Patents by Inventor Wouter Johan Hendrik VAN GENNIP

Wouter Johan Hendrik VAN GENNIP has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Voltage waveform generator for plasma processing apparatuses
    Patent number: 11968771
    Abstract: A plasma processing apparatus may include a mechanism for generating a plasma, a processing platform for supporting a substrate to be processed, and a voltage waveform generator having an output electrically coupled to the processing platform. The voltage waveform generator includes a plurality of first buck converters arranged in parallel and coupled to the output. The first buck converters include actively switchable semiconductor switches. A control unit is configured to operate the actively switchable semiconductor switches through pulse width modulation signals, and the control unit is configured to operate the plurality of first buck converters in an interleaved manner.
    Type: Grant
    Filed: November 6, 2019
    Date of Patent: April 23, 2024
    Assignee: Prodrive Technologies Innovation Services B.V.
    Inventors: Antonius Wilhelmus Hendricus Johannes Driessen, Wouter Johan Hendrik Van Gennip
  • VOLTAGE WAVEFORM GENERATOR FOR PLASMA PROCESSING APPARATUSES
    Publication number: 20220013330
    Abstract: A plasma processing apparatus may include a mechanism for generating a plasma, a processing platform for supporting a substrate to be processed, and a voltage waveform generator having an output electrically coupled to the processing platform. The voltage waveform generator includes a plurality of first buck converters arranged in parallel and coupled to the output. The first buck converters include actively switchable semiconductor switches. A control unit is configured to operate the actively switchable semiconductor switches through pulse width modulation signals, and the control unit is configured to operate the plurality of first buck converters in an interleaved manner.
    Type: Application
    Filed: November 6, 2019
    Publication date: January 13, 2022
    Inventors: Antonius Wilhelmus Hendricus Johannes DRIESSEN, Wouter Johan Hendrik VAN GENNIP