Patents by Inventor William R. Copeland

William R. Copeland has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Emergency machine off feature with safety control interface
    Patent number: 7847683
    Abstract: An apparatus for implementing an emergency machine off circuit of a fabrication system, includes: at least one safety switch adapted for shunting an operation enable signal from a piece of equipment selected for removal from service, the switch also removing from service supplemental devices for the selected equipment. A semiconductor fabrication system and a method for removing equipment from service are provided.
    Type: Grant
    Filed: September 12, 2007
    Date of Patent: December 7, 2010
    Assignee: International Business Machines Corporation
    Inventors: Gregory S. Boettcher, William R. Copeland, Joseph P. DeGeorge, Scott M. Hargash, William T. Petry, Robert R. Young
  • EMERGENCY MACHINE OFF FEATURE WITH SAFETY CONTROL INTERFACE
    Publication number: 20090066502
    Abstract: An apparatus for implementing an emergency machine off circuit of a fabrication system, includes: at least one safety switch adapted for shunting an operation enable signal from a piece of equipment selected for removal from service, the switch also removing from service supplemental devices for the selected equipment. A semiconductor fabrication system and a method for removing equipment from service are provided.
    Type: Application
    Filed: September 12, 2007
    Publication date: March 12, 2009
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Gregory S. Boettcher, William R. Copeland, Joseph P. DeGeorge, Scott M. Hargash, William T. Petry, Robert R. Young, JR.