Abstract: An apparatus for removing a pellicle that is adhesively bonded to a photomask. A first embodiment of the invention is provided for removing a pellicle having a generally rectangular shape. The photomask is placed in a housing with the pellicle facing down. A pair of blades are mounted on a carriage that are longitudinally movable within the housing. The blades are adjustable such that the cutting edges are immediately below the surface of the photomask. The carriage is driven by a rack and pinion assembly causing the blades to cut through the adhesive layer bonding the pellicle to the photomask. A second embodiment of the invention is provided for removing a pellicle having a generally circular shape. In this embodiment, the blades are mounted on a rotating bar. Rotation of the bar causes the blades to cut through the adhesive layer bonding the pellicle to the photomask.

Abstract: A method and apparatus for removing stepper guides that are adhesively bonded to a reticle. A reticle is supported in a generally horizontal position with the stepper guides in contact with heater blocks. Heating elements are placed within the heater blocks and are supplied with a controlled electrical current to maintain the heater blocks at a predetermined temperature. Heat is transferred from the heater blocks to the stepper guides. After a sufficient amount of time, the adhesive begins to flow and the stepper guides may be removed from the reticle. Separate heater blocks are configured to accommodate standard field and wide field guides.