Abstract: A laser beam mixing apparatus to convert a laser beam bundle into a single laser beam having a uniform energy density. The laser beam mixing apparatus includes: a barrel to adjust a distance between a multi-core optical cable and an optical lens included therein, to convert a laser beam bundle into a single beam; and a stage to adjust the position and angle a single-core optical cable with respect to the optical lens, to align the core of the single-core optical cable with the center of the single beam.

Abstract: A substrate firing device having an increased contact area between the substrate and substrate support portions, thereby preventing the substrate support portions from generating scratches on the substrate when the substrate expands and contracts due to heating and cooling. By increasing the contact area to the substrate and by using quartz on items that contact the substrate, it is possible to prevent scratches occurring on a substrate, even after an etching process of the substrate, thereby improving quality of the slimmer final product.

Abstract: A substrate bonding apparatus includes a vacuum chamber having a bonding space where a first substrate and a second substrates are bonded together, a first pump for sucking air of the bonding space at a first intensity, a second pump for sucking the air of the bonding space at a second intensity greater than the first intensity, a nitrogen supply for supplying nitrogen to the bonding space, a sensor for sensing the pressure of the bonding space; and a controller for controlling the first pump, the second pump, and the nitrogen supply.

Abstract: The present invention discloses an electrostatic chuck sucking and supporting a substrate with an electrostatic force and an OLED manufacturing apparatus having the same. The electrostatic chuck includes an insulating plate having at least one opening penetrating a center thereof, a pair of electrodes mounted on the insulating plate, a first controller applying a voltage to the pair of electrodes, and an electrostatic charge removing unit disposed near the insulating plate and emitting ions into the at least one opening to remove electrostatic charges distributed around a side of the insulating plate.

Abstract: A laser irradiation system includes a laser configured to irradiate light, a laser transfer unit configured to transfer the laser along a target irradiation area, the target irradiation area being divided into a plurality of sections, a laser transfer controller configured to control a speed of the laser in each of the plurality of sections of the target irradiation area, a laser output controller configured to control an output level of the laser in each of the plurality of sections of the target irradiation area, and a main controller configured to control the laser output controller and the laser transfer controller.

Abstract: A laser system including an optical cable jumper with input and output terminals, and a laser gun, wherein the optical jumper transmits a laser beam from a bundle-type optical cable connected to an input terminal thereof to a single-type optical cable connected to an output terminal thereof. The laser gun is connected to the single-type optical cable at a rear of the optical cable jumper to illuminate the laser beam to a target object.

Abstract: A laser system including an optical cable jumper with input and output terminals, and a laser gun, wherein the optical jumper transmits a laser beam from a bundle-type optical cable connected to an input terminal thereof to a single-type optical cable connected to an output terminal thereof. The laser gun is connected to the single-type optical cable at a rear of the optical cable jumper to illuminate the laser beam to a target object.

Abstract: A structure for forming a touch screen panel directly on an upper substrate of a flat panel display device, and more particularly a touch screen panel integrated flat panel display device in which an insulating layer formed on the touch screen panel is implemented by a spin on glass (SOG layer having stable thermal property suitable for high temperature plastic process of a sealing material for encapsulating the upper substrate and a lower substrate of the flat panel display device, and a method of fabricating the same.

Abstract: A substrate bonding apparatus includes a vacuum chamber having a bonding space where a first substrate and a second substrates are bonded together, a first pump for sucking air of the bonding space at a first intensity, a second pump for sucking the air of the bonding space at a second intensity greater than the first intensity, a nitrogen supply for supplying nitrogen to the bonding space, a sensor for sensing the pressure of the bonding space; and a controller for controlling the first pump, the second pump, and the nitrogen supply.

Abstract: A laser irradiation system includes a laser configured to irradiate light, a laser transfer unit configured to transfer the laser along a target irradiation area, the target irradiation area being divided into a plurality of sections, a laser transfer controller configured to control a speed of the laser in each of the plurality of sections of the target irradiation area, a laser output controller configured to control an output level of the laser in each of the plurality of sections of the target irradiation area, and a main controller configured to control the laser output controller and the laser transfer controller.

Abstract: A laser irradiation system includes a laser beam generator to generate laser beams, a laser beam irradiator to radiate the laser beams onto a target, a laser beam guide to detect whether one of the laser beams is reflected back toward the laser beam irradiator, a detector to convert the reflected laser beam into electrical signal data, and a controller to control the output of the laser beam generator, based on the signal data.

Abstract: A laser irradiation apparatus includes a plurality of laser heads from which a laser is irradiated, can adjust arranged intervals of the laser heads, and moves freely to irradiate the laser along a shape of a subject. A laser oscillator oscillates a laser. A plurality of laser heads linearly irradiate the laser oscillated by the laser oscillator. A first driving means adjusts arranged intervals of the laser heads, and moves the laser heads in an X direction. A second driving means moves the laser heads in a Y direction different from the X direction.

Abstract: The present invention discloses an electrostatic chuck sucking and supporting a substrate with an electrostatic force and an OLED manufacturing apparatus having the same. The electrostatic chuck includes an insulating plate having at least one opening penetrating a center thereof, a pair of electrodes mounted on the insulating plate, a first controller applying a voltage to the pair of electrodes, and an electrostatic charge removing unit disposed near the insulating plate and emitting ions into the at least one opening to remove electrostatic charges distributed around a side of the insulating plate.

Abstract: A laser system including an optical cable jumper with input and output terminals, and a laser gun, wherein the optical jumper transmits a laser beam from a bundle-type optical cable connected to an input terminal thereof to a single-type optical cable connected to an output terminal thereof. The laser gun is connected to the single-type optical cable at a rear of the optical cable jumper to illuminate the laser beam to a target object.

Abstract: A laser beam mixing apparatus to convert a laser beam bundle into a single laser beam having a uniform energy density. The laser beam mixing apparatus includes: a barrel to adjust a distance between a multi-core optical cable and an optical lens included therein, to convert a laser beam bundle into a single beam; and a stage to adjust the position and angle a single-core optical cable with respect to the optical lens, to align the core of the single-core optical cable with the center of the single beam.

Abstract: A substrate firing device having an increased contact area between the substrate and substrate support portions, thereby preventing the substrate support portions from generating scratches on the substrate when the substrate expands and contracts due to heating and cooling. By increasing the contact area to the substrate and by using quartz on items that contact the substrate, it is possible to prevent scratches occurring on a substrate, even after an etching process of the substrate, thereby improving quality of the slimmer final product.

Abstract: A laser irradiation apparatus includes a plurality of laser heads from which a laser is irradiated, can adjust arranged intervals of the laser heads, and moves freely to irradiate the laser along a shape of a subject. A laser oscillator oscillates a laser. A plurality of laser heads linearly irradiate the laser oscillated by the laser oscillator. A first driving means adjusts arranged intervals of the laser heads, and moves the laser heads in an X direction. A second driving means moves the laser heads in a Y direction different from the X direction.

Abstract: A method and an apparatus for fabricating an organic light emitting display, in which a large-sized transmissible film is fabricated to be easily used in an affixing process for a large-sized substrate. The apparatus includes: a first chamber including a plurality of first through holes and having a first transmissible film sealing the plurality of first through holes, the first chamber adapted to affix a first substrate having an Organic Light Emitting Diode (OLED) to a second substrate having a desiccant agent; and a second chamber having a second through hole in a predetermined region and having a second transmissible film sealing the second through hole, the second chamber adapted to harden a sealant interposed between the first and second substrates to seal the first substrate to the second substrates.

Abstract: A method of forming a ferroelectric thin film for suppressing the formation of a-domain and providing a sufficient layer coverage may be provided. The method includes immersing a substrate having the miscut surface into a reaction solution including a precursor compound for perovskite-type ferroelectric and water, and implementing a hydrothermal reaction in the reaction solution at a temperature lower than the phase transition temperature of the perovskite-type ferroelectric, thereby forming a perovskite-type ferroelectric thin film on the miscut surface of the substrate.