Abstract: A system and method autonomously determines the impact of respective tool parameters on tool performance in a semiconductor manufacturing system. A parameter impact identification system receives tool parameter and tool performance data for one or more process runs of the semiconductor fabrication system and generates a separate function for each tool parameter characterizing the behavior of a tool performance indicator in terms of a single one of the tool parameters. Each function is then scored according to how well the function predicts the actual behavior of the tool performance indicator, or based on a determined sensitivity of the tool performance indicator to changes in the single tool parameter. The tool parameters are then ranked based on these scores, and a reduced set of critical tool parameters is derived based on the ranking. The tool performance indicator can then be modeled based on this reduced set of tool parameters.

Abstract: Systems and techniques to facilitate tool failure analysis associated with fabrication processes are presented. A monitoring component determines a candidate tool failure associated with one or more fabrication tools based on sensor data generated by a set of sensors associated with the one or more fabrication tools. A signature component generates a signature dataset for the candidate tool failure based on data associated with the one or more fabrication tools. A comparison component compares the candidate tool failure to at least one previously determined tool failure based on the signature dataset and at least one other signature dataset associated with the at least one previously determined tool failure.

Abstract: A system and method autonomously determines the impact of respective tool parameters on tool performance in a semiconductor manufacturing system. A parameter impact identification system receives tool parameter and tool performance data for one or more process runs of the semiconductor fabrication system and generates a separate function for each tool parameter characterizing the behavior of a tool performance indicator in terms of a single one of the tool parameters. Each function is then scored according to how well the function predicts the actual behavior of the tool performance indicator, or based on a determined sensitivity of the tool performance indicator to changes in the single tool parameter. The tool parameters are then ranked based on these scores, and a reduced set of critical tool parameters is derived based on the ranking. The tool performance indicator can then be modeled based on this reduced set of tool parameters.

Abstract: A system and method autonomously determines the impact of respective tool parameters on tool performance in a semiconductor manufacturing system. A parameter impact identification system receives tool parameter and performance data for one or more process runs of the semiconductor fabrication system and generates a separate function for each tool parameter characterizing the behavior of a tool performance indicator in terms of a single one of the tool parameters. Each function is then scored according to how well the function predicts the behavior of the tool performance indicator, or based on a determined sensitivity of the tool performance indicator to changes in the single tool parameter. The tool parameters are then ranked based on these scores, and a reduced set of critical tool parameters is derived based on the ranking. The tool performance indicator can then be modeled based on this reduced set of tool parameters.

Abstract: Systems and techniques to facilitate tool failure analysis associated with fabrication processes are presented. A monitoring component determines a candidate tool failure associated with one or more fabrication tools based on sensor data generated by a set of sensors associated with the one or more fabrication tools. A signature component generates a signature dataset for the candidate tool failure based on data associated with the one or more fabrication tools. A comparison component compares the candidate tool failure to at least one previously determined tool failure based on the signature dataset and at least one other signature dataset associated with the at least one previously determined tool failure.

Abstract: The subject disclosure relates to automatically learning relationships among a plurality of manufacturing tool parameters as applied to arbitrary semiconductor manufacturing tools and a graphical user interface that is supported, at least in part, by an autonomous learning system. The graphical user interface can create one or more matrixes based on received data and can further generate additional matrices by transforming the one or more matrixes. A series of windows can be output, wherein the series of windows, provide performance analysis that comprises a matching between a focus chamber and a reference chamber. In an aspect, the focus chamber and the reference chamber can be different chambers. In another aspect, the focus chamber and the reference chamber can be the same chamber, which provides analysis of the deterioration in performance of the same chamber over time.

Abstract: A system and method for autonomously determining the impact of respective tool parameters on tool performance in a semiconductor manufacturing system is provided. A parameter impact identification system receives tool parameter and tool performance data for one or more process runs of the semiconductor fabrication system and generates a separate function for each tool parameter characterizing the behavior of a tool performance indicator in terms of a single one of the tool parameters. Each function is then scored according to how well the function predicts the actual behavior of the tool performance indicator, or based on a determined sensitivity of the tool performance indicator to changes in the single tool parameter. The tool parameters are then ranked based on these scores, and a reduced set of critical tool parameters is derived based on the ranking. The tool performance indicator can then be modeled based on this reduced set of tool parameters.

Abstract: The subject disclosure relates to automatically learning relationships among a plurality of manufacturing tool parameters as applied to arbitrary semiconductor manufacturing tools and a graphical user interface that is supported, at least in part, by an autonomous learning system. The graphical user interface can create one or more matrixes based on received data and can further generate additional matrices by transforming the one or more matrixes. A series of windows can be output, wherein the series of windows, provide performance analysis that comprises a matching between a focus chamber and a reference chamber. In an aspect, the focus chamber and the reference chamber can be different chambers. In another aspect, the focus chamber and the reference chamber can be the same chamber, which provides analysis of the deterioration in performance of the same chamber over time.

Abstract: The subject disclosure relates to automatically learning relationships among a plurality of manufacturing tool parameters as applied to arbitrary semiconductor manufacturing tools and a graphical user interface that is supported, at least in part, by an autonomous learning system. The graphical user interface can create one or more matrixes based on received data and can further generate additional matrices by transforming the one or more matrixes. A series of windows can be output, wherein the series of windows, provide performance analysis that comprises a matching between a focus chamber and a reference chamber. In an aspect, the focus chamber and the reference chamber can be different chambers. In another aspect, the focus chamber and the reference chamber can be the same chamber, which provides analysis of the deterioration in performance of the same chamber over time.

Abstract: Described is a technique for providing shared access to an encrypted portable memory device which improves both usability and security by allowing the owner of the encrypted storage device to designate access to specified files only to the next host to mount the secure disk. The number of steps required to perform a file sharing operation is greatly reduced with this system and access to the contents of the protected storage device can be granted with greater granularity.

Abstract: A 3D graphical user interface includes a two-dimensional ground-plane layout representing the relationship between one or more leaf elements of a tree data structure The interface further includes at least one building-like structure, each of the at least one building-like structures corresponding to a respective one of the one or more leaf elements. Each of the at least one building-like structure provides a summary of media associated with the respective one of the more leaf elements corresponding to that at least one building-like structure.

Abstract: A 3D graphical user interface includes a two-dimensional ground-plane layout representing the relationship between one or more leaf elements of a tree data structure. The interface further includes at least one building-like structure, each of the at least one building-like structure corresponding to a respective one of the one or more leaf elements. Each of the at least one building-like structure provides a summary of media associated with the respective one of the more leaf elements corresponding to at least one building-like structure.

Abstract: A 3D graphical user interface includes a two-dimensional ground-plane layout representing the relationship between one or more leaf elements of a tree data structure The interface further includes at least one building-like structure, each of the at least one building-like structures corresponding to a respective one of the one or more leaf elements. Each of the at least one building-like structure provides a summary of media associated with the respective one of the more leaf elements corresponding to that at least one building-like structure.

Abstract: Embodiments of the present invention introduce a novel recursive assembly process to automatically create a library of components. It starts with simple components used as building blocks and proceeds by repeatedly combining these randomly into more complex ones. The utility and quality of these random combinations of components are measured against a set of functional goals. Useful combinations then become new components in the library that can be used as building blocks for further random combination. This description is not intended to be a complete description of, or limit the scope of, the invention. Other features, aspects, and objects of the invention can be obtained from a review of the specification, the figures, and the claims.

Abstract: A 3D graphical user interface includes a two-dimensional ground-plane layout representing the relationship between one or more leaf elements of a tree data structure. The interface further includes at least one building-like structure, each of the at least one building-like structure corresponding to a respective one of the one or more leaf elements. Each of the at least one building-like structure provides a summary of media associated with the respective one of the more leaf elements corresponding to at least one building-like structure.

Abstract: A provably correct computer program can be generated using genetic programming techniques. A desired behavior is used to define a formal specification. An initial population of programs is created where each program has a meaning that can be defined using a formalization technique. A fitness function is applied to measure a distance between the meaning of a program, i.e., its actual behavior, and the specification. Any program having a zero value as the measure of distance between the meaning of the program and the specification is determined to be provably correct. After the fitness of some or all of the programs in the current generation of programs has been computed, a provably correct program has not yet been found in the current generation, mutation and/or crossover techniques are performed on at least some of the fittest individuals in the current generation to create the programs of a next generation.