Patents by Inventor Xin Shen Guo

Xin Shen Guo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for improved control of process and purge material in a substrate processing system
    Patent number: 6358323
    Abstract: A deposition system for performing chemical vapor deposition comprising deposition chamber having a lid and a vaporizer attached to the lid is provided. Additionally, one or more valves disposed between the lid and the vaporizer to limit the flow of precursor material to the chamber and to improve purging of a precursor material delivery system attached to the vaporizer. The precursor delivery system has one or more conduction lines. One of the conduction lines is a flexible conduction line in the form of a multiple turn coil having a torsional elasticity suitable for allowing detachment of the lid from the chamber without having to break or disassemble a conduction line. Preferably, the flexible conduction line is a thirty (30) turn coil having a diameter of approximately three (3) inches fabricated from stainless steel tubing.
    Type: Grant
    Filed: July 21, 1998
    Date of Patent: March 19, 2002
    Assignee: Applied Materials, Inc.
    Inventors: John Schmitt, Frank P. Chang, Xin Shen Guo, Ling Chen, Christophe Marcadal