direction perpendicular to the first direction to define a height. The substrate includes a dielectric layer and at least one gate stack formed on the dielectric layer. A source contact is formed adjacent to a first side of the gate stack and a drain contact formed adjacent to an opposing second side of the gate stack. A carbon nanotube is formed on the source contact and the drain contact. A first portion of the nanotube forms a source. A second portion forms a drain. A third portion is interposed between the source and drain to define a gate channel that extends along the first direction. The source and the drain extend along the second direction and have a greater length than the gate channel.
    Type: Grant
    Filed: January 31, 2014
    Date of Patent: December 1, 2015
    Assignee: International Business Machines Corporation
    Inventors: Shu-Jen Han, Wilfried E. Haensch, James B. Hannon
  • Patent number: 9166072
    Abstract: Photovoltaic structures are provided with field-effect inversion/accumulation layers as emitter layers induced by work-function differences between gate conductor layers and substrates thereof. Localized contact regions are in electrical communication with the gate conductors of such structures for repelling minority carriers. Such localized contact regions may include doped crystalline or polycrystalline silicon regions between the gate conductor and silicon absorption layers. Fabrication of the structures can be conducted without alignment between metal contacts and the localized contact regions or high temperature processing.
    Type: Grant
    Filed: September 4, 2012
    Date of Patent: October 20, 2015
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Wilfried E. Haensch, Bahman Hekmatshoartabari, Devendra K. Sadana, Ghavam G. Shahidi, Davood Shahrjerdi
  • Publication number: 20150287740
    Abstract: A semiconductor device including at least one semiconductor device on a first surface of a dielectric layer, and at least one stressor structure having an intrinsic stress on a second surface of the dielectric layer. The at least one semiconductor device and the at least one stressor structure are present on opposing sides of the dielectric layer. The at least one stressor structure induces a stress on the at least one semiconductor device opposite the intrinsic stress.
    Type: Application
    Filed: April 2, 2014
    Publication date: October 8, 2015
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Stephen W. Bedell, Wilfried E. Haensch, Bahman Hekmatshoartabari, Ghavam G. Shahidi, Davood Shahrjerdi
  • Publication number: 20150270187
    Abstract: Fabrication methods are disclosed that facilitate the production of electronic structures that are both flexible and stretchable to conform to non-planar (e.g. curved) surfaces without suffering functional damage due to excessive strain. Electronic structures including CMOS devices are provided that can be stretched or squeezed within acceptable limits without failing or breaking. The methods disclosed herein further facilitate the production of flexible, stretchable electronic structures having multiple levels of intra-chip connectors. Such connectors are formed through deposition and photolithographic patterning (back end of the line processing) and can be released following transfer of the electronic structures to flexible substrates.
    Type: Application
    Filed: June 6, 2015
    Publication date: September 24, 2015
    Inventors: Stephen W. Bedell, Wilfried E. Haensch, Bahman Hekmatshoartabari, Ghavam G. Shahidi, Davood Shahrjerdi
  • Publication number: 20150255541
    Abstract: A back end of line device and method for fabricating a transistor device include a substrate having an insulating layer formed thereon and a channel layer formed on the insulating layer. A gate structure is formed on the channel layer. Dopants are implanted into an upper portion of the channel layer on opposite sides of the gate structure to form shallow source and drain regions using a low temperature implantation process. An epitaxial layer is selectively grown on the shallow source and drain regions to form raised regions above the channel layer and against the gate structure using a low temperature plasma enhanced chemical vapor deposition process, wherein low temperature is less than about 400 degrees Celsius.
    Type: Application
    Filed: May 22, 2015
    Publication date: September 10, 2015
    Inventors: WILFRIED E. HAENSCH, BAHMAN HEKMATSHOAR-TABARI, ALI KHAKIFIROOZ, TAK H. NING, GHAVAM G. SHAHIDI, DAVOOD SHAHRJERDI