Patents by Inventor Yasuo Itakura

Yasuo Itakura has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Casing for laser device, production method and cleaning method of the same
    Patent number: 6627843
    Abstract: A casing for a laser device in which contaminants do not generate even if it is radiated with laser light, a production method and a cleaning method of the same are provided. For this purpose, the cleaning method is a method of cleaning a casing (19) for an ultraviolet laser device, an inside of which laser light (11) passes through, comprises the steps of purging the inside of the casing (19) with an inert gas, and radiating F2 cleaning laser light (16) oscillated from an F2 molecular laser light radiating device (15) to the inside of the casing (19) to thereby remove contaminants adhering to the inside of the casing (19).
    Type: Grant
    Filed: October 4, 2001
    Date of Patent: September 30, 2003
    Assignee: Arms Komatsu Ltd.
    Inventors: Yasuo Itakura, Fumika Yoshida, Osamu Wakabayashi
  • Casing for laser device, production method and cleaning method of the same
    Publication number: 20020041617
    Abstract: A casing for a laser device in which contaminants do not generate even if it is radiated with laser light, a production method and a cleaning method of the same are provided. For this purpose, the cleaning method is a method of cleaning a casing (19) for an ultraviolet laser device, an inside of which laser light (11) passes through, comprises the steps of purging the inside of the casing (19) with an inert gas, and radiating F2 cleaning laser light (16) oscillated from an F2 molecular laser light radiating device (15) to the inside of the casing (19) to thereby remove contaminants adhering to the inside of the casing (19).
    Type: Application
    Filed: October 4, 2001
    Publication date: April 11, 2002
    Applicant: KOMATSU LTD.
    Inventors: Yasuo Itakura, Fumika Yoshida, Osamu Wakabayashi
  • Laser wavelength controlling apparatus
    Patent number: 5373515
    Abstract: A laser wavelength controlling apparatus adapted for controlling the wavelength of a narrow-band oscillation laser beam at a high accuracy for long period of time even if environmental conditions such as the atmospheric temperature and pressure changes to some degree.
    Type: Grant
    Filed: June 21, 1991
    Date of Patent: December 13, 1994
    Assignee: Kabushiki Kaisha Komatsu Seisakusho
    Inventors: Osamu Wakabayashi, Yasuo Itakura, Masahiko Kowaka, Yoshino Amada
  • Method and apparatus for sensing the wavelength of a laser beam
    Patent number: 4926428
    Abstract: A method and apparatus for sensing the wavelength of a laser beam using an optogalvano effect by atoms or molecules in plasma. Atoms or molecules in the plasma are irradiated with the laser beam. The impedance of the plasma at that time is sensed to sense whether the wavelength of the laser beam coincides with a predetermined absolute wavelength. The sensed result is used to control the wavelength of the laser beam.
    Type: Grant
    Filed: January 29, 1988
    Date of Patent: May 15, 1990
    Assignee: Kabushiki Kaisha Komatsu Seisakucho
    Inventors: Koichi Kajiyama, Kaoru Saito, Yasuo Itakura, Osamu Wakabayashi, Masahiko Kowaka, Tadayoshi Yamaguchi
  • Light source for reduced projection
    Patent number: 4856018
    Abstract: A reduced projection light source comprises a laser device for emitting laser light having a transverse mode of multimodes, and an etalon located between a chamber of the laser device and a total reflection mirror. The light source is used as an exposure light source for transfer printing an ultrafine pattern on a semiconductor wafer.
    Type: Grant
    Filed: January 20, 1987
    Date of Patent: August 8, 1989
    Assignee: Kabushiki Kaisha Komatsu Seisakusho
    Inventors: Yasuhiro Nozue, Koichi Kajiyama, Kaoru Saito, Osamu Wakabayashi, Masahiko Kowaka, Yasuo Itakura