Patents by Inventor Wilhelm Kuehn

Wilhelm Kuehn has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Inspection system and inspection method to qualify semiconductor structures
    Patent number: 11378532
    Abstract: An inspection system serves to qualify semiconductor structures. The inspection system has an ion beam source for space-resolved exposition of the structures to be qualified with an ion beam. The inspection system also includes a secondary ion detection device with a mass spectrometer. The mass spectrometer is configured to measure an ion mass to charge ratio in a given bandwidth.
    Type: Grant
    Filed: December 21, 2020
    Date of Patent: July 5, 2022
    Assignees: Carl Zeiss SMT GmbH, Carl Zeiss Microscopy, LLC
    Inventors: Brett Lewis, Wilhelm Kuehn, Deying Xia, Shawn McVey, Ulrich Mantz
  • INSPECTION SYSTEM AND INSPECTION METHOD TO QUALIFY SEMICONDUCTOR STRUCTURES
    Publication number: 20210109046
    Abstract: An inspection system serves to qualify semiconductor structures. The inspection system has an ion beam source for space-resolved exposition of the structures to be qualified with an ion beam. The inspection system also includes a secondary ion detection device with a mass spectrometer. The mass spectrometer is configured to measure an ion mass to charge ratio in a given bandwidth.
    Type: Application
    Filed: December 21, 2020
    Publication date: April 15, 2021
    Inventors: Brett Lewis, Wilhelm Kuehn, Deying Xia, Shawn McVey, Ulrich Mantz