Patents by Inventor Yasuhisa ISHIMA

Yasuhisa ISHIMA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Edge ring and plasma processing apparatus
    Patent number: 11862437
    Abstract: According to one embodiment, an edge ring is provided which includes a first movable portion provided along an outer circumference of a support portion having an upper surface capable of holding a semiconductor substrate thereon, the first movable portion being movable in a direction perpendicular to the upper surface; a second movable portion provided along an outer circumference of the first movable portion, the second movable portion being movable in the direction; and a driving portion capable of moving the first movable portion in the direction by way of the second movable portion.
    Type: Grant
    Filed: September 10, 2020
    Date of Patent: January 2, 2024
    Assignee: Kioxia Corporation
    Inventor: Yasuhisa Ishima
  • EDGE RING AND PLASMA PROCESSING APPARATUS
    Publication number: 20210296096
    Abstract: According to one embodiment, an edge ring is provided which includes a first movable portion provided along an outer circumference of a support portion having an upper surface capable of holding a semiconductor substrate thereon, the first movable portion being movable in a direction perpendicular to the upper surface; a second movable portion provided along an outer circumference of the first movable portion, the second movable portion being movable in the direction; and a driving portion capable of moving the first movable portion in the direction by way of the second movable portion.
    Type: Application
    Filed: September 10, 2020
    Publication date: September 23, 2021
    Applicant: Kioxia Corporation
    Inventor: Yasuhisa ISHIMA