Patents by Inventor Yao Hua SUN

Yao Hua SUN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SEMICONDUCTOR PROCESSING APPARATUS
    Publication number: 20130269877
    Abstract: A semiconductor processing apparatus includes a wafer supporting unit for supporting a wafer and a wafer holder positioned outside of the wafer supporting unit. The wafer holder further includes a plurality of horizontal parts extending axially around the wafer supporting unit and a plurality of vertical parts vertically extending from the horizontal parts respectively. Topmost surfaces of the vertical parts and a topmost surface of the wafer supporting unit are non-coplanar.
    Type: Application
    Filed: April 16, 2012
    Publication date: October 17, 2013
    Inventors: Yao Hua SUN, Eeyian TOH