Abstract: The present disclosure provides example resonance filters and methods for making the same. The resonance filter includes a first layer having n adjacent resonance cavities, n being at least 2 and said cavities each being separated from one another by a partition wall. The resonance filter also includes a second layer having at least n?1 coupling cavities. The cavities in the first layer are formed as resonance cavities and those in the second layer are formed as (a) coupling cavity/cavities and are open on one side. The second layer is arranged on the first layer in such a way that the resonance cavities in the first layer are interconnected by the coupling cavity/cavities in the second layer. Further, the resonance filter is configured as a monolithic component.

Abstract: The invention relates to a resonance filter (1) made of silicon for use in the micrometer and millimeter wave length range. Accordingly, a resonance filter having low loss and a high Q-factor is provided, comprising two layers. A first layer thereof carries only resonance cavities and a second layer carries only coupling cavities. Furthermore, a method for the production of the filter according to the invention is provided. This enables the cost-effective production of the resonance filter by means of KOH or TMAH etching technology.