Abstract: A plasma chamber for a UV light source includes a plasma generation region that defines a plasma confinement region. A port is positioned adjacent to a side of the plasma generation region that allows generated light to pass out of the chamber. A high voltage region is coupled to the plasma generation region. A grounded region is coupled to the high voltage region that defines an outer surface configured to be coupled to the ground and is dimensioned for receiving a surrounding inductive core. A width of the high voltage region is greater than the width of the grounded region.

Abstract: Articles and methods relating to coatings having superior plasma etch-resistance and which can prolong the life of RIE components are provided. An article has a vacuum compatible substrate and a protective film overlying at least a portion of the substrate. The film comprises a fluorinated metal oxide containing yttrium wherein the yttrium oxide is deposited using an AC power source. The film has a fluorine atomic % of at least 10 at a depth of 30% of the total thickness of the film and the film has no subsurface cracks below the surface of the film visible when using a laser confocal microscope to view the full depth of the film at a magnification of 1000×.

Abstract: An electrostatic chuck includes a ceramic structural element, at least one electrode disposed on the ceramic structural element, and a surface dielectric layer disposed over the at least one electrode, the surface layer activated by a voltage in the electrode to form an electric charge to electrostatically clamp a substrate to the electrostatic chuck. The surface dielectric layer comprises: (i) an insulator layer of amorphous alumina, of a thickness of less than about 5 microns, disposed over the at least one electrode; and (ii) a stack of dielectric layers disposed over the insulator layer. The stack of dielectric layers includes: (a) at least one dielectric layer including aluminum oxynitride; and (b) at least one dielectric layer including at least one of silicon oxide and silicon oxynitride.

Abstract: An electrostatic chuck includes a ceramic structural element, at least one electrode disposed on the ceramic structural element, and a surface dielectric layer disposed over the at least one electrode, the surface layer activated by a voltage in the electrode to form an electric charge to electrostatically clamp a substrate to the electrostatic chuck. The surface dielectric layer comprises: (i) an insulator layer of amorphous alumina, of a thickness of less than about 5 microns, disposed over the at least one electrode; and (ii) a stack of dielectric layers disposed over the insulator layer. The stack of dielectric layers includes: (a) at least one dielectric layer including aluminum oxynitride; and (b) at least one dielectric layer including at least one of silicon oxide and silicon oxynitride.

Abstract: A capacitor is described. the capacitor includes a casing; a cathode of an active material of at least an oxide of a first metal provided on a substrate, wherein the active material is characterized as being of a substantially homogeneous coating formed by sputtering a target of the first metal in a vacuum chamber; an anode spaced from the cathode coating; and an electrolyte in contact with the cathode coating and the anode. The casing contains the anode, the cathode and the electrolyte. A method and apparatus for providing the sputtered coating is also disclosed.

Abstract: An anode for an electrolytic capacitor is described. The anode is of a valve metal in powdered form, for example tantalum powder, that has been pressed into a pellet and sintered under a vacuum at high temperatures. Preferably, a poly(alkylene)carbonate binder is used to promote cohesion with the pressed powder body. The binder adds green strength to the pressed body and helps with powder flow before pressing. The poly(alkylene)carbonate binders are superior in that they leave virtually no residual carbon behind when burnt out during the sintering process. The pressed valve metal powder structure is then anodized to a desired voltage in a formation electrolyte to form a continuous dielectric oxide film on the sintered body as well as a terminal lead/anode lead weld extending therefrom.

Abstract: An anode for an electrolytic capacitor is described. The anode is of a valve metal in powdered form, for example tantalum powder, that has been pressed into a pellet and sintered under a vacuum at high temperatures. Preferably, a poly(alkylene) carbonate binder is used to promote cohesion with the pressed powder body. The binder adds green strength to the pressed body and helps with powder flow before pressing. The poly(alkylene) carbonate binders are superior in that they leave virtually no residual carbon behind when burnt out during the sintering process. The pressed valve metal powder structure is then anodized to a desired voltage in a formation electrolyte to form a continuous dielectric oxide film on the sintered body as well as a terminal lead/anode lead weld extending therefrom.

Abstract: Deposition of a metal-containing reagent solution or suspension onto a conductive substrate by various pad-printing techniques is described. The result in a pseudocapacitive oxide coating, nitride coating, carbon nitride coating, or carbide coating having an acceptable surface area for incorporation into an electrolytic capacitor, such as one have a tantalum anode.

Abstract: Deposition of a metal-containing reagent solution or suspension onto a conductive substrate by various pad-printing techniques is described. This results in a pseudocapacitive oxide coating, nitride coating, carbon nitride coating, or carbide coating having an acceptable surface area for incorporation into an electrolytic capacitor, such as one having a tantalum anode.

Abstract: Deposition of a metal-containing reagent solution or suspension onto a conductive substrate by various pad-printing techniques is described. The result in a pseudocapacitive oxide coating, nitride coating, carbon nitride coating, or carbide coating having an acceptable surface area for incorporation into an electrolytic capacitor, such as one have a tantalum anode.

Abstract: A capacitor comprised of a casing; a cathode comprising an active material of at least an oxide of a first metal provided on a substrate, wherein the active material is characterized as comprising a substantially homogeneous coating formed by sputtering a target comprised of the first metal in a vacuum chamber; an anode spaced from the cathode coating; and an electrolyte in contact with the cathode coating and the anode, the casing containing the anode, the cathode and the electrolyte. A method and apparatus for providing the sputtered coating is also disclosed.

Abstract: Deposition of a metal-containing reagent solution or suspension or a carbon nanotube-containing suspension onto a conductive substrate by various pad-printing techniques is described. In the case of a metal-containing solution or suspension, a pseudocapacitive oxide coating, nitride coating, carbon nitride coating, carbide coating, or carbon nanotube coating results. In any event, the active coating has acceptable surface area for incorporation into an electrolytic capacitor, such as one having a tantalum anode.

Abstract: Methods for testing the hermeticity of casings for power sources intended to power implantable medical device by sensing the presence of vapors escaping from an electrolyte contained therein are described. More broadly, the present leak detection methods are applicable to any sealed enclosure having a first part sealed to a second part with a liquid contained therein. The liquid need not occupy the entire volume of the enclosure, but must contain at least one component having a vapor pressure at 25° C. of more than about 0.1 mm Hg. This component can assist in the functioning of the device such as an electrolyte, or be added for the sole purpose of leak detection.

Abstract: Deposition of a metal-containing reagent solution or suspension onto a conductive substrate by various pad-printing techniques is described. This results in a pseudocapacitive oxide coating, nitride coating, carbon nitride coating, or carbide coating having an acceptable surface area for incorporation into an electrolytic capacitor, such a s one have a tantalum anode.