Abstract: A method for monitoring the condition of an electric current-carrying heating element involving installing the heating element in a location and setting the initial composition Ci of the material as a reference baseline at an initial time Ti corresponding to said installation of the heating element. Data is then collected reflecting the subsequent composition Cs of the heating element material after a subsequent time Ts at the installed location and any change in the material composition of the heating element between Ti and Ts is monitored. An alarm is sent when the change reaches a threshold value indicating a possible failure condition. According to one embodiment, an impedance monitor is provided that calculates and compares impedance at the required levels of accuracy to determine changes in material composition. The impedance monitor, or portions thereof may be embedded within a microcontroller for increased portability and functionality.

Abstract: A method for monitoring the condition of an electric current-carrying heating element involving installing the heating element in a location and setting the initial composition Ci of the material as a reference baseline at an initial time Ti corresponding to said installation of the heating element. Data is then collected reflecting the subsequent composition Cs of the heating element material after a subsequent time Ts at the installed location and any change in the material composition of the heating element between Ti and Ts is monitored. An alarm is sent when the change reaches a threshold value indicating a possible failure condition. According to one embodiment, an impedance monitor is provided that calculates and compares impedance at the required levels of accuracy to determine changes in material composition. The impedance monitor, or portions thereof may be embedded within a microcontroller for increased portability and functionality.

Abstract: The present invention provides a furnace which heat treats substrates. The furnace includes a heating section and working components. The heating section includes heating coils having spacers disposed within the heating coils where a mass of the heating coils and a mass of the spacers contributes to a mass of the heating section. The working components include a processing chamber and a transport mechanism. The processing chambers facilitates passage of a substrate through the heating section. The transport mechanism transports the substrate through the heating section and into the exit assembly. The heating section mass exceeds a combined mass of the processing chamber, the transport mechanism and the substrate within the heating section.

Abstract: The furnace 70 includes a heating element 72 which is restrained from growth during operation of the furnace 70 by retaining spacers 84 which provide a yoke 88 around the individual coils 102 of the heating element 72 and which spacers 84 are interlocked with each other. A high alumina fiber insulation 180 is applied to insulate the heating element 72. This high alumina fiber insulation 180 has enhanced properties with respect to shrinkage and devitrification.

Abstract: The furnace 70 includes a heating element 72 which is restrained from growth during operation of the furnace 70 by retaining spacers 84 which provide a yoke 88 around the individual coils 102 of the heating element 72 and which spacers 84 are interlocked with each other. A high alumina fiber insulation 180 is applied to insulate the heating element 72. This high alumina fiber insulation 180 has enhanced properties with respect to shrinkage and devitrification.