Patents by Inventor Xiaoxu Lu

Xiaoxu Lu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10565573
    Abstract: In one embodiment, the location or zip code of purchasers in a card present electronic transaction may be reviewed and compared to the reported location or zip code of a merchant. If the difference or variance from the customer zip code or location to the customer location or zip code is over a threshold, the merchant is indicating as requiring additional attention.
    Type: Grant
    Filed: May 10, 2016
    Date of Patent: February 18, 2020
    Assignee: VISA INTERNATIONAL SERVICE ASSOCIATION
    Inventors: Alexei Fomitchev, Aleksander Epelman, Nelli Kayton, Suresh Pulikara, Mahesh Joshi, John Wu, Xiaoxu Lu
  • Patent number: 10429719
    Abstract: An inspection system/method in which first optics direct continuous wave (CW) light at 181-185 nm to an inspected article, and second optics redirect image information affected by the article to detectors. A laser assembly generates the CW light by generating fourth harmonic light from first fundamental CW light having a first wavelength between 1 and 1.1 ?m, generating fifth harmonic light by mixing the fourth harmonic light with the first fundamental CW light, and mixing the fifth harmonic light with second light having a second wavelength between 1.26 and 1.82 ?m. An external cavity mixes the first light and the fourth harmonic light using a first nonlinear crystal. The CW light is generated using a second cavity that passes circulated second fundamental or signal CW light through a second nonlinear crystal, and directing the fifth harmonic light through the second nonlinear crystal.
    Type: Grant
    Filed: November 29, 2018
    Date of Patent: October 1, 2019
    Assignee: KLA-Tencor Corporation
    Inventors: Yung-Ho Alex Chuang, Xiaoxu Lu, Baigang Zhang, John Fielden, Vladimir Dribinski
  • Publication number: 20190107766
    Abstract: A laser assembly generates continuous wave (CW) laser output light in the range of approximately 181 nm to approximately 185 nm by generating fourth harmonic light from first fundamental CW light having a first fundamental wavelength between 1 ?m and 1.1 ?m, generating fifth harmonic light by mixing the fourth harmonic light with the first fundamental CW light, and then mixing the fifth harmonic light with second fundamental or signal CW light having a second wavelength between 1.26 ?m and 1.82 ?m. The fifth harmonic light is generated using an external cavity that circulates first fundamental CW light through a first nonlinear crystal, and by directing the fourth harmonic light through the first nonlinear crystal. The laser output light is generated using a second cavity that passes circulated second fundamental or signal CW light through a second nonlinear crystal, and directing the fifth harmonic light through the second nonlinear crystal.
    Type: Application
    Filed: November 29, 2018
    Publication date: April 11, 2019
    Inventors: Yung-Ho Alex Chuang, Xiaoxu Lu, Baigang Zhang, John Fielden, Vladimir Dribinski
  • Patent number: 10175555
    Abstract: A laser assembly generates continuous wave (CW) laser output light in the range of approximately 181 nm to approximately 185 nm by generating fourth harmonic light from first fundamental CW light having a first fundamental wavelength between 1 ?m and 1.1 ?m, generating fifth harmonic light by mixing the fourth harmonic light with the first fundamental CW light, and then mixing the fifth harmonic light with second fundamental or signal CW light having a second wavelength between 1.26 ?m and 1.82 ?m. The fifth harmonic light is generated using an external cavity that circulates first fundamental CW light through a first nonlinear crystal, and by directing the fourth harmonic light through the first nonlinear crystal. The laser output light is generated using a second cavity that passes circulated second fundamental or signal CW light through a second nonlinear crystal, and directing the fifth harmonic light through the second nonlinear crystal.
    Type: Grant
    Filed: November 8, 2017
    Date of Patent: January 8, 2019
    Assignee: KLA—Tencor Corporation
    Inventors: Yung-Ho Alex Chuang, Xiaoxu Lu, Baigang Zhang, John Fielden, Vladimir Dribinski
  • Patent number: 10044164
    Abstract: A repetition rate (pulse) multiplier includes one or more beam splitters and prisms forming one or more ring cavities with different optical path lengths that delay parts of the energy of each pulse. A series of input laser pulses circulate in the ring cavities and part of the energy of each pulse leaves the system after traversing the shorter cavity path, while another part of the energy leaves the system after traversing the longer cavity path, and/or a combination of both cavity paths. By proper choice of the ring cavity optical path length, the repetition rate of an output series of laser pulses can be made to be a multiple of the input repetition rate. The relative energies of the output pulses can be controlled by choosing the transmission and reflection coefficients of the beam splitters. Some embodiments generate a time-averaged output beam profile that is substantially flat in one dimension.
    Type: Grant
    Filed: August 17, 2016
    Date of Patent: August 7, 2018
    Assignee: KLA-Tencor Corporation
    Inventors: Yung-Ho Alex Chuang, Xiaoxu Lu, Justin Dianhuan Liou, J. Joseph Armstrong, Yujun Deng, John Fielden
  • Patent number: 10044166
    Abstract: A deep ultra-violet (DUV) continuous wave (CW) laser includes a fundamental CW laser configured to generate a fundamental frequency with a corresponding wavelength between about 1 ?m and 1.1 ?m, a third harmonic generator module including one or more non-linear optical (NLO) crystals that generate a third harmonic and an optional second harmonic, and a fifth harmonic generator. The fifth harmonic generator module includes a cavity resonant at the fundamental frequency, and combines the fundamental frequency with the third harmonic in a first NLO crystal to generate a fourth harmonic, then combines the fourth harmonic with unconsumed fundamental frequency in a second NLO crystal to generate the fifth harmonic. One or more lenses are used to focus the third and fourth harmonics in the first and second NLO crystals, respectively.
    Type: Grant
    Filed: October 26, 2016
    Date of Patent: August 7, 2018
    Assignee: KLA-Tencor Corporation
    Inventors: Yung-Ho Chuang, Xiaoxu Lu, John Fielden
  • Patent number: 10032619
    Abstract: A high brightness laser-sustained broadband light source includes a gas containment structure and a pump laser configured to generate a pump beam including illumination of a wavelength at least proximate to a weak absorption line of a neutral gas contained in the gas containment structure. The broadband light source includes one or more anamorphic illumination optics configured to focus the pump beam into an approximately elliptical beam waist positioned in or proximate to the center of the gas containment structure. The broadband light source includes one or more first collection optics configured to collect broadband radiation emitted by the plasma in a direction substantially aligned with a longer axis of the elliptical beam waist.
    Type: Grant
    Filed: December 14, 2017
    Date of Patent: July 24, 2018
    Assignee: KLA-Tencor Corporation
    Inventors: Yung-Ho Alex Chuang, Xiaoxu Lu, Justin Liou, John Fielden
  • Publication number: 20180188633
    Abstract: A laser assembly generates continuous (CW) laser output light in the range of approximately 181 nm to approximately 185 nm by generating fourth harmonic light from first fundamental CW light having a first fundamental wavelength between 1 ?m and 1.1 ?m, generating fifth harmonic light by mixing the fourth harmonic light with the first fundamental CW light, and then mixing the fifth harmonic light with second fundamental or signal CW light having a second wavelength between 1.26 ?m and 1.82 ?m. The fifth harmonic light is generated using an external cavity that circulates first fundamental CW light through a first nonlinear crystal, and by directing the fourth harmonic light through the first nonlinear crystal. The laser output light is generated using a second cavity that passes circulated second fundamental or signal CW light through a second nonlinear crystal, and directing the fifth harmonic light through the second nonlinear crystal.
    Type: Application
    Filed: November 8, 2017
    Publication date: July 5, 2018
    Inventors: Yung-Ho Alex Chuang, Xiaoxu Lu, Baigang Zhang, John Fielden, Vladimir Dribinski
  • Publication number: 20180114687
    Abstract: A high brightness laser-sustained broadband light source includes a gas containment structure and a pump laser configured to generate a pump beam including illumination of a wavelength at least proximate to a weak absorption line of a neutral gas contained in the gas containment structure. The broadband light source includes one or more anamorphic illumination optics configured to focus the pump beam into an approximately elliptical beam waist positioned in or proximate to the center of the gas containment structure. The broadband light source includes one or more first collection optics configured to collect broadband radiation emitted by the plasma in a direction substantially aligned with a longer axis of the elliptical beam waist.
    Type: Application
    Filed: December 14, 2017
    Publication date: April 26, 2018
    Inventors: Yung-Ho Alex Chuang, Xiaoxu Lu, Justin Liou, John Fielden
  • Patent number: 9865447
    Abstract: The broadband light source includes a gas containment structure and a pump laser for generating a pump beam including illumination of a wavelength near that of a weak absorption line of a neutral gas contained in the gas containment structure. The broadband light source also includes anamorphic optics for focusing the pump beam into an elliptical beam waist positioned in or near the center of the gas containment structure. The broadband light source also includes collection optics for collecting broadband radiation emitted by the plasma in a direction aligned with a longer axis of the elliptical beam waist.
    Type: Grant
    Filed: October 4, 2016
    Date of Patent: January 9, 2018
    Assignee: KLA-Tencor Corporation
    Inventors: Yung-Ho Alex Chuang, Xiaoxu Lu, Justin Liou, John Fielden
  • Publication number: 20170330163
    Abstract: In one embodiment, the location or zip code of purchasers in a card present electronic transaction may be reviewed and compared to the reported location or zip code of a merchant. If the difference or variance from the customer zip code or location to the customer location or zip code is over a threshold, the merchant is indicating as requiring additional attention.
    Type: Application
    Filed: May 10, 2016
    Publication date: November 16, 2017
    Inventors: Alexei FOMITCHEV, Aleksander EPELMAN, Nelli KAYTON, Suresh PULIKARA, Mahesh JOSHI, John WU, Xiaoxu LU
  • Publication number: 20170278694
    Abstract: A high brightness laser-sustained broadband light source includes a gas containment structure and a pump laser configured to generate a pump beam including illumination of a wavelength at least proximate to a weak absorption line of a neutral gas contained in the gas containment structure. The broadband light source includes one or more anamorphic illumination optics configured to focus the pump beam into an approximately elliptical beam waist positioned in or proximate to the center of the gas containment structure. The broadband light source includes one or more first collection optics configured to collect broadband radiation emitted by the plasma in a direction substantially aligned with a longer axis of the elliptical beam waist.
    Type: Application
    Filed: October 4, 2016
    Publication date: September 28, 2017
    Inventors: Yung-Ho Alex Chuang, Xiaoxu Lu, Justin Liou, John Fielden
  • Publication number: 20170070025
    Abstract: A deep ultra-violet (DUV) continuous wave (CW) laser includes a fundamental CW laser configured to generate a fundamental frequency with a corresponding wavelength between about 1 ?m and 1.1 ?m, a third harmonic generator module including one or more non-linear optical (NLO) crystals that generate a third harmonic and an optional second harmonic, and a fifth harmonic generator. The fifth harmonic generator module includes a cavity resonant at the fundamental frequency, and combines the fundamental frequency with the third harmonic in a first NLO crystal to generate a fourth harmonic, then combines the fourth harmonic with unconsumed fundamental frequency in a second NLO crystal to generate the fifth harmonic. One or more lenses are used to focus the third and fourth harmonics in the first and second NLO crystals, respectively.
    Type: Application
    Filed: October 26, 2016
    Publication date: March 9, 2017
    Inventors: Yung-Ho Chuang, Xiaoxu Lu, John Fielden
  • Patent number: 9525265
    Abstract: A repetition rate (pulse) multiplier includes one or more beam splitters and prisms forming one or more ring cavities with different optical path lengths that delay parts of the energy of each pulse. A series of input laser pulses circulate in the ring cavities and part of the energy of each pulse leaves the system after traversing the shorter cavity path, while another part of the energy leaves the system after traversing the longer cavity path, and/or a combination of both cavity paths. By proper choice of the ring cavity optical path length, the repetition rate of an output series of laser pulses can be made to be a multiple of the input repetition rate. The relative energies of the output pulses can be controlled by choosing the transmission and reflection coefficients of the beam splitters. Some embodiments generate a time-averaged output beam profile that is substantially flat in one dimension.
    Type: Grant
    Filed: January 14, 2015
    Date of Patent: December 20, 2016
    Assignee: KLA-Tencor Corporation
    Inventors: Yung-Ho Alex Chuang, Xiaoxu Lu, Justin Dianhuan Liou, J. Joseph Armstrong, Yujun Deng, John Fielden
  • Publication number: 20160359292
    Abstract: A repetition rate (pulse) multiplier includes one or more beam splitters and prisms forming one or more ring cavities with different optical path lengths that delay parts of the energy of each pulse. A series of input laser pulses circulate in the ring cavities and part of the energy of each pulse leaves the system after traversing the shorter cavity path, while another part of the energy leaves the system after traversing the longer cavity path, and/or a combination of both cavity paths. By proper choice of the ring cavity optical path length, the repetition rate of an output series of laser pulses can be made to be a multiple of the input repetition rate. The relative energies of the output pulses can be controlled by choosing the transmission and reflection coefficients of the beam splitters. Some embodiments generate a time-averaged output beam profile that is substantially flat in one dimension.
    Type: Application
    Filed: August 17, 2016
    Publication date: December 8, 2016
    Inventors: Yung-Ho Alex Chuang, Xiaoxu Lu, Justin Dianhuan Liou, J. Joseph Armstrong, Yujun Deng, John Fielden
  • Patent number: 9509112
    Abstract: A deep ultra-violet (DUV) continuous wave (CW) laser includes a fundamental CW laser configured to generate a fundamental frequency with a corresponding wavelength between about 1 ?m and 1.1 ?m, a third harmonic generator module including one or more periodically poled non-linear optical (NLO) crystals that generate a third harmonic and an optional second harmonic, and one of a fourth harmonic generator module and a fifth harmonic generator. The fourth harmonic generator module includes a cavity resonant at the fundamental frequency configured to combine the fundamental frequency with the third harmonic to generate a fourth harmonic. The fourth harmonic generator module includes either a cavity resonant at the fundamental frequency for combining the fundamental frequency with the third harmonic to generate a fifth harmonic, or a cavity resonant at the second harmonic frequency for combining the second harmonic and the third harmonic to generate the fifth harmonic.
    Type: Grant
    Filed: June 2, 2014
    Date of Patent: November 29, 2016
    Assignee: KLA-Tencor Corporation
    Inventors: Yung-Ho Chuang, Xiaoxu Lu, John Fielden
  • Patent number: 9494531
    Abstract: Methods and systems for minimizing interference among multiple illumination beams generated from a non-uniform illumination source to provide an effectively uniform illumination profile over the field of view of an inspection system are presented. In some examples, a pulsed beam of light is split into multiple illumination beams such that each of the beams are temporally separated at the surface of the specimen under inspection. In some examples, multiple illumination beams generated from a non-uniform illumination source are projected onto spatially separated areas on the surface of the specimen. A point object of interest illuminated by each area is imaged onto the surface of a time-delay integration (TDI) detector. The images are integrated such that the relative position of the illumination areas along the direction of motion of the point object of interest has no impact on the illumination efficiency distribution over the field of view.
    Type: Grant
    Filed: August 8, 2014
    Date of Patent: November 15, 2016
    Assignee: KLA-Tencor Corporation
    Inventors: Yung-Ho Alex Chuang, Xiaoxu Lu, John Fielden, Ivan Maleev
  • Publication number: 20150372446
    Abstract: A repetition rate (pulse) multiplier includes one or more beam splitters and prisms forming one or more ring cavities with different optical path lengths that delay parts of the energy of each pulse. A series of input laser pulses circulate in the ring cavities and part of the energy of each pulse leaves the system after traversing the shorter cavity path, while another part of the energy leaves the system after traversing the longer cavity path, and/or a combination of both cavity paths. By proper choice of the ring cavity optical path length, the repetition rate of an output series of laser pulses can be made to be a multiple of the input repetition rate. The relative energies of the output pulses can be controlled by choosing the transmission and reflection coefficients of the beam splitters. Some embodiments generate a time-averaged output beam profile that is substantially flat in one dimension.
    Type: Application
    Filed: January 14, 2015
    Publication date: December 24, 2015
    Inventors: Yung-Ho Alex Chuang, Xiaoxu Lu, Justin Dianhuan Liou, J. Joseph Armstrong, Yujun Deng, John Fielden
  • Publication number: 20150041666
    Abstract: Methods and systems for minimizing interference among multiple illumination beams generated from a non-uniform illumination source to provide an effectively uniform illumination profile over the field of view of an inspection system are presented. In some examples, a pulsed beam of light is split into multiple illumination beams such that each of the beams are temporally separated at the surface of the specimen under inspection. In some examples, multiple illumination beams generated from a non-uniform illumination source are projected onto spatially separated areas on the surface of the specimen. A point object of interest illuminated by each area is imaged onto the surface of a time-delay integration (TDI) detector. The images are integrated such that the relative position of the illumination areas along the direction of motion of the point object of interest has no impact on the illumination efficiency distribution over the field of view.
    Type: Application
    Filed: August 8, 2014
    Publication date: February 12, 2015
    Inventors: Yung-Ho Alex Chuang, Xiaoxu Lu, John Fielden, Ivan Maleev
  • Publication number: 20140362880
    Abstract: A deep ultra-violet (DUV) continuous wave (CW) laser includes a fundamental CW laser configured to generate a fundamental frequency with a corresponding wavelength between about 1 ?m and 1.1 ?m, a third harmonic generator module including one or more periodically poled non-linear optical (NLO) crystals that generate a third harmonic and an optional second harmonic, and one of a fourth harmonic generator module and a fifth harmonic generator. The fourth harmonic generator module includes a cavity resonant at the fundamental frequency configured to combine the fundamental frequency with the third harmonic to generate a fourth harmonic. The fourth harmonic generator module includes either a cavity resonant at the fundamental frequency for combining the fundamental frequency with the third harmonic to generate a fifth harmonic, or a cavity resonant at the second harmonic frequency for combining the second harmonic and the third harmonic to generate the fifth harmonic.
    Type: Application
    Filed: June 2, 2014
    Publication date: December 11, 2014
    Applicant: KLA-Tencor Corporation
    Inventors: Yung-Ho Chuang, Xiaoxu Lu, John Fielden