Patents by Inventor Yasushi Hayashida

Yasushi Hayashida has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Coating and developing system and coating and developing method
    Publication number: 20060162646
    Abstract: A coating and developing system includes a resist film forming unit block and antireflection film forming unit blocks stacked up in layers to form a resist film and an antireflection film underlying the resist film and an antireflection film overlying the resist film in a small space. The coating and developing system is capable of coping with either of a case where antireflection films are formed and a case where any antireflection film is not formed and needs simple software. Film forming unit blocks, namely, a TCT layer B3, a COT layer B4 and a BCT layer B5, and developing unit blocks, namely, DEV layers B1 and B2, are stacked up in layers in a processing block S2. The TCT layer B3, the COT layer B4 and the BCT layer B5 are used selectively in the case where antireflection films are formed and the case where any antireflection film is not formed. The coating and developing system is controlled by a simple carrying program and simple software.
    Type: Application
    Filed: April 29, 2005
    Publication date: July 27, 2006
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Masami Akimoto, Shinichi Hayashi, Yasushi Hayashida, Nobuaki Matsuoka, Yoshio Kimura, Issei Ueda, Hikaru Ito
  • Steering gear apparatus of rack-and-pinion type
    Patent number: 5724857
    Abstract: A steering gear apparatus of the rack-and-pinion type including a pinion formed with helical teeth and a rack member formed with helical teeth which are brought into meshing engagement with the helical teeth of the pinion in such a manner that a steering effort is applied to the meshed portion of the helical teeth of the pinion and rack member at a predetermined angle relative to an axis line of the rack member, the rack member being resiliently biased toward the pinion, wherein the helical teeth of the pinion or the rack member each are formed with a tip portion to be brought into engagement with each root of the helical teeth of the rack member or the pinion.
    Type: Grant
    Filed: September 10, 1996
    Date of Patent: March 10, 1998
    Assignee: Toyota Jidosha Kabushiki Kaisha
    Inventors: Yoshisada Wada, Takahiro Iwase, Kunio Hayashi, Kazuhiko Tsuda, Shigemi Shioya, Yasushi Hayashida
  • Steering gear apparatus of rack-and-pinion type
    Patent number: 5596904
    Abstract: A steering gear apparatus of the rack-and-pinion type including a pinion formed with helical teeth and a rack member formed with helical teeth which are brought into meshing engagement with the helical teeth of the pinion in such a manner that a steering effort is applied to the meshed portion of the helical teeth of the pinion and rack member at a predetermined angle relative to an axis line of the rack member, the rack member being resiliently biased toward the pinion, wherein the helical teeth of the pinion or the rack member each are formed with a tip portion to be brought into engagement with each root of the helical teeth of the rack member or the pinion.
    Type: Grant
    Filed: May 16, 1995
    Date of Patent: January 28, 1997
    Assignee: Toyota Jidosha Kabushiki Kaisha
    Inventors: Yoshisada Wada, Takahiro Iwase, Kunio Hayashi, Kazuhiko Tsuda, Shigemi Shioya, Yasushi Hayashida
  • Exposure apparatus
    Patent number: 5028955
    Abstract: An exposure apparatus of this invention is used in an exposure process of semiconductor and LCD devices.
    Type: Grant
    Filed: February 14, 1990
    Date of Patent: July 2, 1991
    Assignees: Tokyo Electron Limited, Tokyo Electron Kyushu Limited
    Inventors: Yasushi Hayashida, Noriyuki Anai, Osamu Hirakawa, Masami Akimoto, Yasuhiro Sakamoto, Keisuke Shigaki, Masashi Moriyama