Patents by Inventor Wim Tjibbe Tel

Wim Tjibbe Tel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method, computer program product and apparatus for scheduling maintenance actions in a substrate processing system
    Patent number: 6879866
    Abstract: A method of scheduling one or more maintenance actions in at least a part of a substrate processing system is provided. According to an embodiment, the method includes determining a gap in the flow of substrates in a part of the substrate processing system and scheduling one or more maintenance actions to be performed in another part of the substrate processing during a period associated with the gap. An increase of productivity of substrate processing can be achieved through a reduction in downtime in a substrate processing system by appropriate scheduling of maintenance actions.
    Type: Grant
    Filed: August 4, 2003
    Date of Patent: April 12, 2005
    Assignee: ASML Netherlands B.V.
    Inventors: Wim Tjibbe Tel, Harm Roelof Rossing, Suzan Leonie Auer-Jongepier