Abstract: Provided is a motor stator which includes: a ring-shaped stator core; a plurality of tooth portions protruding inward from the stator core; an insulator made of an insulating material and mounted on the plurality of tooth portions; a stator coil wound around each of the plurality of tooth portions via the insulator; a lead wire; and a connection portion connecting the stator coil and the lead wire, in which the insulator includes a connection housing portion housing the connection portion.

Abstract: Provided is a motor stator which includes: a ring-shaped stator core; a plurality of tooth portions protruding inward from the stator core; an insulator made of an insulating material and mounted on the plurality of tooth portions; a stator coil wound around each of the plurality of tooth portions via the insulator; a lead wire; and a connection portion connecting the stator coil and the lead wire, in which the insulator includes a connection housing portion housing the connection portion.

Abstract: A stator of a rotating armature is provided which has: a stator core comprising laminated electromagnetic steel plates, the stator core including a plurality of teeth and slots formed on an inner periphery thereof; a first insulator and a second insulator inserted in the stator core; and windings wound around the teeth, wherein the first insulator includes a first comb-like engagement portion placed in the slots, the second insulator includes a second comb-like engagement portion placed in the slots, the first comb-like engagement portion includes a first tapered shape formed on a first distal end portion thereof, the second comb-like engagement portion includes a second tapered shape and a third tapered shape formed each on either side of a second distal end portion thereof in a radial direction of the stator core, and the first end portion and second distal end portion overlap with each other in the radial direction.

Abstract: A stator of a rotating armature is provided which has: a stator core comprising laminated electromagnetic steel plates, the stator core including a plurality of teeth and slots formed on an inner periphery thereof; a first insulator and a second insulator inserted in the stator core; and windings wound around the teeth, wherein the first insulator includes a first comb-like engagement portion placed in the slots, the second insulator includes a second comb-like engagement portion placed in the slots, the first comb-like engagement portion includes a first tapered shape formed on a first distal end portion thereof, the second comb-like engagement portion includes a second tapered shape and a third tapered shape formed each on either side of a second distal end portion thereof in a radial direction of the stator core, and the first end portion and second distal end portion overlap with each other in the radial direction.

Abstract: A stepper motor includes: a rotor including a rotor core and a permanent magnet, the rotor core including a plurality of teeth; and a stator arranged around the rotor while being spaced apart from the rotor and including a plurality of magnetic pole teeth, the magnetic pole teeth including a plurality of teeth and projecting toward the rotor. A winding is wound around every other magnetic pole tooth. A phase of the teeth of the magnetic pole teeth with no winding therearound is shifted from a phase of the teeth of the other magnetic pole teeth.

Abstract: A coil is wound via an electrically insulating member within a slot of a stator core of an electromagnetic motor which is formed of a stator and a rotor. Groove portions are formed to oppose one another in respective opposing portions of a slot opening portion side of the electrically insulating member. An electrically insulating sheet is disposed by being inserted into the pair of groove portions.

Abstract: A movable body apparatus moves an object and includes a measurement member in a cantilevered supported state; a moving member having a holding section of the object and a space section into which the measurement member can be inserted; a measurement system that measures positional information of the moving member by irradiating a grating member with a measurement beam via a head and receiving light of the measurement beam from the grating member, the head being provided at one of the measurement member and the moving member, and the grating member being provided at the other of the measurement member and the moving member; and a drive system that moves the moving member based on the positional information. The measurement member has a cross-sectional shape in which its fixed end is thicker than its free end.

Abstract: An exposure apparatus is equipped with a first and second stage that are movable independently from each other within a predetermined plane and each have a table with a grating positioned under a surface where a wafer is mounted, and a third stage that is movable independently from the first and second stages within a predetermined plane and includes a light-receiving plane that receives an energy beam via an optical system. An optical member is provided that is at least a part of a measurement device, which performs a measurement related to exposure based on a light-receiving result of the energy beam received via the light-receiving plane. In an exposure station and measurement station, a first and second measurement system are respectively provided that measure the position of the tables by irradiating the grating of the first or second stage from below with a measurement beam.

Abstract: A stepper motor includes: a rotor including a rotor core and a permanent magnet, the rotor core including a plurality of teeth; and a stator arranged around the rotor while being spaced apart from the rotor and including a plurality of magnetic pole teeth, the magnetic pole teeth including a plurality of teeth and projecting toward the rotor. A winding is wound around every other magnetic pole tooth. A phase of the teeth of the magnetic pole teeth with no winding therearound is shifted from a phase of the teeth of the other magnetic pole teeth.

Abstract: A coil is wound via an electrically insulating member within a slot of a stator core of an electromagnetic motor which is formed of a stator and a rotor. Groove portions are formed to oppose one another in respective opposing portions of a slot opening portion side of the electrically insulating member. An electrically insulating sheet is disposed by being inserted into the pair of groove portions.

Abstract: An exposure apparatus is equipped with a first and second stage that are movable independently from each other within a predetermined plane and each have a table with a grating positioned under a surface where a wafer is mounted, and a third stage that is movable independently from the first and second stages within a predetermined plane and includes a light-receiving plane that receives an energy beam via an optical system. An optical member is provided that is at least a part of a measurement device, which performs a measurement related to exposure based on a light-receiving result of the energy beam received via the light-receiving plane. In an exposure station and measurement station, a first and second measurement system are respectively provided that measure the position of the tables by irradiating the grating of the first or second stage from below with a measurement beam.

Abstract: An exposure apparatus exposes a substrate with an exposure light through an exposure liquid. The exposure apparatus includes an optical element from which the exposure light exits; a stage which is movable on the light-exit side of the optical element; a certain member which is provided on the stage; and a vibration generator which vibrates the certain member to apply vibration to the liquid in the liquid immersion space formed on the certain member. It is possible to suppress the deterioration of the performance which would be otherwise caused by any contamination.

Abstract: An exposure apparatus exposes a substrate with an exposure light through an exposure liquid. The exposure apparatus includes an optical element from which the exposure light exits; a stage which is movable on the light-exit side of the optical element; a certain member which is provided on the stage; and a vibration generator which vibrates the certain member to apply vibration to the liquid in the liquid immersion space formed on the certain member. It is possible to suppress the deterioration of the performance which would be otherwise caused by any contamination.

Abstract: A pair of connecting wire hooks are disposed on both sides of a nozzle receiving groove in an extended slot space (a first extended space) to sandwich an extended portion of an extended virtual space (a third extended space). In this configuration, the pair of connecting wire hooks are not located within the third extended space. Thus, in the stator for rotary electric machine, the space factor of the winding portion may be increased in a situation where the connecting wire hook is disposed within the first extended space.

Abstract: A pair of connecting wire hooks are disposed on both sides of a nozzle receiving groove in an extended slot space (a first extended space) to sandwich an extended portion of an extended virtual space (a third extended space). In this configuration, the pair of connecting wire hooks are not located within the third extended space. Thus, in the stator for rotary electric machine, the space factor of the winding portion may be increased in a situation where the connecting wire hook is disposed within the first extended space.

Abstract: A stator for rotary electric machines is provided, in which a volume occupied by winding portions may be increased and a connecting wire may readily be engaged to prevent from coming off. A plurality of connecting wire engaging hooks 23, with which the connecting wire extending from the winding portion is engaged, are respectively disposed in the vicinity of border portions between a plurality of magnetic pole sections 11 and a yoke 9, corresponding to the magnetic pole sections 11. A mounting location of a connector 29 on a circuit substrate 7 is determined so that all of ends of a plurality of terminal conductors of the connector may be located between adjoining two of the connecting wire engaging hooks 23. With this arrangement, all of the ends 31a of the plurality of terminal conductors 31 may be disposed between adjoining two of a plurality of the winding portions 3, and be spaced from the winding portions 3.

Abstract: An exposure apparatus exposes a substrate with an exposure light through an exposure liquid. The exposure apparatus includes an optical element from which the exposure light exits; a stage which is movable on the light-exit side of the optical element; a certain member which is provided on the stage; and a vibration generator which vibrates the certain member to apply vibration to the liquid in the liquid immersion space formed on the certain member. It is possible to suppress the deterioration of the performance which would be otherwise caused by any contamination.

Abstract: There is provided a maintenance method capable of efficiently maintaining an exposure apparatus performing exposure by the liquid immersion method. The method for maintaining the exposure apparatus which exposes a substrate with an exposure light via a projection optical system and a liquid of an liquid immersion area includes: a moving step of arranging a measuring table to be opposite to a nozzle member forming the liquid immersion area; an accumulating step of supplying the liquid onto the measuring table by using the nozzle member, and accumulating the supplied liquid in a cylinder portion; and a cleaning step of jetting the liquid accumulated in the accumulating step from a jet nozzle portion to an area including at least a part of a liquid contact portion, which has a possibility of coming into contact with the liquid, during liquid immersion exposure.