Abstract: A microscope unit comprises: a main lens barrel of an imaging optical system; and an illumination lens barrel of an illumination optical system connected to the main lens barrel, the illumination optical system having: a collector lens that collects light that has been irradiated from a light source; a fly-eye lens allowing to be transmitted therethrough light from the collector lens; a first relay lens having lenses that relay light from the fly-eye lens; a field stop that stops down a range of light from the first relay lens; a second relay lens that relays to a beam splitter light from the first relay lens; and the beam splitter guiding at least a part of light incident thereon to the objective lens and allowing to be transmitted therethrough to a side of an imaging sensor at least a part of light incident thereon from the objective lens.

Abstract: A microscope unit comprises: a main lens barrel of an imaging optical system, the main lens barrel being configured capable of being fitted with an imaging sensor and an objective lens; and an illumination lens barrel of an illumination optical system, the illumination lens barrel being connected to the main lens barrel and configured capable of being fitted with a light source, the illumination lens barrel having: a first lens barrel configured capable of being fitted with the light source; and an intermediate lens barrel connecting the main lens barrel and the first lens barrel, and a field stop of light irradiated from the light source being disposed more inwardly than an outer peripheral surface of the intermediate lens barrel is.

Abstract: A lens holding mechanism includes a lens barrel housing a lens that includes an entrance surface and an exit surface that are separated from each other in an optical axis direction, and a tapering surface, a diameter of which increases from the entrance surface side toward the exit surface side; a first abutting member that abuts, from the exit surface side, the lens housed in the lens barrel, and has an abutting portion that abuts the lens formed along a plane perpendicular to a reference axis of the lens barrel; and a second abutting member that abuts the tapering surface of the lens housed in the lens barrel, has an abutting portion that abuts the lens formed along a circle with a center point on the reference axis of the lens barrel, and holds the lens between the second abutting member and the first abutting member.

Abstract: A lens holding mechanism includes a lens barrel housing a lens that includes an entrance surface and an exit surface that are separated from each other in an optical axis direction, and a tapering surface, a diameter of which increases from the entrance surface side toward the exit surface side; a first abutting member that abuts, from the exit surface side, the lens housed in the lens barrel, and has an abutting portion that abuts the lens formed along a plane perpendicular to a reference axis of the lens barrel; and a second abutting member that abuts the tapering surface of the lens housed in the lens barrel, has an abutting portion that abuts the lens formed along a circle with a center point on the reference axis of the lens barrel, and holds the lens between the second abutting member and the first abutting member.

Abstract: An offset amount calibrating method that obtains the offset amount between a contact-type detector and an image probe for a surface profile measuring machine is provided. The method includes: setting on a stage a calibration jig that has a surface being provided with a lattice pattern with a level difference; measuring the lattice pattern of the calibration jig by the contact-type detector to obtain a first reference position of the lattice pattern; capturing the image of the lattice pattern of the calibration jig by the image probe to obtain a second reference position of the lattice pattern; and obtaining the offset amount from a difference between the first and second reference positions.

Abstract: A surface texture measuring machine includes: a stage, a contact-type detector having a stylus, an image probe, a relative movement mechanism and a controller. The controller includes: a center position calculating unit that, when the image probe enters position data of at least three points on a circular contour of a circular concave portion or a circular convex portion of an object, approximates the entered position data to a circle to obtain a center position of the circle; and a stylus setting unit that, after calculating the center position, operates the relative movement mechanism to position the stylus of the contact-type detector at the center position.

Abstract: A surface texture measuring machine includes: a stage, a contact-type detector having a stylus, an image probe, a relative movement mechanism and a controller. The controller includes: a center position calculating unit that, when the image probe enters position data of at least three points on a circular contour of a circular concave portion or a circular convex portion of an object, approximates the entered position data to a circle to obtain a center position of the circle; and a stylus setting unit that, after calculating the center position, operates the relative movement mechanism to position the stylus of the contact-type detector at the center position.

Abstract: An offset amount calibrating method that obtains the offset amount between a contact-type detector and an image probe for a surface profile measuring machine is provided. The method includes: setting on a stage a calibration jig that has a surface being provided with a lattice pattern with a level difference; measuring the lattice pattern of the calibration jig by the contact-type detector to obtain a first reference position of the lattice pattern; capturing the image of the lattice pattern of the calibration jig by the image probe to obtain a second reference position of the lattice pattern; and obtaining the offset amount from a difference between the first and second reference positions.

Abstract: To provide a surface profile measurement apparatus capable of efficient measurement of the surface profile of an object. A diamond indenter (16) is movably mounted. The tip end of the diamond indenter (16) is irradiated by light, and the light reflected by the tip end (17) is condensed through a lens (46). The condensed light is observed by a photo sensor (42) for measurement of the curvature radius of the tip end (17). Meanwhile, the light reflected by the tip end (17) and the light reflected by a reference body (66) together cause an interference fringe. The interference fringe is observed by a CCD camera (44) to measure the surface profile of tip end (17).

Abstract: A CCD camera (27) images a work to generate its image data. An imaging optical system (24, 25, 26) focuses an image of the work on the CCD camera (27). A down-projection illumination source (31) includes at least one semiconductor light-emitting device for producing a down-projection illumination light to illuminate the work from above. An illuminating optical system (29) joins the illumination light from the down-projection illumination source (31) to the imaging optical system in order to lead the illumination light to the work via the imaging optical system. These optical components are mounted on a chassis (23) to construct an imaging probe (1), which is employed at any angle as a measuring probe of a three-dimensional tester.

Abstract: To provide a surface profile measurement apparatus capable of efficient measurement of the surface profile of an object. A diamond indenter (16) is movably mounted. The tip end of the diamond indenter (16) is irradiated by light, and the light reflected by the tip end (17) is condensed through a lens (46). The condensed light is observed by a photo sensor (42) for measurement of the curvature radius of the tip end (17). Meanwhile, the light reflected by the tip end (17) and the light reflected by a reference body (66) together cause an interference fringe. The interference fringe is observed by a CCD camera (44) to measure the surface profile of tip end (17).

Abstract: A focus detection unit including an optical system employing an image sandwiching method is disclosed. In the focus detection unit, a double slit mask (12) forming double sight lines is disposed on the optical axis of a lamp 10 while a single slit mask (16) forming an single sight line is disposed on the optical axis of a lamp (14). A triangular pole prism 18 is provided, consisting of first and second side surfaces, which together constitutes an edge, and a plane opposing the edge. The prism (18) is disposed such that the double and single sight line are able to irradiate the first and second side surfaces. The prism reflects the incoming lines toward a plane before the right-angle edge. Before the edge of the prism (18), a projection lens (20) is provided for forming images of the double and single sight lines which have been reflected by the prism (18) and separated by a mask (22), at a both aiming line imaging position 100. The images are projected onto a workpiece.