Abstract: A projection exposure apparatus is equipped with an illumination system, a reticle, a projection objective and an image plane. Interstitial spaces between the individual elements of the apparatus are open to the ambient space. A gas purge device which carries a stream of noble gas or nitrogen is arranged in at least one of the interstitial spaces. The gas purge device is of a shape and size so that one or more interstitial spaces are at least to a large extent sealed off from the ambient space surrounding the projection apparatus.

Abstract: A projection exposure apparatus is equipped with an illumination system, a reticle, a projection objective and an image plane. Interstitial spaces between the individual elements of the apparatus are open to the ambient space. A gas purge device which carries a stream of noble gas or nitrogen is arranged in at least one of the interstitial spaces. The gas purge device is of a shape and size so that one or more interstitial spaces are at least to a large extent sealed off from the ambient space surrounding the projection apparatus.

Abstract: The invention relates to an apparatus for preparing a rapidly solidifying mixture from a plurality of liquid components and subsequent atomization of the solidifying mixture. The apparatus comprises a mixing chamber (4), a liquid distributor (1′,7) and N identical, droplet-forming nozzles (9a,9b) connected to the liquid distributor. The liquids to be mixed can be fed separately to the mixing chamber and the mixing chamber has neither significant back-mixing in the areas in which reactions can occur, nor significant dead spaces in the flow in these areas. The liquid distributor (1′,7) is connected to the mixing chamber and divides the mixed stream coming from the mixing chamber equally over the nozzles (9a,9b) without significant back-mixing or dead spaces in the flow, so that the flow properties of the partial streams and their residence time in the liquid distributor are identical.

Abstract: Continuous, chaotic convection mixer, convection heat exchanger and convection reactor The invention relates to a device (1), in particular for mixing, for heat exchange or for carrying out reactions, having one or more through-flow elements (2) which have a center line (3) in the direction of flow, wherein the element(s) (2) is/are at least partially shaped or arranged such that the curve (9) formed by the center line(s) (3) approximately satisfies the following parametric representation: ϑ ⁡ ( t ) = ( ( - 1 ) [ t ] ⁢ a ⁡ ( t