Patents by Inventor Xiaoxu Lu
Xiaoxu Lu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10565573Abstract: In one embodiment, the location or zip code of purchasers in a card present electronic transaction may be reviewed and compared to the reported location or zip code of a merchant. If the difference or variance from the customer zip code or location to the customer location or zip code is over a threshold, the merchant is indicating as requiring additional attention.Type: GrantFiled: May 10, 2016Date of Patent: February 18, 2020Assignee: VISA INTERNATIONAL SERVICE ASSOCIATIONInventors: Alexei Fomitchev, Aleksander Epelman, Nelli Kayton, Suresh Pulikara, Mahesh Joshi, John Wu, Xiaoxu Lu
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Patent number: 10429719Abstract: An inspection system/method in which first optics direct continuous wave (CW) light at 181-185 nm to an inspected article, and second optics redirect image information affected by the article to detectors. A laser assembly generates the CW light by generating fourth harmonic light from first fundamental CW light having a first wavelength between 1 and 1.1 ?m, generating fifth harmonic light by mixing the fourth harmonic light with the first fundamental CW light, and mixing the fifth harmonic light with second light having a second wavelength between 1.26 and 1.82 ?m. An external cavity mixes the first light and the fourth harmonic light using a first nonlinear crystal. The CW light is generated using a second cavity that passes circulated second fundamental or signal CW light through a second nonlinear crystal, and directing the fifth harmonic light through the second nonlinear crystal.Type: GrantFiled: November 29, 2018Date of Patent: October 1, 2019Assignee: KLA-Tencor CorporationInventors: Yung-Ho Alex Chuang, Xiaoxu Lu, Baigang Zhang, John Fielden, Vladimir Dribinski
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Publication number: 20190107766Abstract: A laser assembly generates continuous wave (CW) laser output light in the range of approximately 181 nm to approximately 185 nm by generating fourth harmonic light from first fundamental CW light having a first fundamental wavelength between 1 ?m and 1.1 ?m, generating fifth harmonic light by mixing the fourth harmonic light with the first fundamental CW light, and then mixing the fifth harmonic light with second fundamental or signal CW light having a second wavelength between 1.26 ?m and 1.82 ?m. The fifth harmonic light is generated using an external cavity that circulates first fundamental CW light through a first nonlinear crystal, and by directing the fourth harmonic light through the first nonlinear crystal. The laser output light is generated using a second cavity that passes circulated second fundamental or signal CW light through a second nonlinear crystal, and directing the fifth harmonic light through the second nonlinear crystal.Type: ApplicationFiled: November 29, 2018Publication date: April 11, 2019Inventors: Yung-Ho Alex Chuang, Xiaoxu Lu, Baigang Zhang, John Fielden, Vladimir Dribinski
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Patent number: 10175555Abstract: A laser assembly generates continuous wave (CW) laser output light in the range of approximately 181 nm to approximately 185 nm by generating fourth harmonic light from first fundamental CW light having a first fundamental wavelength between 1 ?m and 1.1 ?m, generating fifth harmonic light by mixing the fourth harmonic light with the first fundamental CW light, and then mixing the fifth harmonic light with second fundamental or signal CW light having a second wavelength between 1.26 ?m and 1.82 ?m. The fifth harmonic light is generated using an external cavity that circulates first fundamental CW light through a first nonlinear crystal, and by directing the fourth harmonic light through the first nonlinear crystal. The laser output light is generated using a second cavity that passes circulated second fundamental or signal CW light through a second nonlinear crystal, and directing the fifth harmonic light through the second nonlinear crystal.Type: GrantFiled: November 8, 2017Date of Patent: January 8, 2019Assignee: KLA—Tencor CorporationInventors: Yung-Ho Alex Chuang, Xiaoxu Lu, Baigang Zhang, John Fielden, Vladimir Dribinski
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Patent number: 10044164Abstract: A repetition rate (pulse) multiplier includes one or more beam splitters and prisms forming one or more ring cavities with different optical path lengths that delay parts of the energy of each pulse. A series of input laser pulses circulate in the ring cavities and part of the energy of each pulse leaves the system after traversing the shorter cavity path, while another part of the energy leaves the system after traversing the longer cavity path, and/or a combination of both cavity paths. By proper choice of the ring cavity optical path length, the repetition rate of an output series of laser pulses can be made to be a multiple of the input repetition rate. The relative energies of the output pulses can be controlled by choosing the transmission and reflection coefficients of the beam splitters. Some embodiments generate a time-averaged output beam profile that is substantially flat in one dimension.Type: GrantFiled: August 17, 2016Date of Patent: August 7, 2018Assignee: KLA-Tencor CorporationInventors: Yung-Ho Alex Chuang, Xiaoxu Lu, Justin Dianhuan Liou, J. Joseph Armstrong, Yujun Deng, John Fielden
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Patent number: 10044166Abstract: A deep ultra-violet (DUV) continuous wave (CW) laser includes a fundamental CW laser configured to generate a fundamental frequency with a corresponding wavelength between about 1 ?m and 1.1 ?m, a third harmonic generator module including one or more non-linear optical (NLO) crystals that generate a third harmonic and an optional second harmonic, and a fifth harmonic generator. The fifth harmonic generator module includes a cavity resonant at the fundamental frequency, and combines the fundamental frequency with the third harmonic in a first NLO crystal to generate a fourth harmonic, then combines the fourth harmonic with unconsumed fundamental frequency in a second NLO crystal to generate the fifth harmonic. One or more lenses are used to focus the third and fourth harmonics in the first and second NLO crystals, respectively.Type: GrantFiled: October 26, 2016Date of Patent: August 7, 2018Assignee: KLA-Tencor CorporationInventors: Yung-Ho Chuang, Xiaoxu Lu, John Fielden
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Patent number: 10032619Abstract: A high brightness laser-sustained broadband light source includes a gas containment structure and a pump laser configured to generate a pump beam including illumination of a wavelength at least proximate to a weak absorption line of a neutral gas contained in the gas containment structure. The broadband light source includes one or more anamorphic illumination optics configured to focus the pump beam into an approximately elliptical beam waist positioned in or proximate to the center of the gas containment structure. The broadband light source includes one or more first collection optics configured to collect broadband radiation emitted by the plasma in a direction substantially aligned with a longer axis of the elliptical beam waist.Type: GrantFiled: December 14, 2017Date of Patent: July 24, 2018Assignee: KLA-Tencor CorporationInventors: Yung-Ho Alex Chuang, Xiaoxu Lu, Justin Liou, John Fielden
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Publication number: 20180188633Abstract: A laser assembly generates continuous (CW) laser output light in the range of approximately 181 nm to approximately 185 nm by generating fourth harmonic light from first fundamental CW light having a first fundamental wavelength between 1 ?m and 1.1 ?m, generating fifth harmonic light by mixing the fourth harmonic light with the first fundamental CW light, and then mixing the fifth harmonic light with second fundamental or signal CW light having a second wavelength between 1.26 ?m and 1.82 ?m. The fifth harmonic light is generated using an external cavity that circulates first fundamental CW light through a first nonlinear crystal, and by directing the fourth harmonic light through the first nonlinear crystal. The laser output light is generated using a second cavity that passes circulated second fundamental or signal CW light through a second nonlinear crystal, and directing the fifth harmonic light through the second nonlinear crystal.Type: ApplicationFiled: November 8, 2017Publication date: July 5, 2018Inventors: Yung-Ho Alex Chuang, Xiaoxu Lu, Baigang Zhang, John Fielden, Vladimir Dribinski
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Publication number: 20180114687Abstract: A high brightness laser-sustained broadband light source includes a gas containment structure and a pump laser configured to generate a pump beam including illumination of a wavelength at least proximate to a weak absorption line of a neutral gas contained in the gas containment structure. The broadband light source includes one or more anamorphic illumination optics configured to focus the pump beam into an approximately elliptical beam waist positioned in or proximate to the center of the gas containment structure. The broadband light source includes one or more first collection optics configured to collect broadband radiation emitted by the plasma in a direction substantially aligned with a longer axis of the elliptical beam waist.Type: ApplicationFiled: December 14, 2017Publication date: April 26, 2018Inventors: Yung-Ho Alex Chuang, Xiaoxu Lu, Justin Liou, John Fielden
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Patent number: 9865447Abstract: The broadband light source includes a gas containment structure and a pump laser for generating a pump beam including illumination of a wavelength near that of a weak absorption line of a neutral gas contained in the gas containment structure. The broadband light source also includes anamorphic optics for focusing the pump beam into an elliptical beam waist positioned in or near the center of the gas containment structure. The broadband light source also includes collection optics for collecting broadband radiation emitted by the plasma in a direction aligned with a longer axis of the elliptical beam waist.Type: GrantFiled: October 4, 2016Date of Patent: January 9, 2018Assignee: KLA-Tencor CorporationInventors: Yung-Ho Alex Chuang, Xiaoxu Lu, Justin Liou, John Fielden
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Publication number: 20170330163Abstract: In one embodiment, the location or zip code of purchasers in a card present electronic transaction may be reviewed and compared to the reported location or zip code of a merchant. If the difference or variance from the customer zip code or location to the customer location or zip code is over a threshold, the merchant is indicating as requiring additional attention.Type: ApplicationFiled: May 10, 2016Publication date: November 16, 2017Inventors: Alexei FOMITCHEV, Aleksander EPELMAN, Nelli KAYTON, Suresh PULIKARA, Mahesh JOSHI, John WU, Xiaoxu LU
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Publication number: 20170278694Abstract: A high brightness laser-sustained broadband light source includes a gas containment structure and a pump laser configured to generate a pump beam including illumination of a wavelength at least proximate to a weak absorption line of a neutral gas contained in the gas containment structure. The broadband light source includes one or more anamorphic illumination optics configured to focus the pump beam into an approximately elliptical beam waist positioned in or proximate to the center of the gas containment structure. The broadband light source includes one or more first collection optics configured to collect broadband radiation emitted by the plasma in a direction substantially aligned with a longer axis of the elliptical beam waist.Type: ApplicationFiled: October 4, 2016Publication date: September 28, 2017Inventors: Yung-Ho Alex Chuang, Xiaoxu Lu, Justin Liou, John Fielden
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Publication number: 20170070025Abstract: A deep ultra-violet (DUV) continuous wave (CW) laser includes a fundamental CW laser configured to generate a fundamental frequency with a corresponding wavelength between about 1 ?m and 1.1 ?m, a third harmonic generator module including one or more non-linear optical (NLO) crystals that generate a third harmonic and an optional second harmonic, and a fifth harmonic generator. The fifth harmonic generator module includes a cavity resonant at the fundamental frequency, and combines the fundamental frequency with the third harmonic in a first NLO crystal to generate a fourth harmonic, then combines the fourth harmonic with unconsumed fundamental frequency in a second NLO crystal to generate the fifth harmonic. One or more lenses are used to focus the third and fourth harmonics in the first and second NLO crystals, respectively.Type: ApplicationFiled: October 26, 2016Publication date: March 9, 2017Inventors: Yung-Ho Chuang, Xiaoxu Lu, John Fielden
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Patent number: 9525265Abstract: A repetition rate (pulse) multiplier includes one or more beam splitters and prisms forming one or more ring cavities with different optical path lengths that delay parts of the energy of each pulse. A series of input laser pulses circulate in the ring cavities and part of the energy of each pulse leaves the system after traversing the shorter cavity path, while another part of the energy leaves the system after traversing the longer cavity path, and/or a combination of both cavity paths. By proper choice of the ring cavity optical path length, the repetition rate of an output series of laser pulses can be made to be a multiple of the input repetition rate. The relative energies of the output pulses can be controlled by choosing the transmission and reflection coefficients of the beam splitters. Some embodiments generate a time-averaged output beam profile that is substantially flat in one dimension.Type: GrantFiled: January 14, 2015Date of Patent: December 20, 2016Assignee: KLA-Tencor CorporationInventors: Yung-Ho Alex Chuang, Xiaoxu Lu, Justin Dianhuan Liou, J. Joseph Armstrong, Yujun Deng, John Fielden
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Publication number: 20160359292Abstract: A repetition rate (pulse) multiplier includes one or more beam splitters and prisms forming one or more ring cavities with different optical path lengths that delay parts of the energy of each pulse. A series of input laser pulses circulate in the ring cavities and part of the energy of each pulse leaves the system after traversing the shorter cavity path, while another part of the energy leaves the system after traversing the longer cavity path, and/or a combination of both cavity paths. By proper choice of the ring cavity optical path length, the repetition rate of an output series of laser pulses can be made to be a multiple of the input repetition rate. The relative energies of the output pulses can be controlled by choosing the transmission and reflection coefficients of the beam splitters. Some embodiments generate a time-averaged output beam profile that is substantially flat in one dimension.Type: ApplicationFiled: August 17, 2016Publication date: December 8, 2016Inventors: Yung-Ho Alex Chuang, Xiaoxu Lu, Justin Dianhuan Liou, J. Joseph Armstrong, Yujun Deng, John Fielden
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Patent number: 9509112Abstract: A deep ultra-violet (DUV) continuous wave (CW) laser includes a fundamental CW laser configured to generate a fundamental frequency with a corresponding wavelength between about 1 ?m and 1.1 ?m, a third harmonic generator module including one or more periodically poled non-linear optical (NLO) crystals that generate a third harmonic and an optional second harmonic, and one of a fourth harmonic generator module and a fifth harmonic generator. The fourth harmonic generator module includes a cavity resonant at the fundamental frequency configured to combine the fundamental frequency with the third harmonic to generate a fourth harmonic. The fourth harmonic generator module includes either a cavity resonant at the fundamental frequency for combining the fundamental frequency with the third harmonic to generate a fifth harmonic, or a cavity resonant at the second harmonic frequency for combining the second harmonic and the third harmonic to generate the fifth harmonic.Type: GrantFiled: June 2, 2014Date of Patent: November 29, 2016Assignee: KLA-Tencor CorporationInventors: Yung-Ho Chuang, Xiaoxu Lu, John Fielden
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Patent number: 9494531Abstract: Methods and systems for minimizing interference among multiple illumination beams generated from a non-uniform illumination source to provide an effectively uniform illumination profile over the field of view of an inspection system are presented. In some examples, a pulsed beam of light is split into multiple illumination beams such that each of the beams are temporally separated at the surface of the specimen under inspection. In some examples, multiple illumination beams generated from a non-uniform illumination source are projected onto spatially separated areas on the surface of the specimen. A point object of interest illuminated by each area is imaged onto the surface of a time-delay integration (TDI) detector. The images are integrated such that the relative position of the illumination areas along the direction of motion of the point object of interest has no impact on the illumination efficiency distribution over the field of view.Type: GrantFiled: August 8, 2014Date of Patent: November 15, 2016Assignee: KLA-Tencor CorporationInventors: Yung-Ho Alex Chuang, Xiaoxu Lu, John Fielden, Ivan Maleev
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Publication number: 20150372446Abstract: A repetition rate (pulse) multiplier includes one or more beam splitters and prisms forming one or more ring cavities with different optical path lengths that delay parts of the energy of each pulse. A series of input laser pulses circulate in the ring cavities and part of the energy of each pulse leaves the system after traversing the shorter cavity path, while another part of the energy leaves the system after traversing the longer cavity path, and/or a combination of both cavity paths. By proper choice of the ring cavity optical path length, the repetition rate of an output series of laser pulses can be made to be a multiple of the input repetition rate. The relative energies of the output pulses can be controlled by choosing the transmission and reflection coefficients of the beam splitters. Some embodiments generate a time-averaged output beam profile that is substantially flat in one dimension.Type: ApplicationFiled: January 14, 2015Publication date: December 24, 2015Inventors: Yung-Ho Alex Chuang, Xiaoxu Lu, Justin Dianhuan Liou, J. Joseph Armstrong, Yujun Deng, John Fielden
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Publication number: 20150041666Abstract: Methods and systems for minimizing interference among multiple illumination beams generated from a non-uniform illumination source to provide an effectively uniform illumination profile over the field of view of an inspection system are presented. In some examples, a pulsed beam of light is split into multiple illumination beams such that each of the beams are temporally separated at the surface of the specimen under inspection. In some examples, multiple illumination beams generated from a non-uniform illumination source are projected onto spatially separated areas on the surface of the specimen. A point object of interest illuminated by each area is imaged onto the surface of a time-delay integration (TDI) detector. The images are integrated such that the relative position of the illumination areas along the direction of motion of the point object of interest has no impact on the illumination efficiency distribution over the field of view.Type: ApplicationFiled: August 8, 2014Publication date: February 12, 2015Inventors: Yung-Ho Alex Chuang, Xiaoxu Lu, John Fielden, Ivan Maleev
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Publication number: 20140362880Abstract: A deep ultra-violet (DUV) continuous wave (CW) laser includes a fundamental CW laser configured to generate a fundamental frequency with a corresponding wavelength between about 1 ?m and 1.1 ?m, a third harmonic generator module including one or more periodically poled non-linear optical (NLO) crystals that generate a third harmonic and an optional second harmonic, and one of a fourth harmonic generator module and a fifth harmonic generator. The fourth harmonic generator module includes a cavity resonant at the fundamental frequency configured to combine the fundamental frequency with the third harmonic to generate a fourth harmonic. The fourth harmonic generator module includes either a cavity resonant at the fundamental frequency for combining the fundamental frequency with the third harmonic to generate a fifth harmonic, or a cavity resonant at the second harmonic frequency for combining the second harmonic and the third harmonic to generate the fifth harmonic.Type: ApplicationFiled: June 2, 2014Publication date: December 11, 2014Applicant: KLA-Tencor CorporationInventors: Yung-Ho Chuang, Xiaoxu Lu, John Fielden