Abstract: An integrated charge neutralization and imaging system is disclosed. An energy analyzer is mounted directed above a target surface consisting of a 90 degree spherical electrostatic capacitor with variable voltage on both the inner and outer electrodes. Circular apertures are mounted at the entrance and exit of the analyzer to limit the fringing electric fields and define the beam size. An electrostatic lenses is used for focusing the beam from the electron gun into the virtual object plane of the energy analyzer. It is also used to collect secondary electrons or secondary ions leaving the energy analyzer and focused them into the imaging optics. A defector is used for steering the electron beam onto the axis of the lens. This deflector is also used to steer the secondary electrons or secondary ions into the electron/ion detector, or to steer the secondary ions into the SIMS mass filter entrance aperture.

Abstract: A lens system for directing and focussing acoustic energy from an array of acoustic transducers on a small target can be made lightweight, low in absorption and dispersion by incorporating plastic Fresnel lenses with prisms into a monolithic tray of the same plastic with one lens for each transducer.

Abstract: A first order achromatic magnetic deflection system for use in conjunction with a charged particle accelerator, is realized from a stepped gap manget wherein a charged particle propagated through the system is subject to at least two adjacent homogenous magnetic fields in traversing one-half of a symmetric trajectory through the system.