Patents by Inventor Wolfram Porsche

Wolfram Porsche has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Defect detection in pellicized reticles via exposure at short wavelengths
    Patent number: 6665065
    Abstract: A system and method are provided for detecting latent defects in a mask or reticle, which defects may vary as a function of radiation at exposure wavelengths. By way of example, the mask or reticle is inspected, exposed to radiation at a specified wavelength, and then reinspected. A correlation between the inspection results before and after exposure provides an indication of exposure-related defects, which may include defect growth and/or formation of defects caused by the exposure. By way of further illustration, the combination of inspection and exposure of a mask or reticle may be implemented with respect to a pellicized mask or reticle so as to detect additional defects related to use of the pellicle with the mask or reticle.
    Type: Grant
    Filed: April 9, 2001
    Date of Patent: December 16, 2003
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Khoi A. Phan, Bhanwar Singh, Wolfram Porsche