Patents by Inventor Yasuo Sugihara

Yasuo Sugihara has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5705089
    Abstract: An acidic or basic hydrogen peroxide cleaning fluid for cleaning a semiconductor substrate, comprising a phosphonic acid chelating agent and a wetting agent, or comprising a wetting agent alone.
    Type: Grant
    Filed: March 10, 1993
    Date of Patent: January 6, 1998
    Assignee: Mitsubishi Gas Chemical Company, Inc.
    Inventors: Yasuo Sugihara, Kazushige Tanaka, Ikue Sakuma
  • Patent number: 5614165
    Abstract: A process for purification of hydrogen peroxide is provided which comprises contacting an aqueous hydrogen peroxide solution with a chelate resin. According to the process, it is possible to remove impurities in the aqueous hydrogen peroxide solution in high efficiency, and particularly, it is possible to remove iron, aluminum, etc., which are difficult to remove singly by ion exchange resins, up to extremely low concentrations. Highly pure hydrogen peroxide solutions obtained by this invention can suitably used for washing of silicon wafers.
    Type: Grant
    Filed: March 21, 1995
    Date of Patent: March 25, 1997
    Assignee: Mitsubishi Gas Chemical Co., Inc.
    Inventors: Yasuo Sugihara, Kazushige Tanaka, Hisashi Sakaitani
  • Patent number: 5328894
    Abstract: A food-preserving agent comprising an oxygen absorbent and a compound represented by the following structural formula (I): ##STR1## , wherein n is an integer of 2 to 4 and X is H or CH.sub.3, can remove generated acetaldehyde effective, thereby preserving food without any fear of disagreeable odor for a long duration.
    Type: Grant
    Filed: March 5, 1992
    Date of Patent: July 12, 1994
    Assignee: Mitsubishi Gas Chemical Company, Inc.
    Inventors: Hidechika Wakabayashi, Yasuo Sugihara, Akira Hosomi, Futoshi Nakaya
  • Patent number: 5302311
    Abstract: In cleaning a semiconductor substrate with a basic aqueous solution of hydrogen peroxide, it is an object to prevent metal impurities adhering to the substrate surface. A cleaning solution of a semiconductor substrate which comprises a basic aqueous solution of a hydrogen peroxide containing a chelating agent having at least two phosphonic acid groups. Preferred chelating agent is 1,2-propylenediamine tetra(methylene phosphonic acid) in amount of 1 ppb to 1000 ppm, together with 0.1 to 20% by weight of hydrogen peroxide and, optionally, 0.1 to 10% by weight of ammonia. Even if the cleaning solution is contaminated with metal impurities, characteristics of semiconductor elements prepared from a substrate are stabilized since no metal impurities adhere on the substrate surface.
    Type: Grant
    Filed: September 24, 1992
    Date of Patent: April 12, 1994
    Assignee: Mitsubishi Gas Chemical Company, Inc.
    Inventors: Yasuo Sugihara, Kazushige Tanaka, Michiya Kawakami
  • Patent number: 5180518
    Abstract: The present invention relates to novel oxygen absorbent comprising as main ingredients a 1,2-glycol, glycerine or sugar alcohol with the oxygen absorbent materials.
    Type: Grant
    Filed: April 18, 1990
    Date of Patent: January 19, 1993
    Assignee: Mitsubishi Gas Chemical Co., Inc.
    Inventors: Yasuo Sugihara, Toshio Komatsu, Takashi Kashiba, Hidetoshi Hatakeyama, Teruo Takeuchi
  • Patent number: 5102673
    Abstract: There are disclosed an oxygen absorbent comprising boron or a reducing boron compound, an alkaline substance and a carrier, an oxygen absorbent parcel formed by enclosing said oxygen absorbent in a permeable packaging parcel, a food package and a package of a metallic or electronic product or part containing said oxygen absorbent parcel.
    Type: Grant
    Filed: October 24, 1990
    Date of Patent: April 7, 1992
    Assignee: Mitsubishi Gas Chemical Company, Inc.
    Inventors: Yasuo Sugihara, Teruo Takeuchi, Hidechika Wakabayashi, Akira Hosomi, Toshio Komatsu
  • Patent number: 4999179
    Abstract: A method for purifying an impure aqueous hydrogen peroxide solution, which comprises passing an impure aqueous hydrogen peroxide solution through(a) a cation exchange resin layer, a halogen-containing porous resin layer and an anion exchange resin layer in this order, or(b) a halogen-containing porous resin layer, a cation exchange resin layer and an anion exchange resin layer in this order, or(c) a halogen-containing porous resin layer and a cation/anion mixed-bed resin layer in this order to contact said solution with each resin.
    Type: Grant
    Filed: December 7, 1989
    Date of Patent: March 12, 1991
    Assignee: Mitsubishi Gas Chemical Company, Inc.
    Inventors: Yasuo Sugihara, Shigeki Shimokawa
  • Patent number: 4792403
    Abstract: A method of removing organic impurities from an aqueous solution of hydrogen peroxide, which comprises bringing an aqueous solution of hydrogen peroxide containing organic impurities into contact with a halogen-containing porous resin having a true specific gravity in the wet state of 1.1 to 1.3.
    Type: Grant
    Filed: July 31, 1987
    Date of Patent: December 20, 1988
    Assignee: Mitsubishi Gas Chemical Company, Inc.
    Inventors: Shizuo Togo, Yasuo Sugihara, Takaki Ikebe