Patents by Inventor Yao-Wen Wu

Yao-Wen Wu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor device and method of manufacture
    Patent number: 11990339
    Abstract: A semiconductor device and method of manufacture are provided. After a patterning of a middle layer, the middle layer is removed. In order to reduce or prevent damage to other underlying layers exposed by the patterning of the middle layer and intervening layers, an inhibitor is included within an etching process in order to inhibit the amount of material removed from the underlying layers.
    Type: Grant
    Filed: August 2, 2021
    Date of Patent: May 21, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Jian-Jou Lian, Yao-Wen Hsu, Neng-Jye Yang, Li-Min Chen, Chia-Wei Wu, Kuan-Lin Chen, Kuo Bin Huang
  • Automatic statistical process control (SPC) chart generation apparatus and method thereof
    Patent number: 7117058
    Abstract: A system and method for automatic SPC chart generation including a storage device and a data acquisition module. The storage device stores a chamber management tree, a recipe window management tree, a parameter configuration table and multiple chart profile records. The data acquisition module, which resides in a memory, acquires multiple process events and parameter values corresponding to the process events and a process parameter, selects a relevant statistical algorithm, calculates a statistical value by applying the statistical algorithm to the parameter values, creates a new chart profile record and a parameter statistics record therein if the chart profile record is absent, and stores the statistical values and measured time in the parameter statistics record.
    Type: Grant
    Filed: June 24, 2004
    Date of Patent: October 3, 2006
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Mu-Tsang Lin, Tien-Wen Wang, Joseph W. L. Fang, Ie-Fun Lai, Chon-Hwa Chu, Jian-Hong Chen, Chin-Chih Chen, Yu-Yi Wu, Yao-Wen Wu, Wen-Sheng Chien
  • Automatic statistical process control (SPC) chart generation apparatus and method thereof
    Publication number: 20050288810
    Abstract: A system and method for automatic SPC chart generation including a storage device and a data acquisition module. The storage device stores a chamber management tree, a recipe window management tree, a parameter configuration table and multiple chart profile records. The data acquisition module, which resides in a memory, acquires multiple process events and parameter values corresponding to the process events and a process parameter, selects a relevant statistical algorithm, calculates a statistical value by applying the statistical algorithm to the parameter values, creates a new chart profile record and a parameter statistics record therein if the chart profile record is absent, and stores the statistical values and measured time in the parameter statistics record.
    Type: Application
    Filed: June 24, 2004
    Publication date: December 29, 2005
    Inventors: Mu-Tsang Lin, Tien-Wen Wang, Joseph Fang, Ie-Fun Lai, Chon-Hwa Chu, Jian-Hong Chen, Chin-Chih Chen, Yu-Yi Wu, Yao-Wen Wu, Wen-Sheng Chien