Abstract: A silicon micro sensor including a silicon substrate, a support element formed over an etched portion of the silicon substrate and a sensor element formed on the support element wherein the support element has a double layered structure including a silicon oxide film formed on the silicon substrate using the thermal oxidization method and an aluminum oxide film formed on the silicon oxide film using the sputtering method.

Abstract: A moisture-sensitive device comprising a substrate such as silicon substrate, a pair of belt-like heating elements extending over recesses formed in the substrate, the heating elements being composed of a resistive film of platinum or nickel and a heat-resistant insulating film covering the resistive film in which one of the heating elements acts as a detector element and the other as a reference element, which device can exactly determine an absolute humidity irrespective of sudden changes of temperature.

Abstract: A flow sensor comprising a heating unit and a fluid temperature detecting unit, the heating unit including a heat element, the fluid temperature detecting unit including a fluid temperature detecting element, the elements being formed on at least one substrate made of zirconia that is a heat insulating material having low thermal conductivity, great mechanical strength, and high heat-resistance.

Abstract: A sensor having a pair of sensor units, one of which is a detecting sensor unit and the other of which is a reference sensor unit, wherein each of the units comprises a substrate with a hollow portion, a thin insulating layer with a bridge, cantilever or diaphragm shape disposed on the substrate, a sensitive film disposed on the bridge, cantilever or diaphragm portion of the thin insulating layer, and a pair of electrodes being in contact with the sensitive film, the sensitive film section of the detecting sensor unit being exposed to an atmosphere to be measured so that the electrical resistance of the sensitive film changes with a variation in the physical quantity of the atmosphere to be detected, and the sensitive film section of the reference sensor unit being sealed within a shielding container so that the electrical resistance of the sensitive film is not influenced by a variation in the physical quantity of the atmosphere outside of the container, whereby the absolute physical quantity of the atmosphe

Abstract: A flow sensor for detecting the rate of flow and the direction of flow of a fluid, comprising a substrate, a heating element disposed on the substrate, and four or more fluid temperature sensing elements disposed with an equal space therebetween on a virtual circle around the heating element, wherein the difference in temperature between the fluid and the heating element is maintained at a fixed level by the control of current that is applied to the heating element, so that the flow rate of the fluid can be calculated from changes in the current that corresponds to the flow rate of the fluid, and at the same time, the difference in current or in potential between the fluid temperature sensing elements is calculated from changes in temperature therebetween that arise from changes in the direction of flow of the fluid, so that the direction of flow of the fluid can be detected.

Abstract: A variable interferometric device comprising a Fabry-Perot interferometer composed of a pair of reflecting substances facing each other with a space therebetween formed by spacers and a means for deforming at least one of the reflecting substances constituting said Fabry-Perot interferometer to thereby change the interferometric characteristics of said Fabry-Perot interferometer.

Abstract: A field effect transistor-type moisture sensor comprising a field effect transistor device incorporated with a moisture sensitive means, the electrostatic capacity or the electrical conductivity of which varies with the absorption and the desorption of water vapor or moisture, wherein said moisture sensitive means is disposed on a gate insulating film of said field effect transistor device to form an electrode structure, said moisture sensitive means being a film prepared by cross-linking cellulose acetate butyrate with at least one selected from the group consisting of compounds containing two or more isocyanate groups; compounds containing two or more epoxy groups; compounds containing two or more carboxylic acid groups; and acid anhydrides of carboxylic acids.

Abstract: A method for preparing an electrochromic display device comprising first and second electrochromic layers and a solid electrolyte interposed therebetween, comprises the steps of forming a conductive film on a substrate, forming an insulating film, over the entire surface of the conductive film forming a resist at portions on the insulating film other than a display pattern and lead-in electrodes, removing the insulating film at the display pattern and the lead-in electrodes, forming the electrochromic material layers and the solid electrolyte over the entire portions other than the lead-in electrode, removing the resist and the electrochromic layers and the solid electrolyte as formed on the insulating film, and forming a second electrode on the second electrochromic layer.

Abstract: An electrochromic display device in which the redox layer of the counter-electrode is formed by burning a mixture of a self-film-forming compound such as manganese nitrate and a carbon type electroconductive material such as non-woven fabric of carbon fibers without use of any binder.

Abstract: A method for preparing display electrode layers in an electrochromic display device, comprises the steps of forming a transparent, conductive film on a substrate, forming an insulating film over the entire surface of the transparent, conductive film forming a mask at portions on the insulating film other than a display pattern and a lead-in electrode, removing the insulating film at the display pattern and the lead-in electrode, forming an electrochromic material layer over entire portions other than the lead-in electrode, and removing the mask formed on the insulating film. Preferably, an inorganic resist is used to form the mask at the portions on the insulating film.

Abstract: An electrochromic display device is characterized by comprising a counter electrode, opposed to a plurality of display segmented electrodes, for absorbing a charge present in some colored display segments. Thereafter, the counter electrode provides a refreshing charge to said some segments from which charge has been taken off. A total amount of charge, defined as the amount of charge necessary for coloring all the display electrodes, is kept constant by refreshing.

Abstract: An electrochromic display device comprises a plurality of display segmented electrodes and first additional electrodes, a layer of an electrochromic material in contact with each of the display segmented electrodes and the first additional electrodes, a first connecting circuit for selectively connecting each of the display segmented electrodes into one of two groups, depending on a display pattern to be indicated, a counting circuit for counting the electrodes and determining the difference in display area between the two groups of display segmented electrodes, a circuit responsive to the difference in display area for connecting each of the first additional electrodes into one of the two groups of the display segmented electrodes, a power supply for supplying power to each of the two groups of the first additional electrodes and the display segmented electrodes, and a second additional electrode for keeping the total amount of charge for coloring all the display electrodes constant.

Abstract: A method of driving an electrochromic display device and the electrochromic display device therefor the latter including an electrochromic display cell having two opposed substrates at least one of which is transparent, a plurality of electrodes respectively applied to the opposed substrates and an electrochromic substance held in contact with said plurality of electrodes between said opposed substrates so as to reversibly vary its light absorbing characteristics by an electric current applied to the electrodes, and a driving circuit coupled to the electrochromic display cell for driving the latter, wherein erasing the display of the electrochromic cell is done in such a manner that the erasing current will be stopped eventually by the electrochromic substance itself in order to secure complete erasure.

Abstract: A driving technique is provided for an electro-optical display which includes an electrochromic material and a predetermined number of display segments, combinations of the display segments each defining a different one of a desired number display patterns. The electrochromic phenomenon is developed within the electro-optical display upon a flow of current supplied through the display segments. In transition of a visual display from a specific display pattern to another, current is applied to only the one or more display segments which are not common to the two display patterns, while no current is supplied to the one or more display segments common to the two display patterns.

Abstract: A porous separator is provided with an electrochromic display for containing an electrolyte, whereby a display electrode is continuously, electrically rotated to a counter electrode through the electrolyte. A filter separator is further provided together with the porous separator for urging the porous separator toward the display electrode and itself toward the counter electrode because of the elastic characteristic thereof. The filter separator can also contain the electrolyte. The porous separator provides a white background for the display electrode. The remaining electrolyte, except for the electrolyte in both the porous and the filter separators, is eliminated from the electrochromic display to provide a cavity within the electrolyte for cancelling the cubic expansion of the electrolyte when temperature rises. This cubic expansion cancelling cavity may be formed by injecting a bubble into the electrolyte.

Abstract: In an electrochromic display device including an electro-chromic layer comprising a film made of amorphous tungsten oxide (WO.sub.3), the device is fabricated under the ambience of both a relative humidity below 60% and an absolute humidity below 1.17.times.10.sup.-2 Kg/Kg to assure electro-optical properties of the electrochromic display device.

Abstract: A constant-voltage circuit is interposed between a power source and a driver circuit for an electrochromic display. The constant-voltage circuit functions to compensate for variations of an output level of the power source in order to stabilize coloration and bleaching operations. Switching means are interposed between the power source and the constant-voltage circuit for placing the constant-voltage circuit in an operative condition only when the coloration operation or the bleaching operation is conducted.

Abstract: In an electrochromic display comprising a back plate electrode, a plurality of display electrodes, and a reference electrode available for maintaining the potential of the respective display electrodes at a fixed value, there is provided a detector for sensing the counter electromotive force which is developed between the display electrodes and the reference electrode in a manner such that there is created a remarkable difference in the output voltage signal thereof between in the colored state and in the bleached state. Therefore, the output signal from the detector indicates whether the electrochromic display is held in the colored state or the bleached state.

Abstract: A combined constant potential and constant voltage driving technique is utilized which is much more effective to drive an electrochromic display. The electrochromic display manifests the electrochromic phenomenon to place the display in a colored state or a bleached state in response to current applied thereto. A constant potential driving manner is employed in coloring the electrochromic display, while a constant voltage driving manner is employed in bleaching the same.

Abstract: Electrochromic display device manufacture method wherein electrochromic material is deposited in a single layer on a single film of conductive material over the whole area of glass substrate and then the electrochromic material and conductive material are successively etched through a single mask which defines a display segment pattern and remains in position throughout the whole etching process, whereby etched edge portions of the different materials are in excellent alignment and there is therefore small plate area for a reverse emf cell and good display device performance is achieved. The electrochromic material may be etched by the solution employed for developing the photoresist, whereby an etching process step is eliminated.