Abstract: A particle beam system comprises a particle beam column, a detection system and a controller. The particle beam column is configured to generate a particle beam and to direct it onto a sample, as a result of which charged particles are emitted by the sample. The detection system detects charged particles and comprises: an electrode, which can accelerate the charged particles; a potential source, which applies an adjustable electrical potential to the electrode; a scintillator; and a light detector, which outputs a detection signal. The controller controls the potential source and is configured to change the potential on the basis of the detection signal such that the scintillator operates outside its saturation and such that the light detector operates outside its saturation.

Abstract: The disclosure relates to a sample carrier for accommodating a microscopic sample for examination or processing in a microscope system. The sample carrier is accommodatable in an accommodating device, such that the sample carrier in the accommodated state assumes a defined orientation relative to the accommodating device. The sample carrier has an individual sample carrier identifier and is designed to communicate with the microscope system and in the process to communicate the individual sample carrier identifier to the microscope system, such that a sample accommodated on the sample carrier is trackable.

Abstract: A particle beam device comprises a first particle beam column for providing a first particle beam and a second particle beam column for providing a second particle beam. Operating the particle beam device may include: supplying the second particle beam with second charged particles onto an object using the second particle beam column, loading a value of a control parameter into a control unit from a database or calculating the value of the control parameter in the control unit, setting an objective lens excitation of a first objective lens of the first particle beam column using the value of the control parameter, detecting second interaction particles using a particle detector. The second interaction particles may emerge from an interaction of the second particle beam with the object when the second particle beam is incident on the object.

Abstract: A particle beam system is configured to perform a method which includes: preventing at least one of generation of induced particles and incidence of the induced particles onto a detection area of a detector configured to output a detection signal; generating a residual signal by processing the detection signal outputted during the preventing using a control value; adjusting, based on the residual signal, the control value so that the residual signal takes a value within a predetermined limited residual-signal target range; directing a primary particle beam onto an object while allowing generation of the induced particles due to the primary particle beam and incidence of the induced particles onto the detection area; generating a result signal by processing the detection signal outputted during the directing using the control value.

Abstract: The invention relates to a method for operating a particle beam device and a particle beam device for carrying out the method. The particle beam device comprises a first particle beam column for providing a first particle beam and a second particle beam column for providing a second particle beam.

Abstract: An electron beam microscope includes an energy-sensitive detector to detect backscattered electrons and a signal processor for processing detection signals of the detector. The signal processor includes an analog amplifier. The signal processor also includes a window comparator having a signal input connected to an output of the analog amplifier. A signal generated at an output of the signal processor is generated based on a signal provided at an output the window comparator. The window comparator is configured to output a predetermined signal only if the amplified signal supplied to its signal input is less than or equal to an upper threshold and greater than or equal to a lower threshold.

Abstract: The disclosure relates to a sample carrier for accommodating a microscopic sample for examination or processing in a microscope system. The sample carrier is accommodatable in an accommodating device, such that the sample carrier in the accommodated state assumes a defined orientation relative to the accommodating device. The sample carrier has an individual sample carrier identifier and is designed to communicate with the microscope system and in the process to communicate the individual sample carrier identifier to the microscope system, such that a sample accommodated on the sample carrier is trackable.

Abstract: The system described herein relates to an imaging device for imaging an object in a particle beam apparatus and/or for imaging a structural unit of a particle beam apparatus, and to a particle beam apparatus having such an imaging device. The imaging device has an illumination unit having a first switching state and a second switching state for illuminating the object and/or the structural unit with illumination light, where, in the first switching state, the illumination light comprises only light of a first spectral range and where, in the second switching state, the illumination light comprises only light of a second spectral range. The imaging device has a control unit for switching the illumination unit into the first switching state or into the second switching state, and a camera unit for imaging the object and/or the structural unit.

Abstract: An electron beam microscope includes an energy-sensitive detector to detect backscattered electrons and a signal processor for processing detection signals of the detector. The signal processor includes an analog amplifier. The signal processor also includes a window comparator having a signal input connected to an output of the analog amplifier. A signal generated at an output of the signal processor is generated based on a signal provided at an output the window comparator. The window comparator is configured to output a predetermined signal only if the amplified signal supplied to its signal input is less than or equal to an upper threshold and greater than or equal to a lower threshold.

Abstract: The system described herein relates to an imaging device for imaging an object in a particle beam apparatus and/or for imaging a structural unit of a particle beam apparatus, and to a particle beam apparatus having such an imaging device. The imaging device has an illumination unit having a first switching state and a second switching state for illuminating the object and/or the structural unit with illumination light, where, in the first switching state, the illumination light comprises only light of a first spectral range and where, in the second switching state, the illumination light comprises only light of a second spectral range. The imaging device has a control unit for switching the illumination unit into the first switching state or into the second switching state, and a camera unit for imaging the object and/or the structural unit.

Abstract: The invention relates to a bearing component, comprising a base body (2) and an opening (3) which is formed in the base body (2) and on which an internal bearing face is formed, the internal bearing face having a diamond coating (4), and the diamond coating (4) having elongate depressions (42) extending substantially in the longitudinal direction (X-X) of the opening.

Abstract: Described herein is a method for analyzing an object using a particle beam apparatus, for example an electron beam apparatus and/or an ion beam apparatus, or using an x-ray beam device and a particle beam apparatus or an x-ray beam device, by means of which the method is carried out. In the method, information about the object is loaded from a data memory into a control device. Furthermore, a group of detection units from the multiplicity of detection units is identified using the information loaded into the control device. A first detector segment is formed from the group of detection units using the control device. Interaction particles and/or interaction radiation, which is/are detected, is/are generated by guiding a particle beam onto the object and scanning the object using the particle beam, where a detector segment signal is read from the detector segment.

Abstract: The invention relates to a bearing component, comprising a base body (2) and an opening (3) which is formed in the base body (2) and on which an internal bearing face is formed, the internal bearing face having a diamond coating (4), and the diamond coating (4) having elongate depressions (42) extending substantially in the longitudinal direction (X-X) of the opening.

Abstract: Described herein is a method for analyzing an object using a particle beam apparatus, for example an electron beam apparatus and/or an ion beam apparatus, or using an x-ray beam device and a particle beam apparatus or an x-ray beam device, by means of which the method is carried out. In the method, information about the object is loaded from a data memory into a control device. Furthermore, a group of detection units from the multiplicity of detection units is identified using the information loaded into the control device. A first detector segment is formed from the group of detection units using the control device. Interaction particles and/or interaction radiation, which is/are detected, is/are generated by guiding a particle beam onto the object and scanning the object using the particle beam, where a detector segment signal is read from the detector segment.

Abstract: Described herein is a method for analyzing an object using a particle beam apparatus, for example an electron beam apparatus and/or an ion beam apparatus, or using an x-ray beam device and a particle beam apparatus or an x-ray beam device, by means of which the method is carried out. In the method, information about the object is loaded from a data memory into a control device. Furthermore, a group of detection units from the multiplicity of detection units is identified using the information loaded into the control device. A first detector segment is formed from the group of detection units using the control device. Interaction particles and/or interaction radiation, which is/are detected, is/are generated by guiding a particle beam onto the object and scanning the object using the particle beam, where a detector segment signal is read from the detector segment.

Abstract: The invention relates to a rotating mechanical seal arrangement (1) for sealing a product side (5) at a rotating component, comprising a first rotating mechanical seal (2) with a first rotating slide ring (21) and a first stationary slide ring (22) which define a first sealing gap (23) between them, a second rotating mechanical seal (3) with a second rotating slide ring (31) and a second stationary slide ring (32) which define a second sealing gap (33) between them, a fluid space (4) which is limited by the first and second rotating mechanical seals (2, 3), wherein the first rotating mechanical seal (2) is lubricated with a product medium of the product side (5), and wherein the second rotating mechanical seal (3) is lubricated with a liquid quench medium of a quench supply unit (7), the quench medium being located in the fluid space (4), a quench outlet (8) via which quench medium may be discharged from the fluid space (4), a gas outlet (9) via which a gas located in the fluid space may be discharged, and a

Abstract: The invention relates to a rotating mechanical seal arrangement (1) for sealing a product side (5) at a rotating component, comprising a first rotating mechanical seal (2) with a first rotating slide ring (21) and a first stationary slide ring (22) which define a first sealing gap (23) between them, a second rotating mechanical seal (3) with a second rotating slide ring (31) and a second stationary slide ring (32) which define a second sealing gap (33) between them, a fluid space (4) which is limited by the first and second rotating mechanical seals (2, 3), wherein the first rotating mechanical seal (2) is lubricated with a product medium of the product side (5), and wherein the second rotating mechanical seal (3) is lubricated with a liquid quench medium of a quench supply unit (7), the quench medium being located in the fluid space (4), a quench outlet (8) via which quench medium may be discharged from the fluid space (4), a gas outlet (9) via which a gas located in the fluid space may be discharged, and a

Abstract: A method of operating a particle beam microscopy. A particle beam is scanned across a scanning region of a surface of the object. Particles are detected by a detector system for a plurality of impingement locations of the primary beam within the scanning region. A detector system generates detector signals which represent for each of the impingement locations an intensity of the detected particles. Material data of the interaction regions are calculated depending on the detector signals and depending on topography data, which represent a topography of the object surface in the scanning region.

Abstract: A method of operating a particle beam microscopy. A particle beam is scanned across a scanning region of a surface of the object. Particles are detected by a detector system for a plurality of impingement locations of the primary beam within the scanning region. A detector system generates detector signals which represent for each of the impingement locations an intensity of the detected particles. Material data of the interaction regions are calculated depending on the detector signals and depending on topography data, which represent a topography of the object surface in the scanning region.

Abstract: The invention refers to a mechanical seal, comprising at least one pair of interacting seal rings (3, 4), one of which is provided for a common rotation with a rotating component (2), and the other of which is retained at a stationary component (20) in a torque-proof manner against a rotation with the rotating component (2), and a monitoring device (6) for monitoring an operating state of the mechanical seal. The invention stands out in that the monitoring device (6) comprises a beam (7) including a sensor element for detecting a bending of the beam, in particular a strain gauge, wherein the beam (7) is arranged in a recess (14) in the stationary seal ring (4) and the beam (7) contacts a wall (14a) of the recess (14) in the stationary seal ring with a predetermined pretension, and further comprises an adjusting device in order to adjust a position of the beam (7) with respect to the recess (14).