Abstract: Provided are a high-energy and high-powered laser light source and a photoemission electron microscope using the laser light source. The laser light source 2 is intended for use in the photoemission electron microscope for emitting a quasi-continuous wave laser 7 and includes: a first laser light source 100 configured to emit a continuous wave coherent light 100a, an optical resonator 110 including an optical path in which the continuous wave coherent light 100a circulates and including a non-linear optical element 114 disposed on the optical path, and a quasi-continuous wave light source 120 configured to emit a quasi-continuous wave coherent light 120a having a wavelength shorter than that of the continuous wave coherent light 100a and having a near rectangular output waveform.

Abstract: The method acquires slope data by measurement of slopes of an analysis object at multiple measurement points. The method calculates, by using the slope data at mutually adjacent measurement points, differences Dx and Dy of the analysis object between at the mutually adjacent measurement points, sets multiple start positions at each of which a calculation of the data of the analysis object is started, adds together the differences Dx and Dy on a path from one of the start positions to a position at which the data is acquired, repeats the above additions, calculates x and y average addition results of the differences Dx and Dy from all the start positions, and produces the data by subtracting, from the x and y average addition results, a piston that is an average of the x and y average addition results.

Abstract: The present invention provides a measurement method of measuring a surface shape of a measurement target surface including an aspherical surface by using a measurement apparatus including an optical system which guides a light from the measurement target surface to a detection unit having a detection surface, including a step of converting, into coordinates on the measurement target surface by using a coordinate conversion table, coordinates on the detection surface that indicate positions where light traveling from the measurement target surface enters the detection surface, and a step of converting, by using an angle conversion table, angle differences between angles of light reflected by a reference surface and angles of light reflected by the measurement target surface at the respective coordinates on the detection surface into angle differences at a plurality of respective coordinates on the measurement target surface that correspond to the respective coordinates on the detection surface.

Abstract: The method includes: calculating positional and angular magnification distributions of rays reflected by a reference aspheric surface on a light-receiving sensor and on a sensor conjugate surface; measuring a first wavefront of a reference light on the sensor; and calculating a second wavefront of the reference light on the sensor based on a parameter of an optical system. The method includes: moving at least two movable elements for calibration such that a difference between rotationally symmetric components of the first and second wavefronts becomes small; measuring, after the calibration, a third wavefront of the reference light on the sensor; measuring, after the calibration, a fourth wavefront of the measurement light on the sensor; and calculating the profile of the measurement object aspheric surface by using the third and fourth wavefronts, the positional and angular magnification distributions, and the profile of the reference aspheric surface.

Abstract: The method enables acquiring centroid positions of light spots formed on an optical detector by multiple microlenses arranged mutually coplanarly in a wavefront sensor. The method includes a first step of estimating, by using known centroid positions or known intensity peak positions of first and second light spots respectively formed by first and second microlenses in the multiple microlenses, a position of a third light spot formed by a third microlens, a second step of setting, by using the estimated position of the third light spot, a calculation target area for a centroid position of the third light spot on the optical detector, and a third step of calculating the centroid position of the third light spot in the calculation target area.

Abstract: A surface shape measurement method that divides a surface shape of an object (107) into a plurality of partial regions (201, 202, 203, 204) to obtain partial region data and that stitches the partial region data to measure the surface shape of the object, and the method includes the steps of calculating sensitivity of an error generated by a relative movement between the object and a sensor (110) for each of the partial regions, dividing the surface shape of the object into the plurality of partial regions to obtain the partial region data, obtaining the partial region data, calculating an amount corresponding to the error using the sensitivity, correcting the partial region data using the amount corresponding to the error, and stitching the corrected partial region data to calculate the surface shape of the object.

Abstract: An aspherical surface measurement method includes measuring a first wavefront of light from a standard surface having a known shape, measuring a second wavefront of light from an object surface having an aspherical shape, rotating the object surface around an optical axis and then measuring a third wavefront of light from the object surface, calculating error information of an optical system based on the first, second, and third wavefronts, calculating shapes of a plurality of partial regions of the object surface by using a design value of the optical system corrected based on the error information of the optical system and by using a plurality of measured wavefronts of lights from the partial regions of the object surface measured after the object surface is driven, and stitching the shapes of the partial regions of the object surface to calculate an entire shape of the object surface.

Abstract: In accordance with the present invention, there is provided a method for producing a single LTGA crystal from a polycrystalline starting material prepared from a mixture of La2O3, Ta2O5, Ga2O3, and Al2O3, wherein a mixture having a composition represented by y(La2O3)+(1?x?y?z)(Ta2O5)+z(Ga2O3)+x(Al2O3) (in the formula, 0<x?0.40/9, 3.00/9<y?3.23/9, and 5.00/9?z<5.50/9) is used as the polycrystalline starting material, and a single LTGA crystal is grown using the Z-axis as a crystal growth axis. The grown LTGA single crystal is preferably subjected to a vacuum heat treatment. The single LTGA crystal grown by the method according to the present invention, which is highly insulative and highly stable, can be utilized in such applications as a piezoelectric element of a highly reliable combustion pressure sensor useful in measurement of a combustion pressure in a combustion chamber of an internal combustion engine.

Abstract: The method includes: measuring a first wavefront of a reference light on a sensor by using the sensor; calculating a second wavefront of the reference light on the sensor by using a parameter of an optical system; changing an optical system parameter in calculation such that a difference between rotationally symmetric components of the first and second wavefronts becomes smaller; calculating, by using the changed parameter, a magnification distribution of rays of the reference light between on the sensor and on a sensor conjugate surface; measuring a first ray angle distribution of the reference light by using the sensor, and measuring a second ray angle distribution of a measurement light by using the light-receiving sensor. The method calculates the profile of the measurement object aspheric surface by using the profile of the reference aspheric surface, the first and second ray angle distributions and the magnification distribution.

Abstract: Provided is an external resonance-type laser device with high wavelength conversion efficiency in which a nonlinear optical crystal is disposed outside of a resonator. The laser device includes a laser generation device configured to generate high-intensity laser light, a nonlinear optical crystal on which the high-intensity laser light generated by the laser generation device is incident and which is configured to generate a second harmonic wave light, and a different-element-fluxless-grown nonlinear optical crystal on which the second harmonic wave light generated by the nonlinear optical crystal is incident and which is configured to generate a fourth harmonic wave light. In the laser device, the different-element-fluxless-grown nonlinear optical crystal is not damaged even when high-intensity laser light of 100 MW/cm2 or more is incident.

Abstract: The method includes: calculating positional and angular magnification distributions of rays reflected by a reference aspheric surface on a light-receiving sensor and on a sensor conjugate surface; measuring a first wavefront of a reference light on the sensor; and calculating a second wavefront of the reference light on the sensor based on a parameter of an optical system. The method includes: moving at least two movable elements for calibration such that a difference between rotationally symmetric components of the first and second wavefronts becomes small; measuring, after the calibration, a third wavefront of the reference light on the sensor; measuring, after the calibration, a fourth wavefront of the measurement light on the sensor; and calculating the profile of the measurement object aspheric surface by using the third and fourth wavefronts, the positional and angular magnification distributions, and the profile of the reference aspheric surface.

Abstract: The method includes: measuring a first wavefront of a reference light on a sensor by using the sensor; calculating a second wavefront of the reference light on the sensor by using a parameter of an optical system; changing an optical system parameter in calculation such that a difference between rotationally symmetric components of the first and second wavefronts becomes smaller; calculating, by using the changed parameter, a magnification distribution of rays of the reference light between on the sensor and on a sensor conjugate surface; measuring a first ray angle distribution of the reference light by using the sensor, and measuring a second ray angle distribution of a measurement light by using the light-receiving sensor. The method calculates the profile of the measurement object aspheric surface by using the profile of the reference aspheric surface, the first and second ray angle distributions and the magnification distribution.

Abstract: An interferometer that measures a shape of a surface of an inspection object includes an interference optical system that splits light from a light source into inspection light and reference light and causes the inspection light reflected by the surface of the inspection object and the reference light to interfere with each other, and a photoelectric conversion element that detects interference fringes produced by interference between the inspection light and the reference light. The interference optical system includes a first optical element that transmits and reflects the inspection light, a second optical element that reflects the inspection light, and a moving unit configured to move the second optical element. The inspection light passes through the first optical element, is reflected by the second optical element, is reflected by the first optical element, and is then incident on the surface of the inspection object.

Abstract: In accordance with the present invention, there is provided a method for producing a single LTGA crystal from a polycrystalline starting material prepared from a mixture of La2O3, Ta2O5, Ga2O3, and Al2O3, wherein a mixture having a composition represented by y(La2O3)+(1-x-y-z)(Ta2O5)+z(Ga2O3)+x(Al2O3) (in the formula, 0<x?0.40/9, 3.00/9<y?3.23/9, and 5.00/9?z<5.50/9) is used as the polycrystalline starting material, and a single LTGA crystal is grown using the Z-axis as a crystal growth axis. The grown LTGA single crystal is preferably subjected to a vacuum heat treatment. The single LTGA crystal grown by the method according to the present invention, which is highly insulative and highly stable, can be utilized in such applications as a piezoelectric element of a highly reliable combustion pressure sensor useful in measurement of a combustion pressure in a combustion chamber of an internal combustion engine.

Abstract: The present invention provides a measurement method of measuring a surface shape of a measurement target surface including an aspherical surface by using a measurement apparatus including an optical system which guides a light from the measurement target surface to a detection unit having a detection surface, including a step of converting, into coordinates on the measurement target surface by using a coordinate conversion table, coordinates on the detection surface that indicate positions where light traveling from the measurement target surface enters the detection surface, and a step of converting, by using an angle conversion table, angle differences between angles of light reflected by a reference surface and angles of light reflected by the measurement target surface at the respective coordinates on the detection surface into angle differences at a plurality of respective coordinates on the measurement target surface that correspond to the respective coordinates on the detection surface.

Abstract: A measurement apparatus which measures spatial coherence in an illuminated plane illuminated by an illumination system, comprises a measurement mask which has at least three pinholes and is arranged on the illuminated plane, a detector configured to detect an interference pattern formed by lights from the at least three pinholes, and a calculator configured to calculate the spatial coherence in the illuminated plane based on a Fourier spectrum obtained by Fourier-transforming the interference pattern detected by the detector.

Abstract: An interferometer that measures a shape of a surface of an inspection object includes an interference optical system that splits light from a light source into inspection light and reference light and causes the inspection light reflected by the surface of the inspection object and the reference light to interfere with each other, and a photoelectric conversion element that detects interference fringes produced by interference between the inspection light and the reference light. The interference optical system includes a first optical element that transmits and reflects the inspection light, a second optical element that reflects the inspection light, and a moving unit configured to move the second optical element. The inspection light passes through the first optical element, is reflected by the second optical element, is reflected by the first optical element, and is then incident on the surface of the inspection object.

Abstract: A laser-diode pumped solid-state laser apparatus comprises at least one laser diode producing a pumping laser light, and at least one laser light generator including a monocrystalline substance doped with a dopant element and pumped with the pumping laser light from at least one laser diode, the monocrystalline substance containing the dopant element with a concentration profile such that the dopant element increases a concentration thereof in a direction perpendicular to a laser oscillation direction gently in the form of a slope from a near zero concentration.

Abstract: A measuring device configured to measure a wave aberration of an optical system to be measured includes a reflection optical element for reflecting light, having passed through a mask and the optical system to be measured, into the optical system to be measured, and a detector for detecting an interference fringe of light having passed through pinholes and openings. The mask has at least three pinhole-opening pairs, each including one pinhole and one opening having a larger diameter than the pinhole that are arranged point-symmetrically, the three pinhole-opening pairs having the common center of symmetry. The light to be measured formed in two of the three pairs is made to interfere with the reference light formed in the remaining pair, or, the light to be measured formed in one of the three pairs is made to interfere with the reference light formed in the other two pairs.

Abstract: A measurement apparatus which measures spatial coherence in an illuminated plane illuminated by an illumination system, comprises a measurement mask which has at least three pinholes and is arranged on the illuminated plane, a detector configured to detect an interference pattern formed by lights from the at least three pinholes, and a calculator configured to calculate the spatial coherence in the illuminated plane based on a Fourier spectrum obtained by Fourier-transforming the interference pattern detected by the detector.