Patents by Inventor Yan-Home Liu

Yan-Home Liu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Reworking method for integrated circuit devices
    Patent number: 8222143
    Abstract: A reworking method for integrated circuit devices includes the following: providing a substrate having a first base layer and a first dielectric layer formed thereon, performing a first dry etching process to remove the first dielectric layer, performing a CMP process to remove the first base layer, and sequentially reforming a second base layer and a second dielectric layer on the substrate. When certain layers on the IC device have hailed an inspection or when quality defects are found, the defective layer is removed according to the provided reworking method.
    Type: Grant
    Filed: October 31, 2007
    Date of Patent: July 17, 2012
    Assignee: United Microelectronics Corp.
    Inventors: Yan-Home Liu, Yung-Chieh Kuo, Yi-Ham Tsou, Jeng-Ho Wang, Cheng-Wei Chen, Hsin-Yi Lu
  • REWORKING METHOD FOR INTEGRATED CIRCUIT DEVICES
    Publication number: 20090111268
    Abstract: A reworking method for integrated circuit devices includes the following: providing a substrate having a first base layer and a first dielectric layer formed thereon, performing a first dry etching process to remove the first dielectric layer, performing a CMP process to remove the first base layer, and sequentially reforming a second base layer and a second dielectric layer on the substrate. When certain layers on the IC device have hailed an inspection or when quality defects are found, the defective layer is removed according to the provided reworking method.
    Type: Application
    Filed: October 31, 2007
    Publication date: April 30, 2009
    Inventors: Yan-Home Liu, Yung-Chieh Kuo, Yi-Ham Tsou, Jeng-Ho Wang, Cheng-Wei Chen, Hsin-Yi Lu