Patents by Inventor Xinge GUO

Xinge GUO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and device for measuring mechanical parameters of multilayer composite thin film structure
    Patent number: 11002710
    Abstract: A method for measuring mechanical parameters of a multilayer composite thin film structure and belongs to the technical field of online tests of micro-electro-mechanical system (MEMS for short) material parameters. Equivalent Young modulus and equivalent residual stress of each layer of the multilayer composite thin film structure can be obtained in one step by means of solving an equation set on the basis of a relationship between first-order resonance frequency of multilayer composite fixed-fixed beams and multilayer composite cantilever beams and parameters such as material characteristics and structure size, the online test of multilayer thin film materials can be realized, the test structure and calculating method are simple, and the accuracy is higher. The present invention further discloses a device for measuring mechanical parameters of the multilayer composite thin film structure.
    Type: Grant
    Filed: February 11, 2018
    Date of Patent: May 11, 2021
    Assignee: SOUTHEAST UNIVERSITY
    Inventors: Zaifa Zhou, Chao Sun, Xinge Guo, Qingan Huang
  • Method and Device for Measuring Mechanical Parameters of Multilayer Composite Thin Film Structure
    Publication number: 20190227036
    Abstract: A method for measuring mechanical parameters of a multilayer composite thin film structure and belongs to the technical field of online tests of micro-electro-mechanical system (MEMS for short) material parameters. Equivalent Young modulus and equivalent residual stress of each layer of the multilayer composite thin film structure can be obtained in one step by means of solving an equation set on the basis of a relationship between first-order resonance frequency of multilayer composite fixed-fixed beams and multilayer composite cantilever beams and parameters such as material characteristics and structure size, the online test of multilayer thin film materials can be realized, the test structure and calculating method are simple, and the accuracy is higher. The present invention further discloses a device for measuring mechanical parameters of the multilayer composite thin film structure.
    Type: Application
    Filed: February 11, 2018
    Publication date: July 25, 2019
    Inventors: Zaifa ZHOU, Chao SUN, Xinge GUO, Qingan HUANG