Patents by Inventor Xianping MENG

Xianping MENG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for collecting powder generated during film deposition process
    Patent number: 8999028
    Abstract: An apparatus for controlling a flow of gas comprises a spiral path guiding member. The spiral path guiding member comprises at least two groups of guiding plates. Each guiding plate of each group is disposed in an axial direction to form a longitudinal axis. Each group is spaced apart in the longitudinal direction. A surface of each guiding plate is substantially parallel to the longitudinal axis. At least one guiding plate of each group has a guiding plate opening. Guiding plate openings of the guiding plates may facilitate gas to flow in a spiral flow path.
    Type: Grant
    Filed: June 21, 2013
    Date of Patent: April 7, 2015
    Assignee: Macronix International Co., Ltd.
    Inventors: Xianping Meng, Bingfu Chen, Licheng Hu
  • APPARATUS AND METHOD FOR COLLECTING POWDER GENERATED DURING FILM DEPOSITION PROCESS
    Publication number: 20140261702
    Abstract: An apparatus for controlling a flow of gas comprises a spiral path guiding member. The spiral path guiding member comprises at least two groups of guiding plates. Each guiding plate of each group is disposed in an axial direction to form a longitudinal axis. Each group is spaced apart in the longitudinal direction. A surface of each guiding plate is substantially parallel to the longitudinal axis. At least one guiding plate of each group has a guiding plate opening. Guiding plate openings of the guiding plates may facilitate gas to flow in a spiral flow path.
    Type: Application
    Filed: June 21, 2013
    Publication date: September 18, 2014
    Inventors: Xianping MENG, Bingfu Chen, Licheng Hu