Patents by Inventor Ya-Ching Chang

Ya-Ching Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240132312
    Abstract: An automatic document feeding device having a main body, a stopping assembly, an actuating assembly and a controller. The main body has a sheet conveying channel of a curvature shape. A sheet feeding roller assembly and a sheet conveying roller assembly are arranged on the sheet conveying channel. The stopping assembly is arranged between the sheet feeding roller assembly and the sheet conveying roller assembly. The stopping assembly is capable of being located in or out of the sheet conveying channel. A buffering channel is located between the stopping assembly and the sheet feeding roller assembly. The controller is electrically connected with the actuating assembly and the sheet feeding roller assembly. The controller controls the actuating assembly to hold the stopping assembly in the sheet conveying channel to block the sheet conveying channel in a predetermined period, and then controls the actuating assembly to stop holding the stopping assembly.
    Type: Application
    Filed: December 29, 2022
    Publication date: April 25, 2024
    Inventors: Ya-Ching TUNG, Po-Chih CHANG
  • Publication number: 20240117297
    Abstract: A p-aminobenzoic acid-producing microorganism is provided. The p-aminobenzoic acid-producing microorganism is obtained by a method for preparing a p-aminobenzoic acid-producing microorganism. The method for preparing a p-aminobenzoic acid-producing microorganism includes (a) performing an acclimation process on a source microorganism with at least one sulfonamide antibiotic to obtain at least one acclimatized microorganism and (b) screening out at least one p-aminobenzoic acid-producing microorganism from the at least one acclimatized microorganism, wherein the at least one p-aminobenzoic acid-producing microorganism has a higher p-aminobenzoic acid titer than the source microorganism.
    Type: Application
    Filed: December 29, 2022
    Publication date: April 11, 2024
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Pei-Ching CHANG, Jhong-De LIN, Ya-Lin LIN, Hung-Yu LIAO, Hsiang Yuan CHU, Jie-Len HUANG
  • Patent number: 11915980
    Abstract: Metal gate cutting techniques for fin-like field effect transistors (FinFETs) are disclosed herein. An exemplary method includes receiving an integrated circuit (IC) device structure that includes a substrate, one or more fins disposed over the substrate, a plurality of gate structures disposed over the fins, a dielectric layer disposed between and adjacent to the gate structures, and a patterning layer disposed over the gate structures. The gate structures traverses the fins and includes first and second gate structures. The method further includes: forming an opening in the patterning layer to expose a portion of the first gate structure, a portion of the second gate structure, and a portion of the dielectric layer; and removing the exposed portion of the first gate structure, the exposed portion of the second gate structure, and the exposed portion of the dielectric layer.
    Type: Grant
    Filed: December 12, 2022
    Date of Patent: February 27, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Ya-Yi Tsai, Yi-Hsuan Hsiao, Shu-Yuan Ku, Ryan Chia-Jen Chen, Ming-Ching Chang
  • Publication number: 20230367218
    Abstract: In a method, a resist material is dispensed through a tube of a nozzle of a resist pump system on a wafer. The tube extends from a top to a bottom of the nozzle and has upper, lower, and middle segments. When not dispensing, the resist material is retracted from the lower and the middle segments, and maintained in the upper segment of the tube. When retracting, a first solvent is flown through a tip of the nozzle at the bottom of the nozzle to fill the lower segment of the tube with the first solvent and to produce a gap in the middle segment of the tube between the resist material and the first solvent. The middle segment includes resist material residues on an inner surface wall of the tube and vapor of the first solvent. The vapor of the first solvent prevents the resist material residues from drying.
    Type: Application
    Filed: July 19, 2023
    Publication date: November 16, 2023
    Inventors: Ya-Ching CHANG, Chen-Yu LIU, Ching-Yu CHANG, Chin-Hsiang LIN
  • Patent number: 11754923
    Abstract: In a method, a resist material is dispensed through a tube of a nozzle of a resist pump system on a wafer. The tube extends from a top to a bottom of the nozzle and has upper, lower, and middle segments. When not dispensing, the resist material is retracted from the lower and the middle segments, and maintained in the upper segment of the tube. When retracting, a first solvent is flown through a tip of the nozzle at the bottom of the nozzle to fill the lower segment of the tube with the first solvent and to produce a gap in the middle segment of the tube between the resist material and the first solvent. The middle segment includes resist material residues on an inner surface wall of the tube and vapor of the first solvent. The vapor of the first solvent prevents the resist material residues from drying.
    Type: Grant
    Filed: March 26, 2021
    Date of Patent: September 12, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Ya-Ching Chang, Chen-Yu Liu, Ching-Yu Chang, Chin-Hsiang Lin
  • Publication number: 20230244729
    Abstract: A method and a system for providing contents within a region of interest of a user are provided. The system includes a serving system having a database, and an application program executed in a user device. The application program is configured to initiate a user interface for allowing the user to browse the one or more contents within the region of interest. The serving system receives an instruction that is generated when the user clicks a link to enter the region of interest via the user interface. The database is queried according to one or more regions of interest of the user in a user regional activity profile, so as to obtain the contents within every region of interest. Lastly, the serving system provides links associated with the one or more contents to the user device, and the links can be displayed on the user interface.
    Type: Application
    Filed: December 5, 2022
    Publication date: August 3, 2023
    Inventors: YU-HSIEN LI, HAO-WEN MEI, YA-CHING CHANG
  • Publication number: 20220308452
    Abstract: In a method, a resist material is dispensed through a tube of a nozzle of a resist pump system on a wafer. The tube extends from a top to a bottom of the nozzle and has upper, lower, and middle segments. When not dispensing, the resist material is retracted from the lower and the middle segments, and maintained in the upper segment of the tube. When retracting, a first solvent is flown through a tip of the nozzle at the bottom of the nozzle to fill the lower segment of the tube with the first solvent and to produce a gap in the middle segment of the tube between the resist material and the first solvent. The middle segment includes resist material residues on an inner surface wall of the tube and vapor of the first solvent. The vapor of the first solvent prevents the resist material residues from drying.
    Type: Application
    Filed: March 26, 2021
    Publication date: September 29, 2022
    Inventors: Ya-Ching CHANG, Chen-Yu LIU, Ching-Yu CHANG, Chin-Hsiang LIN
  • Patent number: 11378884
    Abstract: The present disclosure provides a method for lithography patterning in accordance with some embodiments. The method includes forming a photoresist layer over a substrate. The photoresist layer includes at least an acid labile group (ALG) and a thermo-base generator (TBG). The method further includes exposing a portion of the photoresist layer to a radiation and performing a baking process after the exposing of the portion of the photoresist layer. The TBG releases a base during the performing of the baking process, resulting in a chemical reaction between the ALG and the base. The method further includes removing an unexposed portion of the photoresist layer, resulting in a patterned photoresist layer.
    Type: Grant
    Filed: December 23, 2019
    Date of Patent: July 5, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chen-Yu Liu, Ya-Ching Chang, Cheng-Han Wu, Ching-Yu Chang, Chin-Hsiang Lin
  • Patent number: 11127592
    Abstract: A method includes forming a photoresist layer over a substrate, where the photoresist layer includes a polymer blended with a photo-acid generator (PAG), exposing the photoresist layer to a radiation source, and developing the photoresist layer, resulting in a patterned photoresist layer. The PAG is bonded to one or more polarity-enhancing group (PEG), which is configured to increase a dipole moment of the PAG. The exposing may separate the PAG into a cation and an anion, such that a PEG bonded to the cation and a PEG bonded to the anion each increases a polarity of the cation and the anion, respectively.
    Type: Grant
    Filed: May 31, 2018
    Date of Patent: September 21, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Ya-Ching Chang, Ching-Yu Chang, Chin-Hsiang Lin, Yen-Hao Chen
  • Publication number: 20210103218
    Abstract: A method is provided including forming a first layer over a substrate and forming an adhesion layer over the first layer. The adhesion layer has a composition including an epoxy group. A photoresist layer is formed directly on the adhesion layer. A portion of the photoresist layer is exposed to a radiation source. The composition of the adhesion layer and the exposed portion of the photoresist layer cross-link using the epoxy group. Thee photoresist layer is then developed (e.g., by a negative tone developer) to form a photoresist pattern feature, which may overlie the formed cross-linked region.
    Type: Application
    Filed: December 7, 2020
    Publication date: April 8, 2021
    Inventors: Chen-Yu LIU, Tzu-Yang LIN, Ya-Ching CHANG, Ching-Yu CHANG, Chin-Hsiang LIN
  • Patent number: 10859915
    Abstract: A method is provided including forming a first layer over a substrate and forming an adhesion layer over the first layer. The adhesion layer has a composition including an epoxy group. A photoresist layer is formed directly on the adhesion layer. A portion of the photoresist layer is exposed to a radiation source. The composition of the adhesion layer and the exposed portion of the photoresist layer cross-link using the epoxy group. Thee photoresist layer is then developed (e.g., by a negative tone developer) to form a photoresist pattern feature, which may overlie the formed cross-linked region.
    Type: Grant
    Filed: September 21, 2018
    Date of Patent: December 8, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chen-Yu Liu, Tzu-Yang Lin, Ya-Ching Chang, Ching-Yu Chang, Chin-Hsiang Lin
  • Patent number: 10649339
    Abstract: A resist material and methods for forming a semiconductor structure including using the resist material are provided. The method for forming a semiconductor structure includes forming a resist layer over a substrate and exposing a portion of the resist layer to form an exposed portion of the resist layer by performing an exposure process. The method for forming a semiconductor structure further includes developing the resist layer in a developer. In addition, the resist layer is made of a resist material including a photosensitive polymer and a contrast promoter, and a protected functional group of the photosensitive polymer is deprotected to form a deprotected functional group during the exposure process, and a functional group of the contrast promoter bonds to the deprotected functional group of the photosensitive polymer.
    Type: Grant
    Filed: April 7, 2017
    Date of Patent: May 12, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Ya-Ching Chang, Chen-Yu Liu, Cheng-Han Wu, Ching-Yu Chang, Chin-Hsiang Lin
  • Publication number: 20200133124
    Abstract: The present disclosure provides a method for lithography patterning in accordance with some embodiments. The method includes forming a photoresist layer over a substrate. The photoresist layer includes at least an acid labile group (ALG) and a thermo-base generator (TBG). The method further includes exposing a portion of the photoresist layer to a radiation and performing a baking process after the exposing of the portion of the photoresist layer. The TBG releases a base during the performing of the baking process, resulting in a chemical reaction between the ALG and the base. The method further includes removing an unexposed portion of the photoresist layer, resulting in a patterned photoresist layer.
    Type: Application
    Filed: December 23, 2019
    Publication date: April 30, 2020
    Inventors: Chen-Yu Liu, Ya-Ching Chang, Cheng-Han Wu, Ching-Yu Chang, Chin-Hsiang Lin
  • Publication number: 20200098558
    Abstract: A method is provided including forming a first layer over a substrate and forming an adhesion layer over the first layer. The adhesion layer has a composition including an epoxy group. A photoresist layer is formed directly on the adhesion layer. A portion of the photoresist layer is exposed to a radiation source. The composition of the adhesion layer and the exposed portion of the photoresist layer cross-link using the epoxy group. Thee photoresist layer is then developed (e.g., by a negative tone developer) to form a photoresist pattern feature, which may overlie the formed cross-linked region.
    Type: Application
    Filed: September 21, 2018
    Publication date: March 26, 2020
    Inventors: Chen-Yu LIU, Tzu-Yang LIN, Ya-Ching CHANG, Ching-Yu CHANG, Chin-Hsiang LIN
  • Patent number: 10527941
    Abstract: The present disclosure provides a method for lithography patterning in accordance with some embodiments. The method includes forming a resist layer over a substrate and performing an exposing process to the resist layer. The resist layer includes a polymer backbone, an acid labile group (ALG) bonded to the polymer backbone, a sensitizer bonded to the polymer backbone, a photo-acid generator (PAG), and a thermo-base generator (TBG). The method further includes baking the resist layer at a first temperature and subsequently at a second temperature. The second temperature is higher than the first temperature. The method further includes developing the resist layer in a developer, thereby forming a patterned resist layer.
    Type: Grant
    Filed: May 30, 2017
    Date of Patent: January 7, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chen-Yu Liu, Ya-Ching Chang, Cheng-Han Wu, Ching-Yu Chang, Chin-Hsiang Lin
  • Publication number: 20190371600
    Abstract: A method includes forming a photoresist layer over a substrate, where the photoresist layer includes a polymer blended with a photo-acid generator (PAG), exposing the photoresist layer to a radiation source, and developing the photoresist layer, resulting in a patterned photoresist layer. The PAG is bonded to one or more polarity-enhancing group (PEG), which is configured to increase a dipole moment of the PAG. The exposing may separate the PAG into a cation and an anion, such that a PEG bonded to the cation and a PEG bonded to the anion each increases a polarity of the cation and the anion, respectively.
    Type: Application
    Filed: May 31, 2018
    Publication date: December 5, 2019
    Inventors: Ya-Ching Chang, Ching-Yu Chang, Chin-Hsiang Lin, Yen-Hao Chen
  • Publication number: 20180348639
    Abstract: The present disclosure provides a method for lithography patterning in accordance with some embodiments. The method includes forming a resist layer over a substrate and performing an exposing process to the resist layer. The resist layer includes a polymer backbone, an acid labile group (ALG) bonded to the polymer backbone, a sensitizer bonded to the polymer backbone, a photo-acid generator (PAG), and a thermo-base generator (TBG). The method further includes baking the resist layer at a first temperature and subsequently at a second temperature. The second temperature is higher than the first temperature. The method further includes developing the resist layer in a developer, thereby forming a patterned resist layer.
    Type: Application
    Filed: May 30, 2017
    Publication date: December 6, 2018
    Inventors: Chen-Yu Liu, Ya-Ching Chang, Cheng-Han Wu, Ching-Yu Chang, Chin-Hsiang Lin
  • Publication number: 20180164684
    Abstract: A resist material and methods for forming a semiconductor structure including using the resist material are provided. The method for forming a semiconductor structure includes forming a resist layer over a substrate and exposing a portion of the resist layer to form an exposed portion of the resist layer by performing an exposure process. The method for forming a semiconductor structure further includes developing the resist layer in a developer. In addition, the resist layer is made of a resist material including a photosensitive polymer and a contrast promoter, and a protected functional group of the photosensitive polymer is deprotected to form a deprotected functional group during the exposure process, and a functional group of the contrast promoter bonds to the deprotected functional group of the photosensitive polymer.
    Type: Application
    Filed: April 7, 2017
    Publication date: June 14, 2018
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ya-Ching CHANG, Chen-Yu LIU, Cheng-Han WU, Ching-Yu CHANG, Chin-Hsiang LIN
  • Patent number: 9250633
    Abstract: An air conditioning control device and a method thereof are provided, and the air conditioning control method includes the following steps. A plurality of predetermined state information and a current state information are generated according to environment states of a physical space, and a target state information is selected form the plurality of predetermined state information according to a minimum energy consumption. Moreover, the current state information and the target state information are utilized to generate a current effective temperature value and a target effective temperature value, and a set temperature value and a return-air temperature value are extracted from an air conditioning controller. The current effective temperature value, the target effective temperature value, the set temperature value and the return-air temperature value are utilized to execute fuzzy inference to generate a temperature fine-tuning value.
    Type: Grant
    Filed: December 11, 2012
    Date of Patent: February 2, 2016
    Assignee: Industrial Technology Research Institute
    Inventors: Hsiang-Chieh Chen, Chung-Hsien Lu, Ya-Ching Chang
  • Publication number: 20150086385
    Abstract: A method for controlling pumping of a plurality of pump units in a wet well is disclosed. The method uses a genetic algorithm to determine which of the pump units is to be started and its initial operating frequency when the liquid level in the wet well reaches a first predetermined level for pumping. During the pumping process, the pumping control method monitors the liquid level in the wet well in real time to obtain real-time state information and fine-adjusts the initial operating frequency of the pump unit to be started according to the real-time state information. Therefore, the present disclosure achieves optimum efficiency and energy saving.
    Type: Application
    Filed: September 24, 2013
    Publication date: March 26, 2015
    Applicant: WATER RESOURCES AGENCY, MINISTRY OF ECONOMIC AFFAIRS
    Inventors: Chung-Hsien LU, Ya-Ching CHANG, Hao-Ting CHAO, Hsin-Yi CHUNG