Patents by Inventor Yasuhiro Uo

Yasuhiro Uo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for performing limited area spectral analysis
    Patent number: 7602484
    Abstract: A method and apparatus for obtaining in-situ data of a substrate in a semiconductor substrate processing chamber is provided. The apparatus includes an optics assembly for acquiring data regarding a substrate and an actuator assembly adapted to laterally move the optics assembly in two dimensions relative to the substrate.
    Type: Grant
    Filed: December 7, 2007
    Date of Patent: October 13, 2009
    Assignee: Applied Materials, Inc.
    Inventors: Matthew F. Davis, Lei Lian, Yasuhiro Uo, Michael D. Willwerth, Andrei Ivanovich Netchitaliouk
  • METHOD AND APPARATUS FOR PERFORMING LIMITED AREA SPECTRAL ANALYSIS
    Publication number: 20080074658
    Abstract: A method and apparatus for obtaining in-situ data of a substrate in a semiconductor substrate processing chamber is provided. The apparatus includes an optics assembly for acquiring data regarding a substrate and an actuator assembly adapted to laterally move the optics assembly in two dimensions relative to the substrate.
    Type: Application
    Filed: December 7, 2007
    Publication date: March 27, 2008
    Inventors: Matthew Davis, Lei Lian, Yasuhiro Uo, Michael Willwerth, Andrei Netchitaliouk
  • Method and apparatus for performing limited area spectral analysis
    Patent number: 7330244
    Abstract: A method and apparatus for obtaining in-situ data of a substrate in a semiconductor substrate processing chamber is provided. The apparatus includes an optics assembly for acquiring data regarding a substrate and an actuator assembly adapted to laterally move the optics assembly in two dimensions relative to the substrate.
    Type: Grant
    Filed: December 28, 2006
    Date of Patent: February 12, 2008
    Assignee: Applied Materials, Inc.
    Inventors: Matthew F. Davis, Lei Lian, Yasuhiro Uo, Michael D. Willwerth, Andrei Ivanovich Netchitaliouk
  • METHOD AND APPARATUS FOR PERFORMING LIMITED AREA SPECTRAL ANALYSIS
    Publication number: 20070153263
    Abstract: A method and apparatus for obtaining in-situ data of a substrate in a semiconductor substrate processing chamber is provided. The apparatus includes an optics assembly for acquiring data regarding a substrate and an actuator assembly adapted to laterally move the optics assembly in two dimensions relative to the substrate.
    Type: Application
    Filed: December 28, 2006
    Publication date: July 5, 2007
    Inventors: Matthew Davis, Lei Lian, Yasuhiro Uo, Michael Willwerth, Andrei Netchitaliouk
  • Method and apparatus for performing limited area spectral analysis
    Patent number: 7158221
    Abstract: A method and apparatus for obtaining in-situ data of a substrate in a semiconductor substrate processing chamber is provided. The apparatus includes an optics assembly for acquiring data regarding a substrate and an actuator assembly adapted to laterally move the optics assembly in two dimensions relative to the substrate.
    Type: Grant
    Filed: December 23, 2003
    Date of Patent: January 2, 2007
    Assignee: Applied Materials, Inc.
    Inventors: Matthew F. Davis, Lei Lian, Yasuhiro Uo, Michael D. Willwerth, Andrei Ivanovich Netchitaliouk
  • Method and apparatus for performing limited area spectral analysis
    Publication number: 20050134834
    Abstract: A method and apparatus for obtaining in-situ data of a substrate in a semiconductor substrate processing chamber is provided. The apparatus includes an optics assembly for acquiring data regarding a substrate and an actuator assembly adapted to laterally move the optics assembly in two dimensions relative to the substrate.
    Type: Application
    Filed: December 23, 2003
    Publication date: June 23, 2005
    Inventors: Matthew Davis, Lei Lian, Yasuhiro Uo, Michael Willwerth, Andrei Netchitaliouk