Patents by Inventor Xuan-Rui Chen

Xuan-Rui Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9624092
    Abstract: A semiconductor structure having micro-electro-mechanical system (MEMS) devices is provided. One of the MEMS devices includes a substrate having a first region and a second region; a membrane structure formed in the first region and positioned correspondingly to a cavity of the substrate; a logic device formed in the second region, and electrically connected to the membrane structure; an interconnection structure formed in the second region, and the interconnection structure formed on the substrate and covering the logic device; and an etching stop layer formed in the second region, and the etching stop layer formed on the interconnection structure and including a nitride layer and a carbon-containing layer formed on the nitride layer. Also, a variation in resonant frequencies of the MEMS devices on the entire wafer is less than 10%.
    Type: Grant
    Filed: January 29, 2016
    Date of Patent: April 18, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Wei-Hua Fang, Kuan-Yu Wang, Her-Yi Tang, Xuan-Rui Chen