Abstract: Disclosed herein are stacked transistors having device strata with different channel widths, as well as related methods and devices. In some embodiments, an integrated circuit structure may include stacked strata of transistors, wherein different channel materials of different strata have different widths.

Abstract: Techniques are provided herein to form semiconductor devices having a stacked transistor configuration. An n-channel device and a p-channel device may both be gate-all-around (GAA) transistors each having any number of nanoribbons extending in the same direction where one device is located vertically above the other device. According to some embodiments, the n-channel device and the p-channel device conductively share the same gate, and a width of the gate structure around one device is greater than the width of the gate structure around the other device. According to some other embodiments, the n-channel device and the p-channel device each have a separate gate structure that is isolated from the other using a dielectric layer between them. A gate contact is adjacent to the upper device and contacts the gate structure of the other lower device.

Abstract: An apparatus is described. The apparatus includes a FINFET device having a channel. The channel is composed of a first semiconductor material that is epitaxially grown on a subfin structure beneath the channel. The subfin structure is composed of a second semiconductor material that is different than the first semiconductor material. The subfin structure is epitaxially grown on a substrate composed of a third semiconductor material that is different than the first and second semiconductor materials. The subfin structure has a doped region to substantially impede leakage currents between the channel and the substrate.

Abstract: A device is disclosed. The device includes a first semiconductor fin, a first source-drain epitaxial region adjacent a first portion of the first semiconductor fin, a second source-drain epitaxial region adjacent a second portion of the first semiconductor fin, a first gate conductor above the first semiconductor fin, a gate spacer covering the sides of the gate conductor, a second semiconductor fin below the first semiconductor fin, a second gate conductor on a first side of the second semiconductor fin and a third gate conductor on a second side of the second semiconductor fin, a third source-drain epitaxial region adjacent a first portion of the second semiconductor fin, and a fourth source-drain epitaxial region adjacent a second portion of the second semiconductor fin. The device also includes a dielectric isolation structure below the first semiconductor fin and above the second semiconductor fin that separates the first semiconductor fin and the second semiconductor fin.

Abstract: Embodiments herein describe techniques for an integrated circuit (IC). The IC may include a lower device layer that includes a first transistor structure, an upper device layer above the lower device layer including a second transistor structure, and an isolation wall that extends between the upper device layer and the lower device layer. The isolation wall may be in contact with an edge of a first gate structure of the first transistor structure and an edge of a second gate structure of the second transistor structure, and may have a first width to the edge of the first gate structure at the lower device layer, and a second width to the edge of the second gate structure at the upper device layer. The first width may be different from the second width. Other embodiments may be described and/or claimed.

Abstract: Embodiments disclosed herein include a semiconductor device. In an embodiment, the semiconductor device comprises a first transistor strata. The first transistor strata comprises a first backbone, a first transistor adjacent to a first edge of the first backbone, and a second transistor adjacent to a second edge of the first backbone. In an embodiment, the semiconductor device further comprises a second transistor strata over the first transistor strata. The second transistor strata comprises a second backbone, a third transistor adjacent to a first edge of the second backbone, and a fourth transistor adjacent to a second edge of the second backbone.

Abstract: A thin film transistor (TFT) apparatus is disclosed, where the apparatus includes a gate comprising metal, a source and a drain, a semiconductor body, and two or more dielectric structures between the gate and the semiconductor body. In an example, the two or more dielectric structures may include at least a first dielectric structure having a first bandgap and a second dielectric structure having a second bandgap. The first bandgap may be different from the second bandgap. The TFT apparatus may be a back-gated TFT apparatus where the source is at least in part coplanar with the drain, and the gate is non-coplanar with the source and the drain.

Abstract: Embodiments herein describe techniques for a semiconductor device including a semiconductor substrate, a first device of a first wafer, and a second device at back end of a second wafer, where the first device is bonded with the second device. A first metal electrode of the first device within a first dielectric layer is coupled to an n-type oxide TFT having a channel layer that includes an oxide semiconductor material. A second metal electrode of the second device within a second dielectric layer is coupled to p-type organic TFT having a channel layer that includes an organic material. The first dielectric layer is bonded to the second dielectric layer, and the first metal electrode is bonded to the second metal electrode. The n-type oxide TFT and the p-type organic TFT form a symmetrical pair of transistors of a CMOS circuit. Other embodiments may be described and/or claimed.

Abstract: A stacked-substrate advanced encryption standard (AES) integrated circuit device is described in which at least some circuits associated logic functions (e.g., AES encryption operations, memory cell access and control) are provided on a first substrate. Memory arrays used with the AES integrated circuit device (sometimes referred to as “embedded memory”) are provided on a second substrate stacked on the first substrate, thus forming a AES integrated circuit device on a stacked-substrate assembly. Vias are fabricated to pass through the second substrate, into a dielectric layer between the first substrate and the second substrate, and electrically connect to conductive interconnections of the AES logic circuits.

Abstract: Techniques are provided herein to form semiconductor devices having backside contacts. Sacrificial plugs are formed first within a substrate at particular locations to align with source and drain regions during a later stage of processing. Another wafer is subsequently bonded to the surface of the substrate and is thinned to effectively transfer different material layers to the top surface of the substrate. One of the transferred layers acts as a seed layer for the growth of additional semiconductor material used to form semiconductor devices. The source and drain regions of the semiconductor devices are sufficiently aligned over the previously formed sacrificial plugs. A backside portion of the substrate may be removed to expose the sacrificial plugs from the backside. Removal of the plugs and replacement of the recesses left behind with conductive material forms the conductive backside contacts to the source or drain regions.

Abstract: A device is disclosed. The device includes a first epitaxial region, a second epitaxial region, a first gate region between the first epitaxial region and a second epitaxial region, a first dielectric structure underneath the first epitaxial region, a second dielectric structure underneath the second epitaxial region, a third epitaxial region underneath the first epitaxial region, a fourth epitaxial region underneath the second epitaxial region, and a second gate region between the third epitaxial region and a fourth epitaxial region and below the first gate region. The device also includes, a conductor via extending from the first epitaxial region, through the first dielectric structure and the third epitaxial region, the conductor via narrower at an end of the conductor via that contacts the first epitaxial region than at an opposite end.

Abstract: Techniques are provided herein to form gate-all-around (GAA) semiconductor devices, such as those having a stacked transistor configuration. In one example case, two different semiconductor devices may both be GAA transistors each having any number of nanoribbons extending in the same (e.g., horizontal) direction where one device is located vertically above the other device. An internal spacer structure extends between the nanoribbons of both devices along the vertical direction, where the spacer structure includes one or more rib features between the two devices. A gate structure that includes one or more gate dielectric layers and one or more gate electrode layers may be formed around the nanoribbons of both devices, in some cases. In other cases, a split-gate configuration is used where upper and lower gate structures are separated by an isolation structure. Forksheet transistors and other GAA configurations may be formed using the techniques as well.

Abstract: Techniques are provided herein to form semiconductor devices having a stacked transistor configuration. In an example, an upper (e.g., n-channel) device and a lower (e.g., p-channel) device may both be gate-all-around (GAA) transistors each having any number of nanoribbons extending in the same direction where the upper device is located vertically above the lower device. According to some embodiments, an internal spacer structure extends between the nanoribbons of the upper device and the nanoribbons of the lower device along the vertical direction, where the spacer structure has a stepwise or an otherwise outwardly protruding profile as it extends between the nanoribbons of the upper device and the lower device. Accordingly, in one example, a gate structure formed around the nanoribbons of both the n-channel device and the p-channel device exhibits a greater width in the region between the nanoribbons of the n-channel device and the nanoribbons of the p-channel device.

Abstract: An integrated circuit structure comprises a lower device layer that includes a first structure comprising a plurality of PMOS transistors. An upper device layer is formed on the lower device layer, wherein the upper device layer includes a second structure comprising a plurality of NMOS transistors having a group III-V material source/drain region.

Abstract: A memory cell is disclosed. The memory cell includes a storage component that includes a chalcogenide stack that includes a plurality of layers of material and a selector component that includes a Schottky diode.

Abstract: Embodiments of the invention include nanowire and nanoribbon transistors and methods of forming such transistors. According to an embodiment, a method for forming a microelectronic device may include forming a multi-layer stack within a trench formed in a shallow trench isolation (STI) layer. The multi-layer stack may comprise at least a channel layer, a release layer formed below the channel layer, and a buffer layer formed below the channel layer. The STI layer may be recessed so that a top surface of the STI layer is below a top surface of the release layer. The exposed release layer from below the channel layer by selectively etching away the release layer relative to the channel layer.

Abstract: IC device including back-end-of-line (BEOL) transistors with crystalline channel material. A BEOL crystalline seed may be formed over a dielectric layer that has been planarized over a front-end-of-line (FEOL) transistor level that employs a monocrystalline substrate semiconductor. The BEOL crystalline seed may be epitaxial to the substrate semiconductor, or may have crystallinity independent of that of the substrate semiconductor. The BEOL crystalline seed may comprise a first material having a higher melt temperature than a melt material formed over the seed and over the dielectric layer. Through rapid melt growth, the melt material may be heated to a temperature sufficient to transition from an as-deposited state to a more crystalline state that is derived from, and therefore associated with, the BEOL crystalline seed. A BEOL transistor may then be fabricated from the crystallized material.

Abstract: An integrated circuit structure includes a first semiconductor fin extending horizontally in a length direction and including a bottom portion and a top portion above the bottom portion, a bottom transistor associated with the bottom portion of the first semiconductor fin, a top transistor above the bottom transistor and associated with the top portion of the first semiconductor fin, and a first vertical diode. The first vertical diode includes: a bottom region associated with at least the bottom portion of the first semiconductor fin, the bottom region including one of n-type and p-type dopant; a top region associated with at least the top portion of the first semiconductor fin, the top region including the other of n-type and p-type dopant; a bottom terminal electrically connected to the bottom region; and a top terminal electrically connected to the top region at the top portion of the first semiconductor fin.

Abstract: A stacked transistor architecture has a fin structure that includes lower and upper portions separated by an isolation region built into the fin structure. Upper and lower gate structures on respective upper and lower fin structure portions may be different from one another (e.g., with respect to work function metal and/or gate dielectric thickness). One example methodology includes depositing lower gate structure materials on the lower and upper channel regions, recessing those materials to re-expose the upper channel region, and then re-depositing upper gate structure materials on the upper channel region. Another example methodology includes depositing a sacrificial protective layer on the upper channel region. The lower gate structure materials are then deposited on both the exposed lower channel region and sacrificial protective layer.

Abstract: An integrated circuit having a transistor architecture includes a first semiconductor body and a second semiconductor body. The first and second semiconductor bodies are arranged vertically (e.g., stacked configuration) or horizontally (e.g., forksheet configuration) with respect to each other, and separated from one another by insulator material, and each can be configured for planar or non-planar transistor topology. A first gate structure is on the first semiconductor body, and includes a first gate electrode and a first high-k gate dielectric. A second gate structure is on the second semiconductor body, and includes a second gate electrode and a second high-k gate dielectric. In an example, the first gate electrode includes a layer comprising a compound of silicon and one or more metals; the second gate structure may include a silicide workfunction layer, or not. In one example, the first gate electrode is n-type, and the second gate electrode is p-type.