Patents by Inventor Yasuo Munakata

Yasuo Munakata has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vacuum device for handling workpieces
    Patent number: 4948979
    Abstract: A vacuum device comprises a vacuum working chamber for performing a predetermined process to a material such as substrate and a vacuum prechamber for changing the material. Both the vacuum chambers are coupled by a coupling member so as to communicate the interiors of the respective chambers and the communcation is managed by valve means located for the coupling member. Both vacuum chambers may be constructed so as to be movable or pivotable horizontally with respect to each other. The coupling member may be constructed as an independent member which is inserted between both the vacuum chambers as occasion demands.
    Type: Grant
    Filed: December 21, 1988
    Date of Patent: August 14, 1990
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Yasuo Munakata, Mineo Gotou