Abstract: A plurality of air levitation units that jet air to the lower surface of a substrate are placed below the substrate, and the substrate is supported in a noncontact manner so as to be substantially horizontal. Further, a portion subject to exposure of the substrate is held from below in a noncontact manner by a chuck main body that a fixed-point stage has, and a surface position of the portion subject to exposure is adjusted in a pinpoint manner. Consequently, exposure can be performed on the substrate with high precision. Since the chuck main body moves in a scanning direction according to the position of the substrate, the chuck main body can surely hold the substrate even when the substrate proceeds into an exposure area.

Abstract: A plurality of air levitation units that jet air to the lower surface of a substrate are placed below the substrate, and the substrate is supported in a noncontact manner so as to be substantially horizontal. Further, a portion subject to exposure of the substrate is held by a fixed-point stage from below in a noncontact manner, and the surface position of the portion subject to exposure is adjusted in a pinpoint manner. Accordingly, exposure can be performed on the substrate with high precision, and a configuration of a substrate stage device can be simplified.

Abstract: A substrate is held by adsorption by a substrate holding frame that is formed into a frame shape and is lightweight, and the substrate holding frame is driven along a horizontal plane by a drive unit that includes a linear motor. Below the substrate holding frame, a plurality of air levitation units are placed that support by levitation the substrate in a noncontact manner such that the substrate is substantially horizontal, by jetting air to the lower surface of the substrate. Since the plurality of air levitation units cover a movement range of the substrate holding frame, the drive unit can guide the substrate holding frame (substrate) along the horizontal plane at high speed and with high precision.

Abstract: The present invention relate to a drug for treating circulatory insufficiency containing a benzopyran derivative represented by the following general formula (I): and/or a physiologically acceptable salt thereof as an active ingredient, wherein R1 is an alkyl group having 1 to 10 carbon atoms, or an alkenyl group having 2 to 10 carbon atoms; and any one of R2, R3, R4 and R5 is a hydroxyl group, an alkoxy group, an alkenyloxy group, an alkoxy group substituted with a hydroxyl group, or an alkoxy group substituted with a carboxy group, and the others are hydrogen atoms.

Abstract: While one ends of ropes are respectively tied to a ?Y side leg section and a +Y side leg section of a frame caster, the other ends of the ropes hang down in a ?Z direction via a plurality of pulleys fixed to the upper sections of frames that are each separated from an apparatus main body, and a weight having a weight corresponding to a half the weight to be reduced is tied to each of the other ends. In this case, even if the apparatus main body oscillates in vertical or lateral directions (normal directions of the pulleys) owing to the action of a vibration isolation table, the position of the weight only vertically moves by rotation of the pulleys, and the reduced amount of the apparatus weight does not vary. Further, since any coil springs are not used, sympathetic vibration with the apparatus main body and the vibration isolation table does not occur, which allows the attenuation characteristics of the vibration isolation table to be improved.

Abstract: In a liquid crystal exposure apparatus, base pads are respectively placed on two surface plates, and one step board is supported by the base pads. A device main body of an empty-weight cancelling device moves from above one of the surface plates to above the other by moving on the step board, and therefore, a boundary section between the two adjacent surface plates that are separately placed does not function as a guide surface used when the empty-weight cancelling device moves. Accordingly, a fine movement stage that holds a substrate can be guided along an XY plane with high accuracy although the two surface plates are placed apart.

Abstract: A substrate stage and an empty-weight canceling mechanism that supports an empty weight of the substrate stage are made up of separate bodies. Accordingly, the size and weight of the substrate stage (a structure including the substrate stage) can be reduced, compared with the case where the substrate stage and the empty-weight canceling mechanism are integrally configured. Further, due to movement of an X coarse movement stage and a Y coarse movement stage by an X drive mechanism and a Y drive mechanism, the substrate stage is driven in an XY plane and also the empty-weight canceling mechanism that supports the empty weight of the substrate stage is driven. With this operation, the substrate stage can be driven without difficulty even when the substrate stage and the empty-weight canceling mechanism are configured of separate bodies.

Abstract: The present invention relate to a drug for treating circulatory insufficiency containing a benzopyran derivative represented by the following general formula (I): and/or a physiologically acceptable salt thereof as an active ingredient, wherein R1 is an alkyl group having 1 to 10 carbon atoms, or an alkenyl group having 2 to 10 carbon atoms; and any one of R2, R3, R4 and R5 is a hydroxyl group, an alkoxy group, an alkenyloxy group, an alkoxy group substituted with a hydroxyl group, or an alkoxy group substituted with a carboxy group, and the others are hydrogen atoms.

Abstract: A device production system includes a substrate transport section which transports a substrate; a plurality of exposure sections each of which is capable of exposing the substrate; and a controller which cooperatively controls the substrate transport section and the plurality of exposure sections so that operation states of the plurality of exposure sections are in desired states. Accordingly, it is possible to improve the efficiency both in using the substrate and in the device production.

Abstract: A light source apparatus is equipped with a discharge lamp, which has a glass tube that forms a light emitting part and a base member that is coupled thereto, and a mounting apparatus that holds the discharge lamp via the base member. Therein, the base member has a flange part that contacts positioning plate of the mounting apparatus, and a fixed part that is urged with a pressing force that presses the flange part to the positioning plate. Furthermore, the mounting apparatus has a fixing arm that urges the fixed part by a compression coil spring.

Abstract: This therapeutic agent for chronic obstructive pulmonary disease comprises, an active ingredient, at least one of a 7-aminoquinolinone derivative represented by the general formula (I): wherein R1 represents a hydrogen atom or an alkyl group; R2 and R3 each represents a group selected from a hydrogen atom, an acyl group, an alkyl group and an alkenyl group; and R4 and R5 each represents a group selected from a hydrogen atom, an acyl group, an alkyl group, an alkenyl group and an aralkyl group, and its physiologically acceptable salt.

Abstract: A control apparatus for controlling a transmission of a hybrid vehicle. The hybrid vehicle includes an engine, a motor, and a transmission for transmitting the rotation of the engine to wheels. The transmission is constructed to engage/disengage clutches by a hydraulically operated control apparatus. The hydraulically operated control apparatus is controlled such that all the clutches are disengaged during the regeneration of the motor.

Abstract: The present invention provides a compound which is highly safe in terms of toxicity and has a stronger antiallergic action, and particularly has an action of inhibiting both immediate and delayed type allergic reactions. A benzopyran derivative represented by the general formula (I): wherein R1 is an alkyl group having 1-10 carbon atoms or an alkenyl group having 2-10 carbon atoms, and one of R2, R3, R4, and R5 is an alkoxy group substituted with a hydroxy group or an alkoxy group substituted with a carboxy group, and the others are hydrogen atoms or physiologically acceptable salts thereof are superior as the active ingredient of an antiallergic agent.

Abstract: A control apparatus for controlling a transmission of a hybrid vehicle. The hybrid vehicle includes an engine, a motor, and a transmission for transmitting the rotation of the engine to wheels. The transmission is constructed to engage/disengage clutches by a hydraulically operated control apparatus. The hydraulically operated control apparatus is controlled such that all the clutches are disengaged during the regeneration of the motor.

Abstract: The present invention provides a compound which is highly safe in terms of toxicity and has a stronger antiallergic action, and particularly has an action of inhibiting both immediate and delayed type allergic reactions.

Abstract: A substrate supporting apparatus and a substrate holder are prepared, the substrate supporting apparatus including an opening portion having a plurality of openings smaller than the substrate and a support portion made up of portions other than the opening portion, and the substrate holder having a housing portion which houses at least a portion of the support portion. The substrate supporting apparatus supporting the substrate is mounted on the holder in a state where at least a portion of the support portion is housed in the housing portion. Accordingly, the substrate and the substrate supporting apparatus are integrally supported by the holder in a state where the substrate directly contacts an upper surface of the holder.

Abstract: A control device of a transmission capable of efficiently collecting regenerative energy and smoothly changing a speed stage by controlling pressure oil supplied to and discharged from each friction element of a transmission when regenerative braking is carried out could be provided on a hybrid vehicle having an engine 1, a motor 2, and a transmission 5 transmitting a rotation of an engine 1 to a wheel T, wherein a transmission 5 is arranged so as to be capable of intermitting clutch CL1˜CL4 by a hydraulic control device 6 and a hydraulic control device 6 is one for a transmission 5 capable of controlling for cutting off clutch CL1˜CL4 when regenerating a motor.

Abstract: The present invention provides a system for making and publishing a homepage.

Abstract: An object is to provide: novel quinolinone glycosides which are useful as medicines; processes for producing the quinolinone glycosides; intermediates for synthesis; and medicines, and particularly anti-allergic agents, which comprise the quinolinone glycoside as an active ingredient.

Abstract: The present invention offers 7-aminoquinolinone derivatives, physiologically acceptable salts thereof, anti-allergic agents having as an active ingredient a 7-aminoquinolinone derivative or physiologically acceptable salt thereof, and 7-nitroquinolinone derivatives, wherein the 7-aminoquinolinone derivative is expressed by the following general formula (I): ##STR1## wherein R.sub.1 is a hydrogen atom or an alkyl group;R.sub.2 and R.sub.3 are mutually different groups, each of which is selected from among hydrogen atoms, acyl groups, alkyl groups or alkenyl groups; andR.sub.4 and R.sub.5 are mutually different or identical groups, each of which is selected from among hydrogen atoms, acyl groups, alkyl groups, alkenyl groups or aralkyl groups;and physiologically acceptable salts thereof.