Patents by Inventor Yao-Wen Hsu

Yao-Wen Hsu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10685870
    Abstract: An opening is formed within a dielectric material overlying a semiconductor substrate. The opening may comprise a via portion and a trench portion. During the manufacturing process a treatment chemical is placed into contact with the exposed surfaces in order to release charges that have built up on the surfaces. By releasing the charges, a surface change potential difference is reduced, helping to prevent galvanic corrosion from occurring during further manufacturing.
    Type: Grant
    Filed: February 15, 2018
    Date of Patent: June 16, 2020
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yao-Wen Hsu, Ming-Che Ku, Neng-Jye Yang, Yu-Wen Wang
  • Publication number: 20200083038
    Abstract: A semiconductor device and method of manufacture are provided. After a patterning of a middle layer, the middle layer is removed. In order to reduce or prevent damage to other underlying layers exposed by the patterning of the middle layer and intervening layers, an inhibitor is included within an etching process in order to inhibit the amount of material removed from the underlying layers.
    Type: Application
    Filed: November 18, 2019
    Publication date: March 12, 2020
    Inventors: Jian-Jou Lian, Yao-Wen Hsu, Neng-Jye Yang, Li-Min Chen, Chia-Wei Wu, Kuan-Lin Chen, Kuo Bin Huang
  • Patent number: 10483108
    Abstract: A semiconductor device and method of manufacture are provided. After a patterning of a middle layer, the middle layer is removed. In order to reduce or prevent damage to other underlying layers exposed by the patterning of the middle layer and intervening layers, an inhibitor is included within an etching process in order to inhibit the amount of material removed from the underlying layers.
    Type: Grant
    Filed: October 3, 2017
    Date of Patent: November 19, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jian-Jou Lian, Yao-Wen Hsu, Neng-Jye Yang, Li-Min Chen, Chia-Wei Wu, Kuan-Lin Chen, Kuo Bin Huang
  • Publication number: 20190279876
    Abstract: A method of manufacturing a semiconductor device includes exposing a material to a semi-aqueous etching solution. The semi-aqueous etching solution comprises a solvent which chelates with the material and acts as a catalyst between the etching driving force and the material. As such, the etching driving force may be used to remove the material.
    Type: Application
    Filed: May 30, 2019
    Publication date: September 12, 2019
    Inventors: Yao-Wen Hsu, Jian-Jou Lian, Neng-Jye Yang, Chia-Wei Wu, Kuan-Lin Chen, Kuo Bin Huang, Li-Min Chen
  • Patent number: 10312106
    Abstract: A method of manufacturing a semiconductor device includes exposing a material to a semi-aqueous etching solution. The semi-aqueous etching solution comprises a solvent which chelates with the material and acts as a catalyst between the etching driving force and the material. As such, the etching driving force may be used to remove the material.
    Type: Grant
    Filed: November 1, 2017
    Date of Patent: June 4, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yao-Wen Hsu, Jian-Jou Lian, Neng-Jye Yang, Chia-Wei Wu, Kuan-Lin Chen, Kuo Bin Huang, Li-Min Chen
  • Patent number: 10312073
    Abstract: A semi-aqueous wet clean system and method for removing carbon-containing silicon material (e.g., plasma residue) or nitrogen-containing silicon material (e.g., plasma residue) includes a hydroxyl-terminated organic compound, a diol, and a fluoride ion donor material. The system is configured to protect silicon oxide and amorphous silicon during a post-dry-etch wet clean. The wet clean system is configured to selectively remove carbon-containing or nitrogen-containing plasma residue. pH of the wet clean system can be modified to tune selectivity for removal of carbon-containing or nitrogen-containing plasma residues. As a result, positive TEOS recession of less than about 3 nanometers may be achieved. Additionally, the wet clean system can be adapted for reclamation and subsequent reuse.
    Type: Grant
    Filed: January 12, 2018
    Date of Patent: June 4, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yao-Wen Hsu, Jian-Jou Lian, Neng-Jye Yang, Kuan-Lin Chen
  • Publication number: 20190148127
    Abstract: A semiconductor wafer and a semiconductor wafer fabrication method are provided. The wafer includes a supporting substrate, a semiconductor substrate and a contact layer. The supporting substrate has a first surface and a second surface opposite to the first surface. The semiconductor substrate is disposed on the first surface of the supporting substrate, in which the semiconductor substrate is configured to form plural devices. The contact layer is disposed on the second surface of the supporting substrate to contact the supporting substrate, in which the contact layer is configured to contact an electrostatic chuck and has a resistivity of the contact layer smaller than a resistivity of the supporting substrate. In semiconductor wafer fabrication method, at first, a raw wafer is provided. Then, the contact layer is formed by using an implantation operation or a deposition operation.
    Type: Application
    Filed: October 26, 2018
    Publication date: May 16, 2019
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yao-Wen HSU, Ching-Hung KAO, Po-Jen WANG, Tsung-Han TSAI
  • Publication number: 20190067088
    Abstract: An opening is formed within a dielectric material overlying a semiconductor substrate. The opening may comprise a via portion and a trench portion. During the manufacturing process a treatment chemical is placed into contact with the exposed surfaces in order to release charges that have built up on the surfaces. By releasing the charges, a surface change potential difference is reduced, helping to prevent galvanic corrosion from occurring during further manufacturing.
    Type: Application
    Filed: February 15, 2018
    Publication date: February 28, 2019
    Inventors: Yao-Wen Hsu, Ming-Che Ku, Neng-Jye Yang, Yu-Wen Wang
  • Publication number: 20190035637
    Abstract: A method of manufacturing a semiconductor device includes exposing a material to a semi-aqueous etching solution. The semi-aqueous etching solution comprises a solvent which chelates with the material and acts as a catalyst between the etching driving force and the material. As such, the etching driving force may be used to remove the material.
    Type: Application
    Filed: November 1, 2017
    Publication date: January 31, 2019
    Inventors: Yao-Wen Hsu, Jian-Jou Lian, Neng-Jye Yang, Chia-Wei Wu, Kuan-Lin Chen, Kuo Bin Huang, Li-Min Chen
  • Publication number: 20180315595
    Abstract: A semiconductor device and method of manufacture are provided. After a patterning of a middle layer, the middle layer is removed. In order to reduce or prevent damage to other underlying layers exposed by the patterning of the middle layer and intervening layers, an inhibitor is included within an etching process in order to inhibit the amount of material removed from the underlying layers.
    Type: Application
    Filed: October 3, 2017
    Publication date: November 1, 2018
    Inventors: Jian-Jou Lian, Yao-Wen Hsu, Neng-Jye Yang, Li-Min Chen, Chia-Wei Wu, Kuan-Lin Chen, Kuo Bin Huang
  • Publication number: 20180315593
    Abstract: A semi-aqueous wet clean system and method for removing carbon-containing silicon material (e.g., plasma residue) or nitrogen-containing silicon material (e.g., plasma residue) includes a hydroxyl-terminated organic compound, a diol, and a fluoride ion donor material. The system is configured to protect silicon oxide and amorphous silicon during a post-dry-etch wet clean. The wet clean system is configured to selectively remove carbon-containing or nitrogen-containing plasma residue. pH of the wet clean system can be modified to tune selectivity for removal of carbon-containing or nitrogen-containing plasma residues. As a result, positive TEOS recession of less than about 3 nanometers may be achieved. Additionally, the wet clean system can be adapted for reclamation and subsequent reuse.
    Type: Application
    Filed: January 12, 2018
    Publication date: November 1, 2018
    Inventors: Yao-Wen Hsu, Jian-Jou Lian, Neng-Jye Yang, Kuan-Lin Chen
  • Patent number: 9697989
    Abstract: The present disclosure provides a method for generating a parameter pattern including: performing a plurality of measurements upon a plurality of regions on a surface of a workpiece to obtain a plurality of measured results; and deriving a parameter pattern according to the plurality of measured results by a computer; wherein the parameter pattern includes a plurality of regional parameter values corresponding to each of the plurality of regions on the surface of the workpiece. The present disclosure provides a Feed Forward semiconductor manufacturing method including: forming a layer with a desired pattern on a surface of a workpiece; deriving a control signal including a parameter pattern according to spatial dimension measurements against the layer with the desired pattern distributed over a plurality of regions of the surface of the workpiece; and performing an ion implantation on the surface of the workpiece according to the control signal.
    Type: Grant
    Filed: February 26, 2015
    Date of Patent: July 4, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company Ltd.
    Inventors: Cheng-Ta Wu, Tsung Han Wu, Yao-Wen Hsu, Lun-Kuang Tan, Wei-Ming You, Ting-Chun Wang
  • Publication number: 20160254122
    Abstract: The present disclosure provides a method for generating a parameter pattern including: performing a plurality of measurements upon a plurality of regions on a surface of a workpiece to obtain a plurality of measured results; and deriving a parameter pattern according to the plurality of measured results by a computer; wherein the parameter pattern includes a plurality of regional parameter values corresponding to each of the plurality of regions on the surface of the workpiece. The present disclosure provides a Feed Forward semiconductor manufacturing method including: forming a layer with a desired pattern on a surface of a workpiece; deriving a control signal including a parameter pattern according to spatial dimension measurements against the layer with the desired pattern distributed over a plurality of regions of the surface of the workpiece; and performing an ion implantation on the surface of the workpiece according to the control signal.
    Type: Application
    Filed: February 26, 2015
    Publication date: September 1, 2016
    Inventors: CHENG-TA WU, TSUNG HAN WU, YAO-WEN HSU, LUN-KUANG TAN, WEI-MING YOU, TING-CHUN WANG
  • Patent number: 8905366
    Abstract: A back frame module includes a base plate, two locking plate members, a cable organizing plate, and a stowage plate. The base plate is adapted to be provided on a rear face of a display. The locking plate members, the cable organizing plate, and the stowage plate are selectively connected to the base plate. The locking plate members are adapted for mounting of a computer device therebetween. The cable organizing plate is adapted to stow a cable of the display or of the computer device. The stowage plate is adapted to stow an adapter of the display or other accessories. The locking plate members, the cable organizing plate, and the stowage plate can be selectively substituted by a support plate. The back frame module thus has various states of use to satisfy different user requirements.
    Type: Grant
    Filed: August 1, 2013
    Date of Patent: December 9, 2014
    Assignee: Aopen, Inc.
    Inventors: Chih-Hsiung Chen, Yao-Wen Hsu, Shuang-Ji Jiang, Hong-Chang Liu, Wen-Hsi Tsai
  • Publication number: 20140048658
    Abstract: A back frame module includes a base plate, two locking plate members, a cable organizing plate, and a stowage plate. The base plate is adapted to be provided on a rear face of a display. The locking plate members, the cable organizing plate, and the stowage plate are selectively connected to the base plate. The locking plate members are adapted for mounting of a computer device therebetween. The cable organizing plate is adapted to stow a cable of the display or of the computer device. The stowage plate is adapted to stow an adapter of the display or other accessories. The locking plate members, the cable organizing plate, and the stowage plate can be selectively substituted by a support plate. The back frame module thus has various states of use to satisfy different user requirements.
    Type: Application
    Filed: August 1, 2013
    Publication date: February 20, 2014
    Applicant: Aopen Inc.
    Inventors: Chih-Hsiung Chen, Yao-Wen Hsu, Shuang-Ji Jiang, Hong-Chang Liu, Wen-Hsi Tsai
  • Patent number: 8614884
    Abstract: A display device includes a base seat unit and at least one first display unit. The first display unit includes a first casing module, a first display panel connected to the first casing module, a pair of first support rods, and a pair of second support rods. The first support rods are connectible to the base seat unit in an upright direction and in a horizontally spaced apart manner, and are used to support therebetween the first casing module in a horizontal state. The second support rods are longer than the first support rods, are connectible to the base seat unit in an upright direction and in a horizontally spaced apart manner, and are used to support therebetween the first casing module in a vertical state.
    Type: Grant
    Filed: March 14, 2011
    Date of Patent: December 24, 2013
    Assignee: AOPEN Inc.
    Inventors: Yao-Wen Hsu, Hung-Chang Liu, Bao-Hung Chen
  • Patent number: 8523132
    Abstract: A back frame module includes a base plate, two locking plate members, a cable organizing plate, and a stowage plate. The base plate is adapted to be provided on a rear face of a display. The locking plate members, the cable organizing plate, and the stowage plate are selectively connected to the base plate. The locking plate members are adapted for mounting of a computer device therebetween. The cable organizing plate is adapted to stow a cable of the display or of the computer device. The stowage plate is adapted to stow an adapter of the display or other accessories. The locking plate members, the cable organizing plate, and the stowage plate can be selectively substituted by a support plate. The back frame module thus has various states of use to satisfy different user requirements.
    Type: Grant
    Filed: June 4, 2012
    Date of Patent: September 3, 2013
    Assignee: Aopen Inc.
    Inventors: Chih-Hsiung Chen, Yao-Wen Hsu, Shuang-Ji Jiang, Hong-Chang Liu, Wen-Hsi Tsai
  • Patent number: 8488307
    Abstract: A Point-Of-Sale (POS) system bracket includes a bracket housing and two mounts. The bracket housing includes two opposite sidewalls having inner surfaces, outer surfaces each having a substantially convex shape, and a plurality of positioning holes formed at different heights in the sidewalls. The mounts have outer sides for fixing respectively of two displays, and inner sides to be attached to the outer surfaces of the respective sidewalls. A plurality of locking elements extend respectively through a selected group of the positioning holes from the inner surfaces of the sidewalls to fasten the mounts to the respective sidewalls. The locking elements can be changed in position from one group to the other group of the positioning holes, so that the mounts can be positioned at different heights on the respective sidewalls, and the displays can be disposed at different inclination angles.
    Type: Grant
    Filed: December 21, 2011
    Date of Patent: July 16, 2013
    Assignee: Aopen Inc.
    Inventors: Sheng-Hsiung Cheng, Yao-Wen Hsu, Yen-Chun Chou
  • Patent number: 8327099
    Abstract: A method for soft configuring communication a memory device to act as a Key Card that can switch on or off some particular functions of either an application program or the memory device itself. The method comprising the steps of: connecting the memory device to an external device; running a specific application program on the external device, the application program writing and storing a specific data into the memory device, the specific data including at least a command and a key; the memory device generating a response value according to the command and key of the specific data; and the external device reading the response value from the memory device and checking a status of the response value; if the response value is checked to be valid, then the application program will be able to access the memory device by using functions defined by the command; if the response value is checked to be invalid, then functions of the application program will be restricted.
    Type: Grant
    Filed: March 5, 2008
    Date of Patent: December 4, 2012
    Assignee: Incomm Technologies Co., Ltd
    Inventors: Pei Tai Chen, Shiu Shien Chu, Yao Wen Hsu
  • Publication number: 20120301564
    Abstract: A microfluidic system for creating encapsulated droplets whose shells can be further removed comprises: two electrode plates and a spacing structure disposed between the two electrode plates. One of the electrode plates has three reservoir electrodes and a plurality of channel electrodes. The three electrodes are respectively used for accommodating a shell liquid, a core liquid, and a removing liquid which is able to remove the shell liquid. The channel electrodes are used for communicating droplets among the three reservoir electrodes. Via these arrangements, the microfluidic system can create a quantitative shell droplet and a quantitative core droplet, and then merge the shell and core droplets to form an encapsulated droplet. Moreover, the shell of the encapsulated droplet can be removed by mixing it with the removing liquid. This invention is further provided with a method for creating an encapsulated droplet with a removable shell.
    Type: Application
    Filed: August 6, 2012
    Publication date: November 29, 2012
    Applicant: NATIONAL CHIAO TUNG UNIVERSITY
    Inventors: SHIH-KANG FAN, YAO-WEN HSU, CHIUN-HSUN CHEN