Patents by Inventor Wilma J. Horkans

Wilma J. Horkans has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6251787
    Abstract: Eliminating exposure of PN junctions to light capable of invoking a photovoltaic effect and/or inhibiting the oxidation and reduction reactions induced by the photovoltaic effect prevents the electrochemical dissolution of metal components on semiconductor devices by electrolysis. A darkened enclosure for use on tools for wafer CMP, brush cleaning, unloading, and rinsing will eliminate exposure. Alternatively, illumination of a semiconductor wafer can be limited to wavelengths of light that do not provide enough energy to induce a photovoltaic effect. An inhibitor in the CMP slurry and/or post-CMP water rinse blocks the oxidation and/or reduction reactions. A blocking agent, such as a high molecular weight surfactant, will interfere with both the oxidation and reduction reactions at the metal surface. Also, a poisoning agent will impede the reduction portion of electrolysis.
    Type: Grant
    Filed: February 28, 2000
    Date of Patent: June 26, 2001
    Assignee: International Business Machines Corporation
    Inventors: Daniel C. Edelstein, Wilma J. Horkans, Stephen E. Luce, Naftall E. Lustig, Keith R. Pope, Peter D. Roper
  • Patent number: 6153043
    Abstract: Eliminating exposure of PN junctions to light capable of invoking a photovoltaic effect and/or inhibiting the oxidation and reduction reactions induced by the photovoltaic effect prevents the electrochemical dissolution of metal components on semiconductor devices by electrolysis. A darkened enclosure for use on tools for wafer CMP, brush cleaning, unloading, and rinsing will eliminate exposure. Alternatively, illumination of a semiconductor wafer can be limited to wavelengths of light that do not provide enough energy to induce a photovoltaic effect. An inhibitor in the CMP slurry and/or post-CMP water rinse blocks the oxidation and/or reduction reactions. A blocking agent, such as a high molecular weight surfactant, will interfere with both the oxidation and reduction reactions at the metal surface. Also, a poisoning agent will impede the reduction portion of electrolysis.
    Type: Grant
    Filed: February 6, 1998
    Date of Patent: November 28, 2000
    Assignee: International Business Machines Corporation
    Inventors: Daniel C. Edelstein, Wilma J. Horkans, Stephen E. Luce, Naftali E. Lustig, Keith R. Pope, Peter D. Roper
  • Patent number: 5582927
    Abstract: Certain alloys of CoFeCu are provided in film and laminate form which have a unique combination of electromagnetic properties which enable them to be used as magnetic thin films in magnetic recording heads, shields and flux guides. The films and laminates thereof are electrodeposited from a plating bath in a DC or pulsed current electrodeposition process.
    Type: Grant
    Filed: December 5, 1994
    Date of Patent: December 10, 1996
    Assignee: International Business Machines Corporation
    Inventors: Panayotis C. Andricacos, Jei-Wei Chang, Wilma J. Horkans, Judith D. Olsen, Bojan Petek, Lubomyr T. Romankiw
  • Patent number: 5385661
    Abstract: An acidic electrolytic solution for use in the electrodeposition of copper-rich alloys on a substrate, the less noble component being incorporated by underpotential deposition. The solution includes a first salt containing copper cations; a second salt containing cations of a metal less noble than copper; and an acid electrolyte (e.g., methane sulfonic acid) such that at typical current densities the potential is in the range of underpotential deposition of the less noble metal on the copper.Also provided is a process for using the acidic electrolytic solution.
    Type: Grant
    Filed: September 17, 1993
    Date of Patent: January 31, 1995
    Assignee: International Business Machines Corporation
    Inventors: Panayotis C. Andricacos, I-Chia Chang, Hariklia Deligianni, Wilma J. Horkans
  • Patent number: 5196096
    Abstract: A method for measuring concentrations of addition agents in solutions of additive mixtures, namely for monitoring additives in PbSn plating solutions, comprising the steps of: (a) preparing a basis solution which contains an electroactive species whose electroreduction reaction is sensitive to the additive of interest; (b) preparing calibration standard sample solutions comprising appropriate concentrations of all species other than the additive; (c) preparing the working solution whose additive concentration is to be determined; (d) applying a pulse voltammetry technique, at a hanging Hg drop electrode, to a sample of the basis solution located in a cell of a polarographic analyzer; (e) thereafter measuring the polarographic peak height for the indicator reaction in the basis solution; (f) adding a measured amount of the working solution to the basis solution sample in the cell; (g) thereafter measuring the peak height for the indicator reaction in the mixed solution of step (f); and (h) repeating steps (f)
    Type: Grant
    Filed: March 24, 1992
    Date of Patent: March 23, 1993
    Assignee: International Business Machines Corporation
    Inventors: I-Chia H. Chang, Wilma J. Horkans
  • Patent number: 5192403
    Abstract: A cyclic voltammetric method for measuring concentrations of subcomponents of additive mixtures, comprising the steps of: (a) preparing a basis solution which contains all of the components of an unknown solution to be measured, except a component of interest; (b) preparing a calibration solution which contains the component of interest in a known concentration near that which would be expected in the unknown solution; (c) adding measured amounts of the calibration solution to a first defined volume of the basis solution and plotting a first cathodic charge against the added volume of the calibration standard; (d) adding measured amounts of the unknown solution to a second volume of the basis solution and plotting a second cathodic charge against the added volume of the unknown solution; and (e) comparing the slopes of the first and second curves to determine the concentration of the component of interest in the unknown solution.
    Type: Grant
    Filed: May 16, 1991
    Date of Patent: March 9, 1993
    Assignee: International Business Machines Corporation
    Inventors: I-Chia H. Chang, Wilma J. Horkans
  • Patent number: 4717591
    Abstract: This invention relates to the prevention of mechanical and electrical failures in structures that are heat-treated, and more particularly relates to the use of coating layers containing Co and P on corrosible materials such as Cu. The invention has significant utility in the protection of Cu current-carrying lines in electronic structures that comprise multi layers that are subjected to heat treatments that would normally adversely affect the Cu lines. The CoP coating layer also acts to prevent interdiffusion between Cu and contact metals, such as Au.
    Type: Grant
    Filed: March 6, 1986
    Date of Patent: January 5, 1988
    Assignee: International Business Machines Corporation
    Inventors: Raul E. Acosta, Wilma J. Horkans, Ruby Mukherjee, Judith D. Olsen